A micro-patterning technique regarded as micro transfer printing is studied for goldelectrode patterning on cellulose electro-active paper (EAPap), aiming at biodegradableand flexible MEMS fabrication. EAPap is known as a smart material due to the interestingactuation phenomenon of cellulose paper. Accordingly, EAPap can be used for sensor andactuator devices. Since EAPap is made with cellulose, a biodegradable and flexible MEMSdevice can be made with this material. However, since cellulose-based EAPap ishydrophilic and flexible, conventional lithography and etching techniques cannot beused for micro-patterning. This paper reports a new micro-patterning techniqueusing the micro transfer printing (MTP) method on flexible EAPap material. TheMTP technique consists of a master fabrication, a polydimethylsiloxane (PDMS)stamp construction, and a micro pattern transfer. Details of the technique and keyissues are addressed. To demonstrate the feasibility of the MTP technique, a goldelectrode pattern for a surface acoustic wave (SAW) MEMS device and a goldmicro-strip pattern for a microwave dipole rectenna are made on cellulose papersubstrates.
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