Abstract
Mechanical properties of ultra‐thin organic films are fundamentally important in coating applications. Micromechanical cantilever sensor (MCS) and laser‐based surface acoustic wave (LA‐SAW) techniques were both used to measure Young's moduli (E) of plasma polymerized films at different humidities (H). For plasma polymerized allylamine (ppAA) films deposited at 5 W and 90 W, E of 1400 ± 350 MPa and 110 ± 20 MPa at H between 10 and 40%, and 1070 ± 250 MPa and 32 ± 10 MPa at H between 70 and 80% were measured. The LA‐SAW technique revealed E lower than 60% of that measured by MCS. The difference suggested either an enhanced swelling at the air interface or a gradient of cross‐linking density.
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