Miniature Sensor Research Articles

Differential Pulse Voltammetric Tuning of the Screen-Printed Carbon Electrode Surface to Enhance the Electrochemical Performance and Multiplex Detection

Screen-Printed Carbon Electrode (SPCE) has shown tremendous scope for the miniaturization and commercialization of low-cost electrochemical sensors and biosensors devices. But the commercial SPCEs have a narrow potential window (PW) that limits their versatile applications for various analytes owing to the presence of some inherent redox peaks in the wider PW. In this work, we have explored the most effective and innovative electrochemical tuning of the SPCE surface using DPV (differential pulse voltammetry) for the removal of those inherent redox peaks that are responsible for narrowing the working PW. After that, the electrochemical performance of the tuned SPCE electrode was evaluated in terms of a range of electrochemical parameters including reproducibility by CV (Cyclic Voltammetry), DPV and EIS (electrochemical impedance spectroscopy) measurements using [Fe(CN)6]3−/4− as a model redox analyte. In addition, the suitability of the tuned electrode for multiple analytes detection was tested in presence of a mixture of Cd2+ (cadmium), Cu2+ (copper) and Hg2+ (Mercury) ions using CV and DPV techniques. The electrochemical analysis data show that after electrochemical DPV treatment, the SPCE surface exhibits excellent reproducibility and electrochemical performance within a wider PW minimizing their inherent drawback creating a wide scope of their precise applications in various fields.

Triggering Magnets for Wiegand Sensors: Electrodeposited and Origami-Magnetized CoNiP Micro-Magnets.

Miniature sensors are key components for applications in the Internet of Things (IoT), wireless sensor networks, autonomous vehicles, smart cities, and smart manufacturing. As a miniature and self-powered magnetic sensor, the Wiegand sensor possesses advantageous traits including changing-rate-independent output, low cost, and remarkable repeatability and reliability. A typical Wiegand sensor requires hard magnetic pole pieces that provide external fields for triggering voltage outputs that are called Wiegand pulses. However, the wire-shaped sensing element of Wiegand sensors is the critical issue that limits the design, selection, and adoption of the external triggering magnets. Currently, the widely used pole piece materials are rare-earth magnets. However, adopting rare-earth magnets brings strong stray fields, causing an electromagnetic interference (EMI) problem. In this study, patterned CoNiP hard magnets were electrodeposited on flexible substrates through microfabrication. Origami magnetization was utilized to control the resultant stray fields and thus the pole piece of CoNiP magnets can successfully trigger the output of the Wiegand pulse. In comparison, the output voltage of the triggered pulse acquired through the patterned CoNiP magnets is comparable to that acquired by using the rare-earth magnets. Furthermore, both the volume (and hence the weight) of the Wiegand sensor and the EMI issue can be significantly reduced and mitigated, respectively, by the CoNiP magnets.

An improved authentication and key management scheme in context of IoT-based wireless sensor network using ECC

Wireless sensor network (WSN) is used for sensing data/information from the nearby environment with the help of various spatially dispersed miniature sensor devices/nodes and forwarding the data to the direction of the base station which is connected to the network through the Internet for processing the collected data. Currently, Internet of Things (IoT) based smart computing applications are becoming popular in which WSN is used to run a process to output information from sensed data or events. However, these sensor nodes have less computation ability and low power capacity. In these resource-constrained WSNs, remote user authentication is a serious challenge that demands the attention of the researchers’ community. Several authentication protocols which address a variety of security concerns are present in the literature. Ghani et al. proposed an efficient authentication and key management scheme that claims to be resistant to known attacks. During the study of their scheme, we found that it is efficient and effective for protecting against a few attacks. However, it does not have the ability to counter several security threats like user impersonation attack, insider attack, database attack, and stolen smart card attack. To counter these aforesaid security loopholes, in this paper a new ECC integrated scheme suitable for IoT-based WSN with a higher level of protection is proposed. The informal security analysis using mathematical approaches and the formal security analysis using a well-accepted AVISPA simulator and BAN logic ensures that the suggested work is highly secure from all the relevant threats. Moreover, the performance analysis and comparison of the proposed scheme with the most recent relevant schemes proves that our scheme is much more efficient in terms of computation, communication, and storage overheads than all the available schemes in the literature.

Expansion of the Analytical Modeling of Capacitance for 1-N-1 Multilayered CID Structures with Monotonically Increasing/Decreasing Permittivity.

Capacitive sensors that utilize the Coplanar Interdigitated (CID) electrode structure are widely employed in various technical and analytical domains, such as healthcare, infectious disease management, pharmaceuticals, metrology, and environmental monitoring. The present exigency for lab-on-a-chip contrivances and the requisite for the miniaturization of sensors have led to the widespread adoption of CID sensors featuring multiple dielectric layers (DLs), either in the form of substrates or superstrates. Previously, we derived an analytical model for the capacitance of CID capacitive sensors with four distinct 1-N-1 patterns (namely, 1-1-1, 1-3-1, 1-5-1, and 1-11-1) using partial capacitance (PC) and conformal mapping (CM) techniques. The aforementioned model has been employed in various applications wherein the permittivity of successive layers exhibits a monotonic decrease as one moves away from the electrode plane, resulting in highly satisfactory outcomes. Nevertheless, the PC technique is inadequate for structures with multiple layers where the permittivity exhibits a monotonic increase as the distance from the electrodes increases. Given these circumstances, it is necessary to adapt the initial PC method to incorporate these novel configurations. In this work, we have discussed a new approach, splitting the concept of PC into partial parallel capacitance (PPC) and partial serial capacitance (PSC), where new CM transformations are proposed for the latter case. Thus, the present study proposes a novel methodology to expand upon our prior analytical framework, which aims to incorporate scenarios where the permittivity experiences a reduction across successive layers. The outcomes are juxtaposed with the finite element simulation and analytical findings.

Tamm-surface plasmon resonances from nanograting-coupled plasmonic-photonic multilayer structure for an integrated fiber-optic sensing application

Simultaneous observation of Tamm plasmon (TP) and surface plasmon (SP) resonances has attracted much attention to improve the sensing performance and broaden the application field of plasmonic biosensors. Currently, enormous efforts are being devoted to simultaneously excite both SP and TP modes by exploiting total internal reflection. However, this method requires a bulky and complicated prism or microscopy setup to fulfill the phase-matching condition, limiting the miniaturization and integration of sensors. Herein, we propose and theoretically demonstrate a nanograting-coupled plasmonic-photonic multilayer structure potentially integrated on the optical fiber tip, comprising a multilayer of photonic crystal (PC) inserted between a flat gold film and a gold nanograting. The proposed plasmonic-photonic multilayer structure enables the simultaneous excitation of TP and SP modes at the normal incidence by using the zeroth and first-order diffraction light of the nanograting, respectively. The resonant positions of both SP and TP modes can be independently adjusted by changing the nanograting period and the center wavelength of the PC bandgap. Due to the insensitivity of the TP mode to ambient surroundings, the proposed structure can be served as a self-reference SP resonance sensor for robust measurement where the sensitivity of the SP resonance sensor is determined by the wavelength shift of SP mode relative to TP mode. Moreover, the spectral overlapping of both TP and SP modes results in the abrupt change of reflection intensity, which enables a rapid judgment to the refractive index of ambient surroundings by observing the red or blue shifts of SP resonant position relative to the case of TP. The simultaneous excitation of both TP and SP modes in the proposed structure opens a new path for improving detection accuracy and broadening application scenarios of fiber-optic SP resonance sensors.

Highly selective capacitive micromachined ultrasonic transducer–based miniature gravimetric CO2 sensor with in-situ calibration for relative humidity

The prototype gravimetric microelectromechanical imine functionalized CO2 sensor equipped with custom electronics and significantly increased stability under sub-percent concentrations is investigated. Instabilities caused by the relative air humidity were eliminated by two in-situ calibration methods: two-channel readings correction and single-channel correction by the reference disturbance. Capacitive micromachined ultrasound transducers (CMUT) were designed for 15 MHz nominal resonance frequency, while actual sensor readings were lower (over 12 MHz) due to the functionalization. The resonance frequency of polyethyleneimine (PEI) functionalized CMUT during sub-percent CO2 detection experienced instabilities of several hundred Hz while the relative humidity of the air was changed between 10% and 35%. Readings of graphene oxide (GOx) functionalized CMUT working in parallel with PEI functionalized CMUT were used for two-channel correction, resulting in highly stable sensor output, characterized by 3.2 Hz standard deviation during almost one hour experiment, while relative humidity varied between 10% and 25%. Single channel reading correction method resulted in larger residual instability, characterized by a standard deviation of up to 36 Hz over a two-hour experiment, however, it was found to be more effective for longer humidity-induced drifts, since reference disturbance of known relative humidity of 75% maintained by saturated NaCl solution technique was used.

MEMS sensor based on MOF-derived WO3-C/In2O3 heterostructures for hydrogen detection

Rational structure design of sensing materials is the most effective way to obtain a hydrogen (H2) sensor with optimal performance. Herein, a porous heterostructure WO3-C/In2O3 was designed and prepared by in-situ coupling carbon layer and WO3 into MOF-derived (metal organic framework) In2O3. In combination with Micro-Electro-Mechanical System (MEMS), a miniature H2 sensor using WO3-C/In2O3 as the active sensing material was fabricated. Compared with the bare In2O3 sensor, the sensor based on WCI-9 (the mass ratio of WO3 to In2O3 in WO3-C/In2O3 is 9 wt%) shows higher response value and lower operating temperature (Ra/Rg = 10.11@ 1000 ppm; 250 °C). Moreover, the WCI-9 sensor possesses a fast response-recovery speed (1.9/9.2 s@200 ppm) and a low limit of detection (LOD) (5 ppm) for H2. The good performance of the WCI-9 sensor is attributed to the hierarchical porous structure and multicomponent heterojunctions present in the material. This work not only provides an effective method for H2 detection, but also a strategy for constructing sensing materials with multicomponent heterojunctions.

All-optical nuclear quantum sensing using nitrogen-vacancy centers in diamond

Solid state spins have demonstrated significant potential in quantum sensing with applications including fundamental science, medical diagnostics and navigation. The quantum sensing schemes showing best performance under ambient conditions all utilize microwave or radio-frequency driving, which poses a significant limitation for miniaturization, energy efficiency, and non-invasiveness of quantum sensors. We overcome this limitation by demonstrating a purely optical approach to coherent quantum sensing. Our scheme involves the 15N nuclear spin of the Nitrogen-Vacancy (NV) center in diamond as a sensing resource, and exploits NV spin dynamics in oblique magnetic fields near the NV’s excited state level anti-crossing to optically pump the nuclear spin into a quantum superposition state. We demonstrate all-optical free-induction decay measurements—the key protocol for low-frequency quantum sensing—both on single spins and spin ensembles. Our results pave the way for highly compact quantum sensors to be employed for magnetometry or gyroscopy applications in challenging environments.

Progress of Photocapacitors.

In response to the current trend of miniaturization of electronic devices and sensors, the complementary coupling of high-efficiency energy conversion and low-loss energy storage technologies has given rise to the development of photocapacitors (PCs), which combine energy conversion and storage in a single device. Photovoltaic systems integrated with supercapacitors offer unique light conversion and storage capabilities, resulting in improved overall efficiency over the past decade. Consequently, researchers have explored a wide range of device combinations, materials, and characterization techniques. This review provides a comprehensive overview of photocapacitors, including their configurations, operating mechanisms, manufacturing techniques, and materials, with a focus on emerging applications in small wireless devices, Internet of Things (IoT), and Internet of Everything (IoE). Furthermore, we highlight the importance of cutting-edge materials such as metal-organic frameworks (MOFs) and organic materials for supercapacitors, as well as novel materials in photovoltaics, in advancing PCs for a carbon-free, sustainable society. We also evaluate the potential development, prospects, and application scenarios of this emerging area of research.

Miniature and high-performance optical fiber relative humidity sensor based on Fabry-Perot structure interacting with hydroxyethyl cellulose

A miniature Fabry-Perot fiber-optic sensor is demonstrated for high-performance relative humidity (RH) detection. This sensor is constructed by fusing a single-mode fiber to a small section of capillary coating the end with a hydroxyethyl cellulose film (HEC). The effects of capillary length and hydroxyethyl cellulose concentration on the RH response are investigated to obtain the preferential condition with capillary length of 102 μm and HEC concentration of 0.03 g/ml. A testing RH sensitivity of 1.24 nm/%RH can be achieved in the range of 48%RH to 60%RH. Simultaneously, small hysteresis errors are demonstrated in the tests with increasing and decreasing RH values. The dynamic measurements reveal a response time of 1.61 s and a recovery time of 2.1 s. The high sensitivity, good stability and simple fabrication process of the sensor make it promising for practical applications of relative humidity sensors.

Miniature magneto-mechanical resonators for wireless tracking and sensing.

Sensor miniaturization enables applications such as minimally invasive medical procedures or patient monitoring by providing process feedback in situ. Ideally, miniature sensors should be wireless, inexpensive, and allow for remote detection over sufficient distance by an affordable detection system. We analyze the signal strength of wireless sensors theoretically and derive a simple design of high-signal resonant magneto-mechanical sensors featuring volumes below 1 cubic millimeter. As examples, we demonstrate real-time tracking of position and attitude of a flying bee, navigation of a biopsy needle, tracking of a free-flowing marker, and sensing of pressure and temperature, all in unshielded environments. The achieved sensor size, measurement accuracy, and workspace of ~25 centimeters show the potential for a low-cost wireless tracking and sensing platform for medical and nonmedical applications.

All-Silica diaphragm-based optical fiber fabry-perot pressure sensor fabricated by CO2 laser melting capillary end face

An all-silica Diaphragm-based miniature optical fiber pressure sensor based on the Fabry-Perot (FP) interferometric principle is proposed. The FP structure is composed of a single-mode fiber and a fiber capillary end face diaphragm by a CO2 laser welding. The fabrication process and parameter control of all-silicon diaphragm are introduced in detail, and the pressure performance test system of FP is set up. The experimental results show that the fiber optic FP sensor has good sensitivity and linearity to air pressure, the sensitivity can reach 9.48 pm/kPa when the pressure ranges from 0 to 200 kPa, and the linearity is 0.998. All-silica diaphragm-based fiber FP pressure sensor fabricated by CO2 laser melting capillary end face is more compact, easy to produce, and has great potential in the extreme harsh environment.

Miniaturized wireless sensor enables real-time monitoring of food spoilage.

Food spoilage results in food waste and food-borne diseases. Yet, standard laboratory tests to determine spoilage (mainly volatile biogenic amines) are not performed regularly by supply chain personnel or end customers. Here we developed a poly(styrene-co-maleic anhydride)-based, miniature (2 × 2 cm2) sensor for on-demand spoilage analysis via mobile phones. To demonstrate a real-life application, the wireless sensor was embedded into packaged chicken and beef; consecutive readings from meat samples using the sensor under various storage conditions enabled the monitoring of spoilage. While samples stored at room temperature showed an almost 700% change in sensor response on the third day, those stored in the freezer resulted in an insignificant change in sensor output. The proposed low-cost, miniature wireless sensor nodes can be integrated into packaged foods, helping consumers and suppliers detect spoilage of protein-rich foods on demand, and ultimately preventing food waste and food-borne diseases.

Freeing the Animal Model: A Modular, Wirelessly Powered, Implantable Electronic Platform.

Fully implantable electronic devices in freely roaming animal models are useful in biomedical research, but their development is prohibitively resource intensive for many laboratories. The advent of miniaturized microcontrollers with onboard wireless data exchange capabilities has enabled cost-efficient development of myriad do-it-yourself electronic devices that are easily customizable with open-source software ( https://www.arduino.cc/ ). Likewise, the global proliferation of mobile devices has led to the development of low-cost miniaturized wireless power technology. The authors present a low-cost, rechargeable, and fully implantable electronic device comprising a commercially available, open-source, wirelessly powered microcontroller that is readily customizable with myriad readily available miniature sensors and actuators. The authors demonstrate the utility of this platform for chronic nerve stimulation in the freely roaming rat with intermittent wireless charging over 4 weeks. Device assembly was achieved within 2 hours and necessitated only basic soldering equipment. Component costs totaled $115 per device. Wireless data transfer and wireless recharging of device batteries was achieved within 30 minutes, and no harmful heat generation occurred during charging or discharging cycles, as measured by external thermography and internal device temperature monitoring. Wireless communication enabled triggered cathodic pulse stimulation of the facial nerve at various user-selected programmed frequencies (1, 5, and 10 Hz) for periods of 4 weeks or longer. This implantable electronic platform could be further miniaturized and expanded to study a vast array of biomedical research questions in live animal models. The clinical relevance of electrical stimulation in neural recovery remains controversial, and long-term neural stimulation in small animal models is challenging. We have developed a low-cost, fully implantable, wirelessly powered nerve stimulation device to facilitate further research in nerve stimulation in animal models.

Miniaturization of an Osmotic Pressure-Based Glucose Sensor for Continuous Intraperitoneal and Subcutaneous Glucose Monitoring by Means of Nanotechnology.

The Sencell sensor uses glucose-induced changes in an osmotic pressure chamber for continuous glucose measurement. A final device shall have the size of a grain of rice. The size limiting factor is the piezo-resistive pressure transducers inside the core sensor technology (resulting chamber volume: 70 µL. To achieve the necessary miniaturization, these pressure transducers were replaced by small (4000 × 400 × 150 nm³) nano-granular tunneling resistive (NTR) pressure sensors (chamber volume: 750 nL). For benchmark testing, we filled the miniaturized chamber with bovine serum albumin (BSA, 1 mM) and exposed it repeatedly to distilled water followed by 1 mM BSA solution. Thereafter, we manufactured sensors with glucose testing chemistry (ConcanavalinA/dextran) and investigated sensor performance with dynamic glucose changes between 0 and 300 mg/dL. Evaluation of the miniaturized sensors resulted in reliable pressure changes, both in the BSA benchmark experiment (30-35 mBar) and in the dynamic in vitro continuous glucose test (40-50 mBar). These pressure results were comparable to similar experiments with the previous larger in vitro sensors (30-50 mBar). In conclusion, the NTR pressure sensor technology was successfully employed to reduce the size of the core osmotic pressure chamber by more than 95% without loss in the osmotic pressure signal.

Optimizing the Conductivity of a New Nanoparticle Silver Ink for Aerosol Jet Printing and Demonstrating Its Use as a Strain Gauge

Aerosol Jet Printing (AJP) shows promise for printable electronics and additive manufacturing as it is capable of printing conformally on nearly any substrate due to its direct write patterning, non-contact printing process, and compatibility with a wide range of printing materials. However, nearly all printed inks require some form of post-processing sintering to achieve acceptable properties, such as electrical conductivity. In this paper, a design of experiment (DOE) using Van der Pauw printed pads is presented which can be applied to characterizing any conductive ink. We focus on a new silver nano-particle ink from NovaCentrix (JS-A426) that was developed specifically for aerosol jet printing and study its electrical conductivity under a variety of sintering time and temperature conditions. From these results, a linear regression model is developed that accurately predicts the experimentally measured electrical conductivity of the printed ink. This DOE characterization process and resulting predictive model are especially useful for applications requiring limited thermal budgets, such as flexible electronics. SEM images are also used to analyze how the silver particles coalesce and densify due to thermal diffusion. Finally, the above results are used to design and fabricate an in-situ miniature strain gauge sensor using the NovaCentrix JS-A426 silver nano-particle ink on a thin flexible substrate. After printing and sintering, the miniature custom strain gauge had a nominal resistance of 355 Ω and a gauge factor of 1.74. These values are similar to commercial metal foil strain gauges and demonstrate that the aerosol jet printing is a viable manufacturing process for the production of custom miniature in-situ strain gauges. Advantages of this methodology include quick prototyping, custom digital design, conformal printing on essentially any surface, elimination of any adhesive layer, and manufacturing in less than a minute. This work is also the first to characterize the JS-A426 silver nano-particle ink thermal curing process and demonstrate its use as a viable sensing element using direct write aerosol jet printing.

A Flexible, Low-Cost, Miniature Methane Sensor Based on PEDOT:PSS

The development of methane sensors with high sensitivity is vital for the safe application of methane. In this work, we developed a new flexible, low cost, miniature methane sensor based on PEDOT:PSS coated screen-printed electrochemical electrodes as a resistive sensor. PEDOT:PSS is used as a sensing electrode, and the presence of methane causes a change in the resistance of the PEDOT:PSS layer. The sensor demonstrates a fast detection time of 10 s, excellent sensitivity of 0.5 pA/ppm, and a wide linear detection range of 600 to 0.8x10 <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">6</sup> ppm. The sensor shows excellent stability and reliability. The detection error is within 2.8% for a single sample, 7.1% for different samples from the same batch, 16% for different batches and different samples, 3.4% for storage for 4 days, and 14% for temperature increase to 70°C. The sensor is simple to prepare, low cost and highly flexible. We anticipate that this work could open up exciting opportunities for the development and application of methane sensors, such as natural gas exploration and identification of methane leaks in mining and kitchens.

MEMS Devices-Based Hand Gesture Recognition via Wearable Computing.

Gesture recognition has found widespread applications in various fields, such as virtual reality, medical diagnosis, and robot interaction. The existing mainstream gesture-recognition methods are primarily divided into two categories: inertial-sensor-based and camera-vision-based methods. However, optical detection still has limitations such as reflection and occlusion. In this paper, we investigate static and dynamic gesture-recognition methods based on miniature inertial sensors. Hand-gesture data are obtained through a data glove and preprocessed using Butterworth low-pass filtering and normalization algorithms. Magnetometer correction is performed using ellipsoidal fitting methods. An auxiliary segmentation algorithm is employed to segment the gesture data, and a gesture dataset is constructed. For static gesture recognition, we focus on four machine learning algorithms, namely support vector machine (SVM), backpropagation neural network (BP), decision tree (DT), and random forest (RF). We evaluate the model prediction performance through cross-validation comparison. For dynamic gesture recognition, we investigate the recognition of 10 dynamic gestures using Hidden Markov Models (HMM) and Attention-Biased Mechanisms for Bidirectional Long- and Short-Term Memory Neural Network Models (Attention-BiLSTM). We analyze the differences in accuracy for complex dynamic gesture recognition with different feature datasets and compare them with the prediction results of the traditional long- and short-term memory neural network model (LSTM). Experimental results demonstrate that the random forest algorithm achieves the highest recognition accuracy and shortest recognition time for static gestures. Moreover, the addition of the attention mechanism significantly improves the recognition accuracy of the LSTM model for dynamic gestures, with a prediction accuracy of 98.3%, based on the original six-axis dataset.

Heading toward Miniature Sensors: Electrical Conductance of Linearly Assembled Gold Nanorods.

Metal nanoparticles are increasingly used as key elements in the fabrication and processing of advanced electronic systems and devices. For future device integration, their charge transport properties are essential. This has been exploited, e.g., in the development of gold-nanoparticle-based conductive inks and chemiresistive sensors. Colloidal wires and metal nanoparticle lines can also be used as interconnection structures to build directional electrical circuits, e.g., for signal transduction. Our scalable bottom-up, template-assisted self-assembly creates gold-nanorod (AuNR) lines that feature comparably small widths, as well as good conductivity. However, the bottom-up approach poses the question about the consistency of charge transport properties between individual lines, as this approach leads to heterogeneities among those lines with regard to AuNR orientation, as well as line defects. Therefore, we test the conductance of the AuNR lines and identify requirements for a reliable performance. We reveal that multiple parallel AuNR lines (>11) are necessary to achieve predictable conductivity properties, defining the level of miniaturization possible in such a setup. With this system, even an active area of only 16 µm2 shows a higher conductance (~10-5 S) than a monolayer of gold nanospheres with dithiolated-conjugated ligands and additionally features the advantage of anisotropic conductance.

Design and fabrication of a tiny micro-pressure sensor with improved linearity and sensitivity

With the rapid development of key industries such as new energy vehicles, smart homes, smart phones and consumer grade drones, the demand for high performance miniature micro-pressure sensors is also growing promptly. At prssent, most of the pressure sensors of this type adopt a C-type structure, and the thickness of the sensitive diaphragm needs to be continuously thinned in order to improve the sensitivity of this type sensor, which leads to its sensitivity to etching errors and makes it difficult to ensure the linearity of the pressure sensor. Based on this, we designed a tiny micro-pressure half active Wheatstone bridge piezoresistive pressure sensor with C-type square diaphragm structure, whose area is reduced by shortening the number of leads and pads, through ion impantation on the surface of the diaphragm to create piezoresistors, using deep reactive ion etching (DRIE) technology to release the pressure sensitive diaphragm with length of 460 μm × 460 μm, thinkness of 7.5 μm. The buried oxygen layer in the SOI (silicon on insulator) can play a role of stopping the etching, which assures the uniformity of the released sensitive diaphragm and the linearity of the sensor while maintains its sensitivity. Before preparing a pressure sensor, simulation data is used to predict whether the test results meet the design requirements. In this paper, the influence of piezoresistors position offset on the performance of the pressure sensor is analyzed by means of simulation, which improves the accuracy of the designed model and guarantees its performance parameters can meet the design indicators. Finally, the static characteristics of the sensor is calibrated. The experimental results show that the sensitivity of the sensor is up to 0.538 mV/kPa in the range of 40 kPa at room temperature, and the nonlinear error is only 0.386% FS. This study provides some new ideas and references for the design work of high performance micro-pressure sensors.