Micron Patterns Research Articles

Designable Electrochemiluminescence Patterning for Renewable and Enhanced Bioimaging.

Electrochemical imaging enables an in-depth analysis of the interface heterogeneity and reaction kinetics of single entities. However, electrode passivation during electrochemical reactions decreases the active sites and harms the long-term stability. Here, we introduce a method using laser-induced photothermal effects to restore the electrochemical activity, which is particularly displayed as enhanced micrometric patterns in electrochemiluminescence (ECL) microscopy. By co-localization characterization and X-ray photoelectron spectroscopy, the mechanism of active site regeneration is validated as the removal of the oxide film for restoring the local surface ECL reactivity under laser irradiation. The surface-confined and voltage-dependent features of ECL allows for easy pattern erasure and rewriting, and it shows good reversibility and anti-counterfeiting potential. This approach overcomes the passivation processes, evidently improves the image quality of single biological entities including Shewanella bacteria and cells, and makes the subtle contour structures more distinct. The renewable electrode interface also enhances the ECL signal of model bead-based bioassays. This approach not only showcases precise control in fabricating micron patterns but also holds promise for enhancing the sensitivity in electrochemical immunoassays and bioimaging.

Designable Electrochemiluminescence Patterning for Renewable and Enhanced Bioimaging

Electrochemical imaging enables an in‐depth analysis of the interface heterogeneity and reaction kinetics of single entities. However, electrode passivation during electrochemical reactions decreases the active sites and harms the long‐term stability. Here, we introduce a method using laser‐induced photothermal effects to restore the electrochemical activity, which is particularly displayed as enhanced micrometric patterns in electrochemiluminescence (ECL) microscopy. By co‐localization characterization and X‐ray photoelectron spectroscopy, the mechanism of active site regeneration is validated as the removal of the oxide film for restoring the local surface ECL reactivity under laser irradiation. The surface‐confined and voltage‐dependent features of ECL allows for easy pattern erasure and rewriting, and it shows good reversibility and anti‐counterfeiting potential. This approach overcomes the passivation processes, evidently improves the image quality of single biological entities including Shewanella bacteria and cells, and makes the subtle contour structures more distinct. The renewable electrode interface also enhances the ECL signal of model bead‐based bioassays. This approach not only showcases precise control in fabricating micron patterns but also holds promise for enhancing the sensitivity in electrochemical immunoassays and bioimaging.

Transfer of micron pattern with reactive atmospheric plasma jets into fused silica

Pattern transfer by plasma etching is a traditional standard technology in microelectronics and other micron technologies. These technologies require vacuum conditions, which limit throughput, size, and low-cost fabrication. Recent developments in low cost atmospheric plasma technologies may be suitable to realize pattern transfer without vacuum conditions. Reactive atmospheric plasma jet etching has been used to transfer aluminum mask patterns to fused silica. Aluminum line patterns of 2.5 to 50 µm width on fused silica wafer are exposed to a static as well as a scanning CF4/O2 reactive atmospheric plasma jet with a footprint diameter of 0.85 mm (full width at half maximum), resulting in etching only the SiO2 and causing a nearly isotropic etch with an etch rate of about 200 nm/s. As a result, line narrowing, trapezoidal line cross-sections, and under-etching were observed. The successfully transferred line patterns with the demonstrated widths and depths are of technological interest in various fields of application. Therefore, this approach enables low-cost patterning of fused silica through the use of reactive atmospheric plasma jet etching for micron-scale pattern transfer. This advancement addresses the limitations of both traditional vacuum-based and wet etching methods.

Inkjet-Assisted Lithography of Templates for the Electroforming of Micromagnets for MEMS Applications

The integration of hard magnetic alloys in the form of patterned layers is one of the most interesting challenges for the manufacturing of energy efficient magnetic microelectromechanical systems (MEMS) [1]. With respect to current state of the art devices, whose working principle mostly relies on the exploitation of Lorentzian forces, MEMS based on permanent magnets can potentially present lower power consumption, larger displacements and stronger actuation forces. However, despite these attractive advantages, it is generally difficult to integrate thick hard magnetic layers with currently employed MEMS fabrication techniques.Electrodeposition is a technique that can be exploited to accomplish this task and that is characterized by many significant advantages: high deposition rates, no necessity of a vacuum system, low cost, possibility to deposit both alloys and composites. In addition, Reverse Pulse Plating (RPP) [2] can be used to mitigate the challenges connected to the deposition of hard magnetic alloys: high residual stress, presence of cracks and inadequate surface finishing. It can also simplify electrolyte formulation, eliminating the need of excessive amounts of additives.Regardless of the material selected, electrodeposition needs a template in order to confer a specific shape to the magnetic layer. Such template is normally manufactured using state-of-the-art technologies like standard lithography. This technique, however, is characterized by the necessity to use photomasks, which are costly and poorly adaptable to geometrical variations. Furthermore, the initial investment for the lithography equipment is typically high. A possible alternative is represented by the use of inkjet printing (IJP). This technology is characterized by low costs, high flexibility and optimal productivity. It can be applied to the micrometric patterning of electroformed layers by following a novel approach described in the present work for the first time: inkjet-assisted lithography (IAL). Briefly, droplets of a dispersion of silver nanoparticles are printed on the surface of a spin coated layer of negative photoresist. Silver is opaque for the UV radiation and it constitutes a mask for the resist. The resist is exposed and developed, forming thus templates usable for electroforming.The present work investigates the application of this approach to the production of thick and crack-free CoNiP micromagnets, which are RPP deposited inside IAL templates. CoNiP was selected due to its low-cost and good magnetic properties (with HC up to 2000 Oe). The alloy is electrodeposited from a chloride based acidic electrolyte [3], using ultra-fast RPP, in micrometric circular pores created via IAL. The diameter of the pores, and consequently the diameter of the finished magnets, can be efficiently tuned by changing the speed of the jetted droplets of silver ink. Conversely, the thickness of the magnets can be tuned by varying the deposition time. The resulting micromagnets, characterized by diameters in the 20-50 µm range and thickness up to 10 µm, are characterized to assess their morphology, phase composition and magnetic properties. The micrometric magnets here described may potentially find application for the realization of powerless MEMS, energy harvesting systems or microelectronic components.[1] N. M. Dempsey, “Hard Magnetic Materials for MEMS Applications” in: Nanoscale Magnetic Materials and Applications, Springer, Boston, MA (2009)[2] S. Pané et al., Electrochim. Acta 56, 8979-8988 (2011)[3] D. Y. Park et al., Electrochim. Acta 47, 2893-2900 (2002)

Micrometric patterning of a borogermanate glass containing terbium by thermal poling to manage luminescence and second order optical properties

Borogermanate glasses containing terbium ions are interesting materials due to their luminescent and magnetic properties. Terbium can present two different oxidation states and the thermal poling technique can be a pertinent way to modulate spatially the oxidation state of these ions. In this work, we demonstrate using a thermo-electrical imprinting process the transfer of micro scaled motifs on the surface of a borogermanate glass containing Tb3+ resulting in a micrometric structuring of the oxidation state of Tb3+/Tb4+ ions. A large change in absorption and luminescence optical properties is observed, arising from the distinct properties of trivalent and tetravalent terbium ions. Correlative micro luminescence, Raman and second harmonic generation measurements were carried out on the patterned poled glass surface. This has demonstrated an accurate concomitant modification of the glass structure accompanying large luminescence changes and the appearance of a second order optical response which could be attributed to a localized space charge implantation. These original results demonstrate how a simple electrical process allows managing multi optical properties but also paves the way to induce static electrical functionalities in a magnetic optical glassy system.

Textural Precursor Compositions Harvested for Independent Signal Generators: Scaling Micron-Sized Flower-Like Metal-Organic Frameworks as Amplifying Units for Dual-Mode Glycoprotein Assay.

In this work, a micron-sized flower-like metal-organic frameworks (MOFs)-based boronate-affinity sandwich-type immunoassay was fabricated for the dual-mode glycoprotein assay. For proof of concept, the flower-like MOFs were synthesized from transition Cu nodes and tetrakis (4-carboxyphenyl) porphyrin (TCPP) ligands by spontaneous standing assembly. In addition, the specificity toward glycoprotein involved the antigen recognition as well as covalent bonding via the boronate-glycan affinity, and the immediate signal responses were initiated by textural decomposition of the flower-like MOFs. Intriguingly, Cu nodes, of which the valence state is dominant by CuI species, can endow the Fenton-like catalytic reaction of the fluorogenic substrate for generating fluorescence signals. For benefits, TCPP ligands, in which each TCPP molecule has four guest donors, can provide multiple valences for the assembly of cyclodextrin-capped gold nanoparticles via host-guest interaction for colorimetry output. Albeit important, the scaling micrometer patterns for the flower-like MOFs carrying numerous Cu nodes and TCPP ligands can also function as amplifying units, signifying the output signal. The detection limit of the dual-mode glycoprotein assay can reach 10.5 nM for the fluorescence mode and 18.7 nM for the colorimetry mode, respectively. Furthermore, the merits of harvesting different signal generators toward the multimodal readout patterns can allow the mutual verification and make the analytical results more reliable. Collectively, our proposed assay may offer a new idea in combining the inherent textural merits from MOFs for dual signal generators, which can also emphasize accurate detection capability for glycoprotein assay.

Development of a Stretchable and Removable Electrical Interconnection Solution for Ultra-Thin Electronic Components

Currently, the solutions for interconnecting electronic components with their active face facing on substrates are based on metallic soldering. The mechanical contacts are therefore rigid. In order to enhance the reliability of the bonding, underfill is usually used to redistribute the thermo-mechanical stress created by the Coefficient of Thermal Expansion (CTE) mismatch between the silicon chip and substrate. Underfill is done with epoxy resins containing silica fillers (SiO2). As a result, the removal of components is no longer possible. Moreover, this solution is not suitable for devices integrating ultra-thin silicon components (<100 μm) hybridized on flexible substrates that may be subject to deformation. This is the case, for example, of medical “patches” worn on the person and continuously solicited. Indeed, the rigid contact points are likely to break. To address this issue, we are developing a thin anisotropic conductive and stretchable adhesive film inspired by the adhesion of the gecko. Thanks to the microstructuration of its toes involving about 1 million setae, the gecko can develop a large contact surface and thus a large force of attraction by the multiplication of van der Waals interactions. In this work, this “dry adhesion” based on the principle of “contact splitting”, was implemented in order to improve the adhesion of a flexible interconnection. For this purpose, the surface of a polydimethylsiloxane (PDMS) film was structured with micrometric mushroom-shaped patterns known to be the most efficient form of contact. To this end, silicon molds with varying mushroom geometries were used to shape the PDMS (with different cap and pillar diameters) and the adhesion force microstructured films were assessed (shear and pull-off experiments). To make these films locally conductive through the thickness, a conductive composite was prepared and locally deposited in the mold. One approach we investigated, was using a screen-printing mask. This approach has been implemented and characterized using electrical tests (I-V measurements) in order to select the most suitable films to make a flexible interconnection.

Body-temperature softening electronic ink for additive manufacturing of transformative bioelectronics via direct writing.

Mechanically transformative electronic systems (TESs) built using gallium have emerged as an innovative class of electronics due to their ability to switch between rigid and flexible states, thus expanding the versatility of electronics. However, the challenges posed by gallium's high surface tension and low viscosity have substantially hindered manufacturability, limiting high-resolution patterning of TESs. To address this challenge, we introduce a stiffness-tunable gallium-copper composite ink capable of direct ink write printing of intricate TES circuits, offering high-resolution (~50 micrometers) patterning, high conductivity, and bidirectional soft-rigid convertibility. These features enable transformative bioelectronics with design complexity akin to traditional printed circuit boards. These TESs maintain rigidity at room temperature for easy handling but soften and conform to curvilinear tissue surfaces at body temperature, adapting to dynamic tissue deformations. The proposed ink with direct ink write printing makes TES manufacturing simple and versatile, opening possibilities in wearables, implantables, consumer electronics, and robotics.

Nanotopography and Microconfinement Impact on Primary Hippocampal Astrocyte Morphology, Cytoskeleton and Spontaneous Calcium Wave Signalling.

Astrocytes' organisation affects the functioning and the fine morphology of the brain, both in physiological and pathological contexts. Although many aspects of their role have been characterised, their complex functions remain, to a certain extent, unclear with respect to their contribution to brain cell communication. Here, we studied the effects of nanotopography and microconfinement on primary hippocampal rat astrocytes. For this purpose, we fabricated nanostructured zirconia surfaces as homogenous substrates and as micrometric patterns, the latter produced by a combination of an additive nanofabrication and micropatterning technique. These engineered substrates reproduce both nanotopographical features and microscale geometries that astrocytes encounter in their natural environment, such as basement membrane topography, as well as blood vessels and axonal fibre topology. The impact of restrictive adhesion manifests in the modulation of several cellular properties of single cells (morphological and actin cytoskeletal changes) and the network organisation and functioning. Calcium wave signalling was observed only in astrocytes grown in confined geometries, with an activity enhancement in cells forming elongated agglomerates with dimensions typical of blood vessels or axon fibres. Our results suggest that calcium oscillation and wave propagation are closely related to astrocytic morphology and actin cytoskeleton organisation.

In vitro and in vivo characterization of a novel tricalcium silicate-based ink for bone regeneration using laser-assisted bioprinting

Grafts aside, current strategies employed to overcome bone loss still fail to reproduce native tissue physiology. Among the emerging bioprinting strategies, laser-assisted bioprinting (LAB) offers very high resolution, allowing designing micrometric patterns in a contactless manner, providing a reproducible tool to test ink formulation. To this date, no LAB associated ink succeeded to provide a reproducible ad integrum bone regeneration on a murine calvaria critical size defect model. Using the Conformité Européenne (CE) approved BioRoot RCS® as a mineral addition to a collagen-enriched ink compatible with LAB, the present study describes the process of the development of a solidifying tricalcium silicate-based ink as a new bone repair promoting substrates in a LAB model. This ink formulation was mechanically characterized by rheology to adjust it for LAB. Printed aside stromal cells from apical papilla (SCAPs), this ink demonstrated a great cytocompatibility, with significant in vitro positive impact upon cell motility, and an early osteogenic differentiation response in the absence of another stimulus. Results indicated that the in vivo application of this new ink formulation to regenerate critical size bone defect tends to promote the formation of bone volume fraction without affecting the vascularization of the neo-formed tissue. The use of LAB techniques with this ink failed to demonstrate a complete bone repair, whether SCAPs were printed or not of at its direct proximity. The relevance of the properties of this specific ink formulation would therefore rely on the quantity applied in situ as a defect filler rather than its cell modulation properties observed in vitro. For the first time, a tricalcium silicate-based printed ink, based on rheological analysis, was characterized in vitro and in vivo, giving valuable information to reach complete bone regeneration through formulation updates. This LAB-based process could be generalized to normalize the characterization of candidate ink for bone regeneration.

Fabrication of mechanically reliable micrometric scale conductive pattern by direct pattern transfer using UV photopolymer penetration

A mechanically reliable micrometric scale conductive wire fabrication method was developed using silver paste. In order to increase the bonding strength between silver particles, a method was developed for filling the space between particles with UV photopolymer. The UV photopolymer covers the top of a mold filled with silver paste, after which vacuum forces are generated by the evaporation of the solvent in the silver paste and the density difference between the UV photopolymer and the solvent. This results in the penetration of UV photopolymer into the silver paste. The UV photopolymer fills the interparticle air gaps inside the silver paste and positively modifies the mechanical strength of the conductive pattern. A conductive wire with a minimum line width of 10 µm was successfully fabricated on a polyethylene terephthalate film using silver paste with a particle size of 300 nm. The height of the wire is defined by the penetration depth of the UV photopolymer into the silver paste, which is a function of the resting period between applying the UV photopolymer coating and UV illumination to induce UV photo-polymerization. The penetration affected the spreading of the silver paste, resulting in favorable resistance values. A numerical analysis of the UV photopolymer penetration depth was done for validation and was consistent with the experimental results. The developed method enables large-area replication of micrometric scale conductive wire on a flexible substrate using a simple process and instrumentation with improved conductivity per unit area.

Micropatterning of Substrates for the Culture of Cell Networks by Stencil-Assisted Additive Nanofabrication.

The fabrication of in vitro neuronal cell networks where cells are chemically or electrically connected to form functional circuits with useful properties is of great interest. Standard cell culture substrates provide ensembles of cells that scarcely reproduce physiological structures since their spatial organization and connectivity cannot be controlled. Supersonic Cluster Beam Deposition (SCBD) has been used as an effective additive method for the large-scale fabrication of interfaces with extracellular matrix-mimicking surface nanotopography and reproducible morphological properties for cell culture. Due to the high collimation of SCBD, it is possible to exploit stencil masks for the fabrication of patterned films and reproduce features as small as tens of micrometers. Here, we present a protocol to fabricate micropatterned cell culture substrates based on the deposition of nanostructured cluster-assembled zirconia films by stencil-assisted SCBD. The effectiveness of this approach is demonstrated by the fabrication of micrometric patterns able to confine primary astrocytes. Calcium waves propagating in the astrocyte networks are shown.

Generation of regular optical patterns and photonic structures by a single Gaussian beam in a photorefractive LiNbO3:Fe crystal

We report 2D micrometric scale regular optical patterns formation induced by a laser beam propagating through a Fe doped lithium niobate (LN:Fe) crystal. A single mode CW laser radiation at 632.8 nm wavelength and beam powers from 0.5 to 10 mW and LN:Fe samples with 0.03 wt% Fe concentration and thicknesses of 4 mm and 10 mm were used in the experiments. The observed phenomenon of optical patterns formation in photorefractive crystal is explained with the light-induced complex refractive index variation with a central minimum (negative lens) and symmetric maxima (positive lenses) on each side due to photovoltaic effect in the crystal. Light-induced complex lenses produce beam defocusing from the beam center and focusing on the periphery. Mutual interference of the beams leads to a regular optical pattern formation. Regular optical pattern, in its turn, leads to the formation of quasi-crystalline photonic structure in LN:Fe crystal. Experimental results are supported by numerical simulations.

Control of Shielding Effectiveness of Optically Transparent Films by Modification of the Edge Termination Geometry

This article deals with the design, fabrication, and characterization of optically transparent electromagnetic screens to protect optical sensors against high-intensity radiated fields. To ensure the best tradeoff between high optical transparency over the entire visible light spectrum and high shielding effectiveness at microwaves, micrometric mesh metal films printed on glass substrates were selected. Changing the micrometric mesh pattern allows reaching various shielding effectiveness values required for different applications, but implies important adjustments of the design and fabrication processes. The variation of the number of contact ribbons between the mesh screen and its direct peripheral area consists of an alternative solution to modify the screen shielding effectiveness, while keeping the meshed part of the screen identical. An analytical model, which predicts the shielding effectiveness variation measured under statistically uniform illumination in a reverberation chamber as a function of the number of metal ribbons and the aperture sizes between them was specifically developed. Experimental results follow the trend predicted by the analytical model. As a result, adjusting the number of peripheral contact ribbons enables the shielding effectiveness to be fitted to specified requirements at constant optical transparency.

Shear force measurement of actuated, gecko-inspired adhesion elements with hierarchical polydimethylsiloxane pattern

The transfer of systems from nature to technical schemes is still a challenge as the fabrication of such complex systems in a cost efficient way while keeping the intended technical functionality requires appropriate materials and fabrication techniques. Here the multi-scale hierarchy of the gecko foot was transferred into membrane-actuated gecko-inspired adhesion elements (AE) to study the adhesion to surfaces. Therefore, a three level hierarchical polydimethylsiloxane (PDMS) structure comprising a membrane for actuating and the micron-patterned AE were mould from a microtechnical fabricated master into PDMS by thermal and UV curing. The micron-patterned AE consist of dot or line micron patterns on top of cuboid posts with 15 µm height that representing the second hierarchical level. For master fabrication lithographic masking, wet and dry etching as well as SU8 3D lithography was applied.The adhesion of such AE on smooth, rough and chemically modified glass surfaces was measured by determining the shear force for several different AE designs and PDMS materials. A slip of the micron sized PDMS AEs at the adhesion test sample surface was measured. This slip of the PDMS elements being in contact to the surface can enhance the accepted shear force and the measured anisotropy of the shear force for linear AEs. The results found can contribute to the optimization of PDMS AE for technical surfaces with chemically and topographically inhomogeneous properties.

Laser patterning and induced reduction of graphene oxide functionalized silk fibroin

This paper presents a one-step method for patterning and reducing graphene oxide functionalized in silk fibroin using femtosecond laser induced forward transfer (LIFT). Such approach renders fibroin, a natural biopolymer with excellent biocompatibility, chemical stability, and mechanical properties, improved electrical conductivity in a controlled and localized way. Composite films based on silk fibroin and graphene oxide/reduced graphene oxide were fabricated by spin coating at room temperature. The films composition was characterized by micro-Raman spectroscopy demonstrating the presence of graphene oxide in the silk fibroin matrix. The influence of pulse energy on the fs laser transfer process was investigated, yielding a threshold energy of 24.0 nJ. Additionally, the laser-induced reduction of graphene oxide attained by LIFT was determined by Raman spectroscopy and further confirmed by an increase in the electrical conductivity. The approach presented here proved to be an efficient route to simultaneously produce micrometric patterns of graphene oxide/silk fibroin composite (with line widths on the order of 1 μm), and reduction of graphene oxide, opening new opportunities for the development of green composites for electronics devices, including for instance microfluidic sensors, capacitors and LEDs.

SU-8 inkjet patterning for microfabrication

Controlled SU-8 inkjet printing constitutes an attractive approach to realize electronic microstructures, MEMS, microfluidic devices or transducers. Indeed, inkjet printing is the most promising low-cost manufacturing process capable of depositing functional materials with high resolution, making this technique attractive for micrometric patterning. On the base of these premises, it's here presented the possibility to successfully print SU-8 complex patterned structures. Indeed, two different diluted SU-8 mixtures are successfully printed and a deep analysis on the effect of the physical parameters of the solvent is presented. The main challenges in SU-8 inkjet patterning are individuated and discussed through the evaluation of different shapes presenting critical printing aspects. In addition, some possible approaches to address such challenges are presented. Finally, the possibility to use inkjet printed SU-8 masks as templates for metal electrodeposition is demonstrated.

An interesting route using electron-beam lithography and photolithography to pattern submicron interdigitated electrodes array for sensing applications

Increasing the interest in the silicon-based devices resulted in developing new methods and techniques to achieve advanced and more reliable designs and devices. In this study, we have developed a combination method of photolithography and electron-beam lithography (EBL) in order to maximize the efficiency and reducing time and costs. Nanometric and micrometric patterns were created using EBL and photolithography methods, respectively. In order to prove the sensing applications, the EBL-based fabricated electrodes were successfully designed and tested as a hydrogen peroxide (H2O2) biosensor using horseradish peroxidase (HRP) enzyme on a graphene oxide substrate. Photoresist provided a passive layer which reduced the passivation steps in the fabrication. The interdigitated electrodes were used to maximize the connections with the graphene oxide substrate. The result was an ohmic biosensor that exhibits a linear relationship with the logarithm of H2O2 concentration in the range between 0.1 µM and 100 mM. The limit of detection (LOD) was about 51 nM.

Encoding of arbitrary micrometric complex illumination patterns with reduced speckle.

In nonlinear microscopy, phase-only spatial light modulators (SLMs) allow achieving simultaneous two-photon excitation and fluorescence emission from specific region-of-interests (ROIs). However, as iterative Fourier transform algorithms (IFTAs) can only approximate the illumination of selected ROIs, both image formation and/or signal acquisition can be largely affected by the spatial irregularities of the illumination patterns and the speckle noise. To overcome these limitations, we propose an alternative complex illumination method (CIM) able to generate simultaneous excitation of large-area ROIs with full control over the amplitude and phase of light and reduced speckle. As a proof-of-concept we experimentally demonstrate single-photon and second harmonic generation (SHG) with structured illumination over large-area ROIs.

Tribological response of laser-textured steel pins with low-dimensional micrometric patterns

Our purpose was to study the tribological effects of surface texturing at the mesoscale, generally disregarded. We realized hemispherical dimples on 100Cr6 steel pins using a ns-pulsed Nd:YAG laser. Both radius and depth of the patterns fall in the very-low part of the micrometric scale, ranging respectively from 10 to 13 μm and from 4 to 6.5 μm. To map Stribeck curves, we used a pin-on-disk apparatus and a commercial motor oil as lubricant. The results confirm that the post-texturing lapping process is crucial to achieve a reduction in the coefficient of friction. These patterns show a tribological effect mainly in mixed lubrication regime, and partially in hydrodynamic regime. Even very small differences in radius and depth may induce very different response, evidencing the need of very fine tuning of the geometrical characteristics of the patterns. The lower friction was recorded for larger and deeper dimples. Friction reduction for increasing dimples density has been found as well. Endurance tests in boundary lubrication regime show a more stable coefficient of friction and a larger mean lifetime of patterned surfaces with respect to polished one. Furthermore, water-contact-angle tests show a weak hydrophobic effect for high aspect ratio patterns. However, no correlation was observed between wettability and tribological response.