Microelectromechanical Systems Research Articles

Development of Environmental Monitoring Sensor for Steel Corrosion in Concrete based on Micro-Electro-Mechanical Systems (MEMS)

Many bridges located near marine environments usually have high risk to lose their structural performance due to corrosion of reinforcing bars with chloride attack. While a huge amount of budget to maintain may be consumed for the structural maintenance methodologies, an efficient monitoring system for Reinforced Concrete (RC) structures in the corrosive environment is strongly demanded. Thus, structural health monitoring in real situations is significant for bridge asset management. The alternative way for preventing severe damage propagation is proactively monitoring the environmental condition containing chloride ion and its effect on the durability of concrete structures, for which numerous methods have been conventionally suggested such as dry gauze method to capture chlorides in air. In this study, Micro Energy Harvester (MEH) based on Micro-Electro-Mechanical Systems (MEMS) is technically applied to develop a sensor to identify the corrosion environment with chlorides in the exposure condition. MEMS is a rapidly evolving device, which enables to monitor the changes in natural frequency and amplitude at nodal locations of the targeting structure due to vibration-based electrostatic power generation induced by the corrosive environment. The purpose of this research is to develop a system for detecting the high corrosion-prone areas and finding the suitable metal sheet material for various chloride ion conditions, using the metal sheet as a cantilever structure for the MEMS device. 4 types of metal, aluminium, copper, iron and zinc are considered for the parametric experiments. Several scenarios are considered including chloride ion concentration, temperatures, and wet and dry conditions to compare the dominant frequency changes of each metal sheet and determine their sensitivity to corrosion environment. From the preliminary results, iron and zinc have a significant drop in frequency with the elapsed exposure period, which indicates that they are highly sensitive to the external chloride ion environment. These results offer an innovative and proactive approach to structural health monitoring for further developed applications. It enables prompt maintenance and early detection of potential issues for corrosion of steel bars in concrete, ensuring the longevity and safety of RC bridge structures.

Microstructure evolution of dendrite and eutectic in undercooled Al70Ge30 alloy

Al-Ge eutectic alloy, as a desirable bonding material, has been widely used in microelectromechanical systems (MEMS) packaging. The bonding property of Al-Ge eutectic alloy is closely related to their microstructures. However, the microstructure evolution and underlying mechanisms in undercooled eutectic Al-Ge alloy remain unclear. In this work, Al70Ge30 alloy was prepared and subjected to undercooling using a cycled superheating purification technology. The maximum undercooling can reach 90K (0.13TL). The solidified Al70Ge30 alloy exhibits concomitant dendrites and eutectic microstructures. The dendrites undergo rapid refinement at low undercooling and subsequently maintain nearly constant size as undercooling increases. Intriguingly, undercooling has a significant influence on eutectic microstructures. The eutectic microstructure transformed from feather structures to fishbone structures as undercooling increases then transformed into a line-like structure in eutectic cells. The evolution mechanisms of dendrites and eutectic structures are further elucidated based on several classical thermodynamic models. This study can provide theoretical and experimental guidance for the microstructure evolution of undercooled eutectic alloys with similar eutectic structures.

Experiences Using MEMS Accelerometers on Railway Bearers at Switches and Crossings to Obtain Displacement—Awkward Situations

A sleeper, or more generally a “bearer”, moves vertically under a passing train load. The extent of this motion depends on the static and dynamic load of the train, the train speed, and the support conditions at the bearer and its neighbours. Excessive motion, typically from voiding see-sawing, low support stiffness or possibly excessive stiffness, or even too little stiffness, are all of interest to maintainers. Typically, problems arise around transition zones, switches and crossings, but plain track with poor support can also be a problem. Within the last decade, low-cost micro-electro-mechanical system (MEMS) accelerometers have been used to capture the time history of vertical motion for use in condition monitoring. Existing condition monitoring systems often overlook or sometimes even ignore the possibility of problematic data, which seem to be common in monitored locations. It is essential to understand whether such “bad” data require further attention. Three problematic sites are presented, focussing on examples where the acceleration was higher than expected or the computed displacement was not as expected. Potential causes include wheel defects, hammering of the ballast by a hanging bearer, or high acceleration at some structural resonant frequency. The present paper aims to show the challenges of using MEMS accelerometers to collect data for condition monitoring and offers insights into the sort of problematic data that may be collected from real sites.

MEMS-actuated terahertz metamaterials driven by phase-transition materials

The non-ionizing and penetrative characteristics of terahertz (THz) radiation have recently led to its adoption across a variety of applications. To effectively utilize THz radiation, modulators with precise control are imperative. While most recent THz modulators manipulate the amplitude, frequency, or phase of incident THz radiation, considerably less progress has been made toward THz polarization modulation. Conventional methods for polarization control suffer from high driving voltages, restricted modulation depth, and narrow band capabilities, which hinder device performance and broader applications. Consequently, an ideal THz modulator that offers high modulation depth along with ease of processing and operation is required. In this paper, we propose and realize a THz metamaterial comprised of microelectromechanical systems (MEMS) actuated by the phase-transition material vanadium dioxide (VO2). Simulation and experimental results of the three-dimensional metamaterials show that by leveraging the unique phase-transition attributes of VO2, our THz polarization modulator offers notable advancements over existing designs, including broad operation spectrum, high modulation depth, ease of fabrication, ease of operation condition, and continuous modulation capabilities. These enhanced features make the system a viable candidate for a range of THz applications, including telecommunications, imaging, and radar systems.Graphical

Energy‐principle‐based analysis of elastic instability in polymer cylinders subject to surface tension

AbstractAn elastic instability model of polymer cylinder subject to surface tension is studied by energy functional analysis. The no‐classical boundary conditions and equilibrium equation are derived by introducing stress double harmonic function. The criteria of instability with surface tension contribution are deduced by substituting stress solution into boundary conditions. The results show that the criterion equation of elastic instability is relevant to the radius and intrinsic scale and instable wavelength or wavenumber of cylinder. Therefore, the relation between shear modulus and surface tension has the same trend comparing with the result of Barrierès' et al. This study provides insights into the instability of polymer and has important implications for the development of nanoscale cylindrical element in micro electro mechanical systems (MEMS) or nano electro mechanical systems (NEMS).

Miniaturized Multi-Cantilever MEMS Resonators with Low Motional Impedance

Microelectromechanical system (MEMS) cantilever resonators suffer from high motional impedance (Rm). This paper investigates the use of mechanically coupled multi-cantilever piezoelectric MEMS resonators in the resolution of this issue. A double-sided actuating design, which utilizes a resonator with a 2.5 μm thick AlN film as the passive layer, is employed to reduce Rm. The results of experimental and finite element analysis (FEA) show agreement regarding single- to sextuple-cantilever resonators. Compared with a standalone cantilever resonator, the multi-cantilever resonator significantly reduces Rm; meanwhile, the high quality factor (Q) and effective electromechanical coupling coefficient (Kteff2) are maintained. The 30 μm wide quadruple-cantilever resonator achieves a resonance frequency (fs) of 55.8 kHz, a Q value of 10,300, and a series impedance (Rs) as low as 28.6 kΩ at a pressure of 0.02 Pa; meanwhile, the smaller size of this resonator compared to the existing multi-cantilever resonators is preserved. This represents a significant advancement in MEMS resonators for miniaturized ultra-low-power oscillator applications.

Multi-Scale Traditional and Non-Traditional Machining of Bulk Metallic Glasses (BMGs)—Review of Challenges, Recent Advances, and Future Directions

Bulk metallic glasses (BMGs) are growing in popularity prominently due to their potential in micro-electromechanical systems (MEMSs) and aerospace applications. BMGs have unique mechanical properties, i.e., high strength, hardness, modulus of elasticity, and wear resistance, due to their disordered atomic structure. Due to their unique mechanical properties and amorphous structures, machining of BMGs remains a challenge. This paper aims to carry out a detailed literature review on various aspects of the machining of bulk metallic glasses using both conventional and non-conventional processes, including experimental approaches, modeling, statistical findings, challenges, and guidelines for machining this difficult-to-machine material. Conventional machining processes were found to be challenging for machining bulk metallic glasses due to their high hardness, brittleness, and tendency to convert their amorphous structure into a crystalline structure, especially at the machined surface and sub-surface. Although their high electrical conductivity makes them suitable for machining by non-conventional processes, they impose new challenges such as heat-affected zones and crystallization. Therefore, the successful machining of BMGs requires more in-depth analysis of cutting forces, tool wear, burr formation, surface finish, recast layers or heat-affected zones, crystallization, and mechanical property changes among different varieties of BMGs. This review paper provides guidelines emerging from in-depth analysis of previous studies, as well as offering directions for future research in the machining of BMGs.

Holistic and localized preparation methods for triboelectric sensors: principles, applications and perspectives

Abstract With the arrival of intelligent terminals, triboelectric nanogenerators (TENGs), as a new kind of energy converter, are considered one of the most important technologies for the next generation of intelligent electronics. As a self-powered sensor, it can greatly reduce the power consumption of the entire sensing system by transforming external mechanical energy to electricity. However, the fabrication method of triboelectric sensors largely determines their functionality and performance. This review provides an overview of various methods used to fabricate triboelectric sensors, with a focus on the processes of micro-electro-mechanical systems (MEMS) technology, three-dimensional (3D) printing, textile methods, template-assisted methods, and material synthesis methods for manufacturing. The working mechanisms and suitable application scenarios of various methods are outlined. Subsequently, the advantages and disadvantages of various methods are summarized, and reference schemes for the subsequent application of these methods are included. Finally, the opportunities and challenges faced by different methods are discussed, as well as their potential for application in various intelligent systems in the Internet of Things (IoT).

Design and Fabrication of Micro/Nano Sensors and Actuators, Volume II

Microelectromechanical system (MEMS) sensors are a miniaturized sensor technology that integrates sensors with microelectronic components using microelectromechanical system manufacturing technology [...]

Formulation analysis and follow-up study of multi-turn configuration for performance enhancement of MEMS piezoresistive pressure sensor utilized for low-pressure measurement applications

Purpose The purpose of this research is to study the performance of piezoresistive pressure sensors using polysilicon as the piezoresistive material, which is typically used to measure pressure in high-temperature environments. Design/methodology/approach The performance of this sensor is enhanced by studying the influence of multi-turn configuration at which the piezoresistors are arranged. Different configurations are studied and compared by laying down their analytical solution. Findings The validation of analytical results is accomplished through finite element analysis using the software COMSOL Multiphysics. The best configuration, which uses a partial triple-turn configuration, was able to achieve a sensitivity of 116.00 mV/V/MPa over a simulated pressure range of 0 to 500 KPa. Originality/value The literature shows the study of single-turn and double-turn meander-shaped configuration of micro-electromechanical systems piezoresistive pressure sensor but multi-turn meander-shaped configuration using a square silicon diaphragm has not been reported. Its study has reflected promising results than its counterparts based on key performance parameters such as sensitivity and linearity and are more effective to be used for automotive, aviation, biomedical and consumer electronics applications.

Comprehensive calibration and laboratory validation of a Micro Electromechanical System sensor–based flexible inclinometer

Abstract Real-time monitoring of slopes, tunnels, and dams is important for ensuring the long-term stability and reliability of such structures. Despite the successes of current technologies in many applications, a gap still exists in certain areas such as precision in steep slopes and complex soil conditions. This study has designed a flexible inclinometer based on an array of Micro Electromechanical System (MEMS) sensors to enhance the accuracy and flexibility of existing monitoring techniques. The inclination angle of each flexible inclinometer measurement unit was measured to monitor the horizontal or vertical displacement of the target structural body. We used the Levenberg–Marquardt (LM) algorithm for optimizing the MEMS sensors based calibration and designed multiple experiments to test the accuracy of the proposed method. Experimental results show that the calibrated flexible inclinometer measurement unit has an inclination angle of less than 0.04° and the accuracy of the flexible inclinometer lies within ±0.4 mm in the horizontal attitude and 1.6 mm in the vertical attitude. Our research has developed a novel tool for geotechnical engineering monitoring that can aid in increasing the precision of real-time assessment and prediction of structural stability.

A new fabrication method for enhancing the yield of linear micromirror arrays assisted by temporary anchors

As one of the most common spatial light modulators, linear micromirror arrays (MMAs) based on microelectromechanical system (MEMS) processes are currently utilized in many fields. However, two crucial challenges exist in the fabrication of such devices: the adhesion of silicon microstructures caused by anodic bonding and the destruction of the suspended silicon film due to residual stress. To solve these issues, an innovative processing method assisted by temporary anchors is presented. This approach effectively reduces the span of silicon microstructures and improves the Euler buckling limit of the silicon film. Importantly, these temporary anchors are strategically placed within the primary etching areas, enabling easy removal without additional processing steps. As a result, we successfully achieved wafer-level, high-yield manufacturing of linear MMAs with a filling factor as high as 95.1%. Demonstrating superior capabilities to those of original MMAs, our enhanced version boasts a total of 60 linear micromirror elements, each featuring a length-to-width ratio of 52.6, and the entire optical aperture measures 5 mm × 6 mm. The linear MMA exhibits an optical deflection angle of 20.4° at 110 Vdc while maintaining exceptional deflection flatness and uniformity. This study offers a viable approach for the design and fabrication of thin-film MEMS devices with high yields, and the proposed MMA is promising as a replacement for digital micromirror devices (DMDs, by TI Corp.) in fields such as spectral imaging and optical communication.

Droplet-based mechanical transducers modulated by the symmetry of wettability patterns

Asymmetric mechanical transducers have important applications in energy harvesting, signal transmission, and micro-mechanics. To achieve asymmetric transformation of mechanical motion or energy, active robotic metamaterials, as well as materials with asymmetric microstructures or internal orientation, are usually employed. However, these strategies usually require continuous energy supplement and laborious fabrication, and limited transformation modes are achieved. Herein, utilizing wettability patterned surfaces for precise control of the droplet contact line and inner flow, we demonstrate a droplet-based mechanical transducer system, and achieve multimodal responses to specific vibrations. By virtue of the synergistic effect of surface tension and solid-liquid adhesion on the liquid dynamics, the droplet on the patterned substrate can exhibit symmetric/asymmetric vibration transformation when the substrate vibrates horizontally. Based on this, we construct arrayed patterns with distinct arrangements on the substrate, and employ the swarm effect of the arrayed droplets to achieve three-dimensional and multimodal actuation of the target plate under a fixed input vibration. Further, we demonstrate the utilization of the mechanical transducers for vibration management, object transport, and laser modulation. These findings provide a simple yet efficient strategy to realize a multimodal mechanical transducer, which shows significant potential for aseismic design, optical molding, as well as micro-electromechanical systems (MEMS).

Optimization Design of CMUT Sensors with Broadband and High Sensitivity Characteristics Based on the Genetic Algorithm.

In this study, we propose a method for optimizing the design of CMUT sensors using genetic algorithms. Existing CMUT sensors face frequency response and sensitivity limitations, necessitating optimization to enhance their sensing performance. Traditional optimization methods are often intricate and time-consuming and may fail to yield the optimal solution. Genetic algorithms, which simulate the biological evolution process, offer advantages in global optimization and efficiency, making them widely utilized in the optimization design of Microelectromechanical Systems (MEMS) devices. Based on the theoretical framework and finite element model of CMUT sensors, we propose a CMUT array element optimization design method based on genetic algorithms. The optimization and validation results demonstrate that we have successfully designed a broadband CMUT array element consisting of four microelements with a 1-2 MHz frequency range. Compared with a randomly arranged array element, the optimized array shows a 63.9% increase in bandwidth and a 7.5% increase in average sensitivity within the passband. Moreover, the sensitivity variance within the passband is reduced by 50.2%. Our proposed method effectively optimizes the design of high sensitivity CMUT sensors with the desired bandwidth, thereby offering significant reference value for the optimization design of CMUT sensors.

Design and Analysis of Mode-Matched Decoupled Mass MEMS Gyroscope with Improved Thermal Stability

Abstract This paper presents an efficient design approach for microelectromechanical systems (MEMS) gyroscope considering the design constraint of MEMSCAP's Silicon-on-Insulator Multi-User MEMS Processes (SOIMUMPs). A design for a decoupled mass MEMS resonant gyroscope with tuning electrodes is presented to minimize cross-axis coupling and optimize the gyroscope's performance. The device features a size of 1.8 ×2.772 mm^2. A decoupled mass MEMS gyroscope has been designed using a novel mechanical beam configuration that optimizes the structural design to reduce unwanted interactions between drive and sense axes motions. Mode order has been achieved by obtaining the first two modes as drive and sense modes at 9946.3 Hz and 10202.7 Hz, respectively. Parallel plate electrostatic tuning electrodes have been added to adjust and match the drive and sense modes at the resonant frequencies of 9946 Hz. This mode matching is crucial for optimizing gyroscope performance, accuracy, and sensitivity. The effects of temperature variation on the performance of the designed decoupled mass MEMS gyroscope have been investigated, particularly in terms of its mode-matched operation achieved using tuning electrodes. Finite Element Method (FEM) simulations were conducted, demonstrating that thermal stability was achieved, and mode-matched operation was maintained within the temperature range of -40 ºC to 80 ºC. The gyroscope exhibits enhanced performance compared to existing MEMS gyroscopes under mode-matched conditions, featuring a lower temperature coefficient of frequency (TCF) at 0.0415 Hz/ºC in the drive mode and 0.0165 Hz/ºC in the sense mode. FEM analysis for the fabrication process tolerances has been done, where MEMS gyroscope’s resonant frequencies, output capacitance, output displacement, and sense mode quality factor have shown negligible changes to fabrication process tolerances. Transient analysis was conducted using CoventorWare MEMS+ 3D schematic, which was integrated with MATLAB Simulink to measure the MEMS gyroscope’s output response, which corresponded with the varying input angular velocity signal.

Structural and chemical study of complex silver patterns additively manufactured by multi-photon reduction.

Multi-photon reduction (MPR) based on femtosecond laser makes rapid prototyping and molding in micro-nano scale feasible, but is limited in material selectivity due to lack of the understanding of the reaction mechanism in MPR process. In this paper, additively manufacturing of complex silver-based patterns through MPR is demonstrated. The effects of laser parameters, including laser pulse energies and scanning speeds, on the structural and chemical characteristics of the printed structures are systematically investigated. The results show that the geometric size of printed cubes deviates from the designed size further by increasing laser pulse energies or decreasing scanning speeds. The reaction mechanism of MPR is revealed by studying the elemental composition and chemical structures of printed cubes. The evolution of Raman spectra upon the laser processing parameters suggests that the MPR process mainly includes two processes: reduction and decomposition. In the MPR process, silver ions are reduced and grow into particles by accepting the electrons from ethonal molecules; meanwhile carboxyl groups in polyvinylpyrrolidone are decomposed and form amorphous carbon that is attached on the surface of silver particles. The conductivity of silver wires fabricated by MPR reaches 2×105 S/m and stays relatively constant as varying their cross section area, suggesting excellent electrical conduction. The understanding of the MPR process would accelerate the development of MPR technology and the implementation of MPR in micro-electromechanical systems could therefore be envisioned.

Modeling and Reliability Analysis of MEMS Gyroscope Rotor Parameters under Vibrational Stress.

Vibrational environments can cause drift or changes in Micro-Electro-Mechanical System (MEMS) gyroscope rotor parameters, potentially impacting their performance. To improve the effective use of MEMS gyroscopes, this study introduced a method for evaluating the reliability of parameter degradation under vibration. We analyzed the working principle of MEMS gyroscope rotors and investigated how vibration affects their parameters. Focusing on zero bias and scale factor as key performance indicators, we developed an accelerated degradation model using the distributional assumption method. We then collected degradation data for these parameters under various vibration conditions. Using the Copula function, we established a reliability assessment approach to evaluate the degradation of the MEMS gyroscope rotor's zero bias and scale factor under vibration, enabling the determination of reliability for these parameters. Experimental findings confirmed that increasing stress levels lead to reduced failure times and increased failure rates for MEMS gyroscope rotors, with significant changes observed in the zero bias parameter. Our evaluation method effectively characterizes changes in the reliability of the MEMS gyroscope rotor's scale factor and zero bias over time, providing valuable information for practical applications of MEMS gyroscopes.

Miniaturized double-wing ∆E-effect magnetic field sensors

Magnetoelastic micro-electromechanical systems (MEMS) are integral elements of sensors, actuators, and other devices utilizing magnetostriction for their functionality. Their sensitivity typically scales with the saturation magnetostriction and inversely with magnetic anisotropy. However, large saturation magnetostriction and small magnetic anisotropy make the magnetoelastic layer highly susceptible to minuscule anisotropic stress. It is inevitably introduced during the release of the mechanical structure during fabrication and severely impairs the device’s reproducibility, performance, and yield. To avoid the transfer of residual stress to the magnetic layer, we use a shadow mask deposition technology. It is combined with a free-free magnetoelectric microresonator design to minimize the influence of magnetic inhomogeneity on device performance. Magnetoelectric resonators are experimentally and theoretically analyzed regarding local stress anisotropy, magnetic anisotropy, and the ΔE-effect sensitivity in several resonance modes. The results demonstrate an exceptionally small device-to-device variation of the resonance frequency < 0.2% with large sensitivities comparable with macroscopic ΔE-effect magnetic field sensors. This development marks a promising step towards highly reproducible magnetoelastic devices and the feasibility of large-scale, integrated arrays.

In-situ measurement of subway train-induced vibration and noise of steel spring floating slab with MEMS-based sensing units

The concrete floating slab, as a widely-used measure to reduce the subway-induced vibration and noise, can deteriorate with the accumulation of trainload. To monitor the dynamic performance of the floating slab during operation, this study develops a lightweight sensing unit based on microelectromechanical systems (MEMS). This sensing unit, which can be easily mounted on the concrete slab, enables synchronous monitoring of vibration and noise at different sampling frequencies with a very low power consumption. With the advantage of easy installation, the sensing units are mounted on various concrete slabs and tunnel walls to collect massive vibration and noise data. With the monitoring data, the dynamic performance and vibration reduction capability of the floating slab can be assessed. A case study is conducted on two floating slab sections: one section has a floating slab with a potential defect on its shear hinge and the other has a normal floating slab. The monitoring results show that: (1) the train condition has a significant effect on the amplitude of the track-side vibration; (2) the train-induced noise data last longer than vibration data during the passage of trains; (3) for the floating slab with shear hinge defect, the vibration levels at edge points are much higher than that in the middle. Through the monitoring test, the performance of the MEMS-based sensing unit and its adaptability in subway circumstances are verified.

Enhancing Tire Condition Monitoring through Weightless Neural Networks Using MEMS-Based Vibration Signals

Tire pressure monitoring system (TPMS) has a critical role in safeguarding vehicle safety by monitoring tire pressure levels. Keeping the accurate tire pressure is necessary for confirming comfortable driving and safety, and improving fuel consumption. Tire problems can result from various factors, such as road surface conditions, weather changes, and driving activities, emphasizing the importance of systematic tire checks. This study presents a novel method for tire condition monitoring using weightless neural networks (WNN), which mimic neural processes using random-access memory (RAM) components, supporting fast and precise training. Wilkes, Stonham, and Aleksander Recognition Device (WiSARD), a type of WNN, stands out for its capability in classification and pattern recognition, gaining from its ability to avoid repetitive training and residual formation. For vibration data acquisition from tires, cost-effective micro-electro-mechanical system (MEMS) sensors are employed, offering a more economical solution than piezoelectric sensors. This approach yields a variety of features, such as autoregressive moving average (ARMA), statistical and histogram features. The J48 decision tree algorithm plays a critical role in selecting essential features for classification, which are subsequently divided into training and testing sets, crucial for assessing the WiSARD classifier’s efficacy. Hyperparameter optimization of the WNN leads to improved classification accuracy and shorter computation times. In practical tests, the WiSARD classifier, when optimally configured, achieved an impressive 97.92% accuracy with histogram features in only 0.008 seconds, showcasing the capability of WNN to enhance tire technology and the accuracy and efficiency of tire monitoring and maintenance.