The crystal reorganization of the IrMn thin film was observed by the in situ thermal annealing in the X-ray diffraction (XRD) and electron energy loss spectroscopy. From room temperature to 700 °C, the in situ annealing measurements identify the different Mn diffusion effects in three temperature ranges. First, between room temperature and 300 °C, the XRD profiles show the reorganization of Mn atoms from interstitials to IrMn lattice points. Second, between 300 and 400 °C, we observed the diffusion of Mn atoms from the IrMn thin film to the surface, causing the atomic Mn/Ir ratio to drop from 10 to 7. The MnO appeared on the film surface in this temperature range. Third, from 400 to 700 °C, the O content in the IrMn thin film increases to 8%, while the Mn/Ir ratio continuously decreases from 7 to 5. The scanning transmission electron microscopy images also show that the crystal structure of IrMn thin film completely degrades to another structure.
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