AbstractA comparison of devices with different source–drain gaps has been performed on AlInN/GaN high electron mobility transistors (HEMTs) grown on SiC. The cut‐off frequency is effectively improved through shrinking source drain space and reducing gate parasitic capacitance. Our devices feature an fT of 188 GHz and fMAX of 200 GHz, which is the highest fMAX ever achieved to date for AlInN‐based HEMTs. At 10 (20) GHz, our HEMTs exhibit a low minimum noise figure Fmin of 0.62 (1.5) dB together with a high associated gain GA of 15.4 (13.3) dB. These Fmin values are among the lowest reported for deep submicrometer GaN HEMTs, and the GA are the best values so far in the literature, demonstrating the tremendous potential of AlInN/GaN HEMTs for microwave low‐noise applications.
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