Micromechanical Cantilever Sensors Research Articles

Beyond biology: alternative uses of cantilever-based technologies.

Micromechanical cantilever sensors are attracting a lot of attention because of the need for characterizing, detecting, and monitoring chemical and physical properties, as well as compounds at the nanoscale. The fields of application of micro-cantilever sensors span from biological and point-of-care, to military or industrial sectors. The purpose of this work focuses on thermal and mechanical characterization, environmental monitoring, and chemical detection, in order to provide a technical review of the most recent technical advances and applications, as well as the future prospective of micro-cantilever sensor research.

Micromechanical resonant cantilever sensors actuated by fringing electrostatic fields

We report on the architecture and operational principle of a resonant cantilever-type displacement sensor. The device is actuated electrostatically by a side electrode that is coplanar with the cantilever and by a gap-closing electrode positioned underneath the beam. The unique electrode geometry combined with the appropriate actuating voltages allows positioning of the cantilever in close proximity to the bistability threshold, where the frequency sensitivity to the electrode displacement is enhanced. Using a reduced order model backed by numerical simulations, the dependencies of the device frequency on the beam’s deflections and the actuation voltages were mapped. We show wide-range tunability that spans a range between softening and hardening behavior. We demonstrate displacement sensing using fabricated single crystal silicon ≈2000 µm long, ≈5 µm thick cantilevers. When compared to a resonant cantilever sensor actuated solely by a gap-closing electrode, measurements from our fringing field actuated devices show a four times higher sensitivity of ≈98 Hz µm−1. The suggested approach may find applications in a broad range of micro and potentially nano-scale applications including resonant inertial, force, mass and bio-sensors.

Young's modulus of plasma‐polymerized allylamine films using micromechanical cantilever sensor and laser‐based surface acoustic wave techniques

Mechanical properties of ultra‐thin organic films are fundamentally important in coating applications. Micromechanical cantilever sensor (MCS) and laser‐based surface acoustic wave (LA‐SAW) techniques were both used to measure Young's moduli (E) of plasma polymerized films at different humidities (H). For plasma polymerized allylamine (ppAA) films deposited at 5 W and 90 W, E of 1400 ± 350 MPa and 110 ± 20 MPa at H between 10 and 40%, and 1070 ± 250 MPa and 32 ± 10 MPa at H between 70 and 80% were measured. The LA‐SAW technique revealed E lower than 60% of that measured by MCS. The difference suggested either an enhanced swelling at the air interface or a gradient of cross‐linking density.

Thermal Characterization of Dynamic Silicon Cantilever Array Sensors by Digital Holographic Microscopy.

In this paper, we apply a digital holographic microscope (DHM) in conjunction with stroboscopic acquisition synchronization. Here, the temperature-dependent decrease of the first resonance frequency (S1(T)) and Young’s elastic modulus (E1(T)) of silicon micromechanical cantilever sensors (MCSs) are measured. To perform these measurements, the MCSs are uniformly heated from T0 = 298 K to T = 450 K while being externally actuated with a piezo-actuator in a certain frequency range close to their first resonance frequencies. At each temperature, the DHM records the time-sequence of the 3D topographies for the given frequency range. Such holographic data allow for the extracting of the out-of-plane vibrations at any relevant area of the MCSs. Next, the Bode and Nyquist diagrams are used to determine the resonant frequencies with a precision of 0.1 Hz. Our results show that the decrease of resonance frequency is a direct consequence of the reduction of the silicon elastic modulus upon heating. The measured temperature dependence of the Young’s modulus is in very good accordance with the previously-reported values, validating the reliability and applicability of this method for micromechanical sensing applications.

Molecularly imprinted polymer based micromechanical cantilever sensor system for the selective determination of ciprofloxacin

The main objective of this study is to develop molecularly imprinted polymer (MIP) based micromechanical cantilever sensor system that has high specificity, fast response time and is easily applicable by user for the detection of ciprofloxacin (CPX) molecule in water resources. Highly specific CPX imprinted nanoparticles were synthesized by miniemulsion polymerization technique. The average size of the synthesized nanoparticles was measured about 160nm with high monodispersivity. Covalent and monolayer binding of the MIP nanoparticles on cantilevers was provided by EDC/NHS activation. Validation of the developed cantilever nanosensor was performed in air with dip-and-dry technique by employing the dynamic sensing mode. According to the results obtained, micromechanical cantilever sensor system worked linearly for the concentration range of 1.5–150.9μM. This concentration range resulted with 18.4–48.9pg mass load on the MIP modified cantilever. The sensitivity of the developed sensor was calculated as 2.6Hz/pg. To control the specificity of MIPs, a different antibiotic enrofloxacin (ENF), with a similar physical and chemical structure with CPX, was used, which showed 7 folds low binding affinity. The developed highly specific microcantilever sensor has a response time of approximately 2min and is reusable up to 4 times. The results indicate that the MIP based AFM nanosensor has high sensitivity for the CPX molecule. This combination of MIP nanoparticles with micromechanical sensors is one of the pioneer studies in the mass sensing applications. This fast, low cost and highly sensitive CPX specific MIP nanoparticle based nanosensor developed in this research have the potential to pave the way for further studies.

Nanomechanical sensors for single microbial cell growth monitoring.

A nanomechanical technique for rapid real time detection and monitoring of microorganism growth will significantly reduce costs and diagnosis times in industrial and clinical settings. Owing to their label free detection mechanism and unprecedented sensitivity to the mass and elastic modulus of biological structures, dynamically operated cantilever arrays provide an opportunity to rapidly detect and track the evolution of microbial growth. Here we report the monitoring of the growth of single Aspergillus niger spores via the multimode response of microcantilevers. The fungal hyphal structure affects the cantilevers' nanomechanical properties as it propagates along the sensor. We demonstrate, for the first time, the mapping of cellular events with great accuracy using a cantilever frequency response. Imaging of growth conditions on the cantilever, which is performed in parallel, allows for verification of these results. Theoretical comparison and finite element modelling confirm experimental findings and allow for determination of the hyphal elastic modulus.

Effective Young's Modulus Measurement of Thin Film Using Micromechanical Cantilever Sensors

Determination of mechanical properties of thin films, such as the Young's modulus, is of fundamental importance when the films are used for coating or for materials of microelectromechanical systems (MEMS). We show a simple method to calculate the effective Young's modulus of thin films by comparing lateral and vertical expansions. The stress of the film due to expansion in the lateral direction was measured using micromechanical cantilever sensor (MCS) techniques which allow for a calculation of the lateral expansion ratio of the film. The vertical expansion was measured using ellipsometry, surface plasmon resonance (SPR) and other film thickness meters. There is no limitation by the method for a measurement of Young's modulus, even if soft and thin polymer film. We detected the influence of humidity on effective Young's modulus of a polymer material by the method, as an example.

Shape effects of micromechanical cantilever sensor

Microcantilever has been increasingly used as microsensor thanks to its fast response, low cost and parallel implementation in large quantity. The principle of sensing lies in the positive correlation between the resonant frequency of microcantilever and the target mass loading. The shape of cantilever determines the resonant frequency. Therefore it plays a vital role in microsensing. In the present study three basic geometric shapes (rectangle, triangle and half-ellipse) with innovative inner cut are investigated. The micro-cantilever beams are cut to external aspect ratios of 0.5, 1, and 2, and inner cut at aspect ratios of 0, 0.5, 1, and 2, with equal sensing area. Both numerical and experimental analysis indicates that the low-aspect-ratio cantilever with high-aspect-ratio inner cut achieved high sensitivity. The half-ellipse being the highest followed by the rectangle. The results are useful for optimal shape design of a micromechanical cantilever sensor.

Design of a sensor for the blood AB0 group antibodies detection

Control the content of the blood group antibodies in the plasma of the recipient is an important task in modern transplantation. In this paper we proposed to use micromechanical cantilever sensors for detection of the low concentrations of AB0 blood group antibodies in serum. The technique of chemical modification of cantilever surface to create the receptor layer was developed. The apparatus, which provides data acquisition from multiple microconsoles simultaneously was created. We carried out experiments by the detection in a solution the β antibodies with a concentration of 300 times less than the native content of antibodies in the blood. Change in surface stress due to formation of antigen-antibody complexes on the cantilever surface was 0.075 N/m. The resulting lateral strain, apparently, induced by repulsion between the complexes during the sorption of antibodies in layer of antigens, immobilized on the surface. The possibility of regeneration of sensory layer for repeated measurements was shown.

Swelling of Composite Films at Interfaces

Composite materials made of metallic nanoparticles embedded in an organic matrix are highly promising candidates as coatings for novel chemical sensors. Micromechanical cantilever measurements revealed that the Au-nanoparticle terphenyldithiol composite material swells upon dosing with toluene vapor. The mass increase was found to be linear with the toluene vapor concentration, ≈ 40 fg/ppm. Furthermore, significant differences in the mechanical transduction of ≈100 nm thick Au-nanoparticle terphenyldithiol composite material that was prepared on a 3-aminopropyldimethylmonoethoxysilane (APDMES) surface and on a Au surface were observed. The transduction of swelling of the composite film into a mechanical deflection was found to be more efficient for the composite film prepared on the Au surface attributed to covalent binding of the terphenyldithiol molecules with the Au surface. In contrast, the interface of the APDMES layer and the Au−terphenyldithiol composite material is based on electrostatic interaction between the Au nanoparticles and the amino interface. The analysis of the micromechanical cantilever sensor measurements lead to the conclusion that the composite film at the APDMES interface is more mobile compared to a similar film that was prepared on Au.

System for oscillating a micromechanical cantilever

This invention relates to a system for exciting oscillations of micromechanical cantilever sensors and for measuring and evaluating the corresponding oscillations. Such sensors can e.g. be used to detect chemical substances, biomolecules, microorganisms or viruses, or to analyze surface-related phenomena and processes such as conformational changes or phase transitions in thin layers, or to measure physical properties of their surrounding, such as viscoelastic properties of liquids. In the so-called dynamic operation mode, cantilever oscillations are excited and the frequency shift of the ground frequency and/or of one or some higher harmonics, occurring because of a process taking place at the cantilever surface, are measured. In the so-called static mode, the deflection of the cantilever is determined. The setup described in this invention allows measurements in gases as well as liquids. It is characterized by an efficient transfer of the oscillation from a piezoelectric driver element to the cantilever over a wide frequency range. This is achieved through a sophisticated combination of a solid support structure, oscillation driver and insulators.

Bianalyte mass detection with a single resonant microcantilever

Mass-loading detection of multiple kinds of analyte with a single resonant microcantilever is proposed and experimentally validated. By exciting the cantilever in different resonance modes and adsorbing the different analytes at different locations of the cantilever, the specific mass of either kind of analyte can be independently detected. The proposed micromechanical resonant cantilever sensor is designed and fabricated using silicon micromachining techniques. Used as simulant adsorbates, Au and Cr thin films are selectively implemented on the cantilever to verify the bianalyte detecting function. The testing results are consistent with the theoretical analysis, with the detection error being an order of magnitude lower than the analyzed mass.

Surface Stress, Thickness, and Mass of the First Few Layers of Polyelectrolyte

The effects of surface stress and mass loading upon the adsorption of polyelectrolytes onto flexible silicon micromechanical cantilever sensors (MCSs) were studied in situ. A self-assembled monolayer of 2-mercaptoethylamine chloride (2-MEA) on gold was used to achieve single-side adsorption on the MCS. Such a preparation gave a positive surface potential, whereas a bare SiOx surface gave a negative surface potential. Wide scan X-ray photoelectron spectroscopy confirmed that the adsorption of polystyrenesulfonate (PSS) and polyallylamine hydrochloride (PAH) followed the general rule expected from the electrostatic interaction between the substrate and the polyelectrolyte, whereas the adsorption polyethyleneimine (PEI) did not. The adsorption of PAH on SiO(x) from a 3 mM water solution containing 1 M NaCl was associated with a deflection of the MCS toward the polyelectrolyte monolayer (tensile surface stress) owing to the hydrogen bonding between neighboring amino groups. Here, a surface stress change of 1.4 +/- 0.1 N/m was estimated. The adsorption of PSS from a 3 mM water solution containing 1 M NaCl on a 2-MEA surface induced a deflection of the MCS away from the polyelectrolyte layer (compressive stress), toward the SiO(x) side. Here, a surface stress change of 3.1 +/- 0.3 N/m was determined. The formation of a PAH layer on top of the PSS layer resulted in a deflection of the MCS toward the PAH layer. This indicated that the adjacent PSS layer was deswelling, corresponding to a surface stress change of 0.5 +/- 0.1 N/m.

Readout of micromechanical cantilever sensor arrays by Fabry-Perot interferometry

The increasing use of micromechanical cantilevers in sensing applications causes a need for reliable readout techniques of micromechanical cantilever sensor (MCS) bending. Current optical beam deflection techniques suffer from drawbacks such as artifacts due to changes in the refraction index upon exchange of media. Here, an adaptation of the Fabry-Perot interferometer is presented that allows simultaneous determination of MCS bending and changes in the refraction index of media. Calibration of the instrument with liquids of known refraction index provides an avenue to direct measurement of bending with nanometer precision. Versatile construction of flow cells in combination with alignment features for substrate chips allows simultaneous measurement of two MCS situated either on the same, or on two different support chips. The performance of the instrument is demonstrate in several sensing applications, including adsorption experiments of alkanethioles on MCS gold surfaces, and measurement of humidity changes in air.

Multiwell micromechanical cantilever array reader for biotechnology

We use a multiwell micromechanical cantilever sensor (MCS) device to measure surface stress changes induced by specific adsorption of molecules. A multiplexed assay format facilitates the monitoring of the bending of 16 MCSs in parallel. The 16 MCSs are grouped within four separate wells. Each well can be addressed independently by different analyte liquids. This enables functionalization of MCS separately by flowing different solutions through each well. In addition, each well contains a fixed reference mirror which allows measuring the absolute bending of MCS. In addition, the mirror can be used to follow refractive index changes upon mixing of different solutions. The effect of the flow rate on the MCS bending change was found to be dependent on the absolute bending value of MCS. Experiments and finite element simulations of solution exchange in wells were performed. Both revealed that one solution can be exchanged by another one after 200 microl volume has flown through. Using this device, the adsorption of thiolated DNA molecules and 6-mercapto-1-hexanol on gold surfaces was performed to test the nanomechanical response of MCS.

Investigation into the Chemical Reactivity of Plasma-Deposited Perfluorophenyl Methacrylate Using Infrared Reflection Absorption Spectroscopy and Microcantilever Studies

Perfluorophenyl methacrylate (pp-PFM) was plasma-polymerized using low duty cycle conditions to yield a surface rich in active ester groups. The reactivity of this surface towards different primary amines was investigated using infrared reflection absorption spectroscopy (IRRAS) and micromechanical cantilever (MC) sensors. While IRRAS provided information on the chemistry, the MC sensors technique gave insights into volume changes induced by the reactions of the polymer film. We found that the volume change upon reaction was different for each of the amines studied and correlated this to the ability of the amines to diffuse into the polymer matrix. The changes observed can be related to reactions occurring either at the liquid–solid interface or to reactions occurring within the matrix of the polymer and appear to be related to the chemical structure of the amines.

Analyzing Gene Expression Using Combined Nanomechanical Cantilever Sensors

In diseases such as cancer or during viral infections gene expression is greatly altered. These changes in gene activity can be analysed at different levels of cellular activity, like transcription activation, transcription and translation. Currently, no simple method is available to detect all these biochemical signals simultaneously and rapidly. Micromechanical cantilever sensor array technology is applied, because it has the advantage that sample preconditioning like labelling and amplification is not required. Furthermore, DNA, RNA, protein or combinations thereof could be detected in parallel on a single cantilever array. With such a device, diagnosis and therefore treatment of diseases can be improved. Here we present successive detection of DNA hybridization and antigen using the same micromechanical cantilever sensor array.

Micromechanical Cantilever Technique: A Tool for Investigating the Swelling of Polymer Brushes

Polymer brush coatings are well-known for their ability to tailor surface properties in a wide range of applications from colloid stabilization to medicine. In most cases, the brushes are used in solution. Consequently, efforts were expended to experimentally investigate or theoretically predict the swelling behavior of the brushes in solvents of different qualities. Here, we show that the micromechanical cantilever (MC) sensor technique is a tool to perform time-resolved physicochemical investigations of thin layers such as polymer brushes. Complementary to scattering techniques, which measure the thickness, the MC sensor technique provides information about changes in the internal pressure of the brushes during a swelling and deswelling process. We show that the kinetics of both swelling and deswelling are dependent on solvent quality. Comparing the measured data with its thickness evolution, which was calculated based on the Flory-Huggins theory, we found that only the first 10% of the thickness increase of the polymer brush results in a significant pressure increase inside the polymer brush layer.

Monitoring the Formation of Self-Assembled Monolayers of Alkanedithiols Using a Micromechanical Cantilever Sensor

Using a micromechanical cantilever device, the surface stress induced during the growth of alkanedithiol (HS(CH2)nSH) monolayers on gold in solution is continuously monitored and reported. Adsorption of alkanedithiols of varying chain lengths is observed and compared to each other, as well as to the adsorption of hydroxyalkanethiols (HS(CH2)nOH) and alkanethiols (HS(CH2)nCH3). The results have revealed a significant change in surface stress on the basis of the chain length of the alkanedithiol. The long-chain (n > 10) alkanedithiol adsorption imposes a tensile stress on the gold-coated surface of the cantilever rather than the compressive stress exhibited by both alkanethiols and short-chain dithiols. Our results suggest a phenomenon in which the two thiols of the alkanedithiol adsorb onto the gold surface forming a loop inducing a tensile stress on the cantilever for long chain lengths. This study shows that micromechanical cantilever sensors can be very valuable tools in the exploration and characterization of self-assembled monolayers.

Swelling of cross-linked polystyrene spheres in toluene vapor

The swelling behavior of individual micron-sized polystyrene (PS) spheres in toluene vapor was studied via mass loading by means of micromechanical cantilever sensors. For 4%–8% cross-linked PS a mass increase of 180% in saturated toluene vapor was measured. The mass of the swollen PS sphere decreases with increasing exposure time to ultraviolet light. In addition, the swelling response is significantly different between the first and the second exposure to toluene vapor. This is attributed to the formation of a cross-linked shell at the surface of the PS spheres. Shape persistent parts were observed for locally irradiated PS spheres.