A capacitively coupled microwave plasma operating at 450 to 850 W is used for atomic emission spectroscopy. The laboratory-constructed system contains a tungsten cup electrode capable of holding a volume of up to 30 μl. Microwaves are used to dry the sample, while at higher powers the plasma is ignited for sample vaporization and excitation. The entire analysis can be carried out in less than 5 min. A mixture of helium and hydrogen is used as the plasma gas. A spherical or cylindrical shaped plasma can be formed depending upon the gas flow rate and the microwave power selected. The effects of experimental parameters, such as gas flow rate, atomization power, electrode position and plasma shape are examined. Detection limits for Cd, Mg and Zn are in the low picogram range for a 10 μl sample; the relative standard deviation is less than 10%.