Microelectromechanical Systems Mirror Research Articles

Accurately estimating the scanning angle of an electrostatic MEMS mirror with a novel damping model

A novel damping model to accurately analyze the scanning angle of electrostatic microelectromechanical system (MEMS) mirrors is proposed in this article. The computational fluid dynamic (CFD) simulations are used to calculate the aerodynamic moment of the MEMS mirror oscillating in air. The simulation results demonstrate the linear dependence of the equivalent damping coefficient of the MEMS mirror on the oscillation amplitude and frequency. Then the equivalent damping expression of the MEMS mirror is established. The damping model is applied to the dynamic equation of the MEMS mirror for numerical solution. The frequency responses of the electrostatic MEMS mirror under square wave excitation with different voltage amplitudes and duty cycles are obtained. The measurement results provide good accuracy verification for numerical results. This verifies the accuracy of the proposed damping model, which can be used to accurately estimate the scanning angle in the design and parameter optimization process of electrostatic MEMS mirrors.

Theoretical modeling and experimental investigation of in-phase resonant MEMS mirrors with cascaded structures

This paper proposes an efficient nonlinear one-dimensional (1D) compact mass-damper-spring model to predict the dynamic response of electrostatic resonant micro-electro-mechanical system (MEMS) mirrors with cascaded structures. The time-dependent damping moment due to viscous shear and pressure drag is computed using semi-empirical analytical equations for comb-drive structures and device frames. Nonlinear electrostatic force induced by the comb drives is efficiently acquired based on the hybrid method. The optimized device is fabricated using MEMS fabrication processes based on a 4-inch silicon-on-insulator wafer. The proposed compact model with the measured key parameters from the fabricated device shows excellent capability to accurately predict nonlinear dynamic responses of the fabricated device, including parametric excitation and hysteretic frequency response, with an average error of less than 5%. In particular, our 1D model is three orders of magnitude faster than the conventional finite element method model (0.8 s versus 1 h), enabling efficient system-level optimization of the critical design parameters. Based on the parametric study, electrode gap distance and torsion spring width are found to be two critical design parameters and dimensional analysis is conducted for design optimization with scan angle enhancing from 16.8° to 24° compared with the first design.

Passive communication for low power distributed sensors using MEMS optical cavities

Distributed sensing has been of great interest in recent research. Distributed sensors are in part defined by the methods they use to communicate. We demonstrate a new low power method of optical communication. Instead of communicating optically by generating new light to communicate using a light emitting diode or laser, our method uses optical interference to vary the reflectivity of a micro-electromechanical systems (MEMS) optical cavity. A thin air gap between an adjustable MEMS mirror made on a silicon on insulator die and glass encapsulation generates optical interference. By moving the mirror electrostatically, the reflected light intensity is modulated, and signals are transmitted passively. The transmitted signal is measured by observing the reflected light intensity with a photodiode. We demonstrate the use of fiber optic cables to deliver illumination and collect reflected light with modulated intensity. We propose that these devices may also be used in series arrays where reflected light from one optical cavity can be used as illumination for another.

Development of handheld optical coherence tomography based on commercial intra‐oral scanner shape for extended clinical utility in dentistry

AbstractThe main objective of this study is to develop a handheld dental optical coherence tomography (OCT) system capable of imaging the target area of the teeth in the oral cavity and demonstrate the applicability of the developed system to in vivo dental disease diagnosis based on a user‐friendly scanner form. The design of the developed system is based on mimicking the shape of a commonly used commercial intra‐oral scanner (IOS) so that the system users do not feel awkward when using it. A microelectromechanical system (MEMS) scanning unit was used to optimize the overall size of the system, and the optical axis was designed in a Z‐shape to maximize the beam size reflected by the MEMS mirror. A pre‐study of in vivo oral scanning was performed to demonstrate the enhanced clinical feasibility of the developed system. Furthermore, the main experiment classified teeth with worn cervical regions into two groups according to the cervical abrasion shape. The developed dental OCT system produced a three‐dimensional image of the scanning area and quantitatively analyzed the margin gap through an A‐scan profile based on cross‐sectional images. This study confirms the effectiveness of the developed handheld dental OCT system in actual dental clinical practice, and we expect our system to be utilized for various dental diseases, not only for diagnosing a cervical abrasions.

Prediction of the drift trend in piezoelectrically actuated MEMS mirror by 2D reliability modelling

One of the most prominent applications of piezoelectric materials is in microelectromechanical systems (MEMS). A current challenge in piezo-MEMS is the prediction of the reduction in efficiency of piezoelectric materials towards the end of their lifespan. In this research, we assess the reliability of piezoelectrically actuated micromirrors (piezo-mirrors) and estimate the parametric drift, such as the drift of the opening angle, during the specified lifetime. We accomplish this assessment and evaluation by considering the impacts of both temperature and driving voltage. In this study, the analytical relationship between micromirror performance, driving voltage, temperature, and operative time has been described and predicted by using a 2D reliability model based on a characteristic function that explains the PZT stability. The operative time acceleration associated with distinct test conditions has been considered by using a power law model for voltage dependency and an Arrhenius model to describe the relationship between the temperature and its acceleration effect on the drift of the piezo-mirror performance. Micromirrors were subjected to experimental tests, and the results were employed to validate the reliability model presented in this work. Therefore, the model parameters were fine-tuned using experimental data from High-Temperature Operative Life (HTOL) test, and the reliability model was validated by comparing the experimental data from HTOL test performed under different test conditions.

Biaxial Piezoelectric MEMS Mirrors with Low Absorption Coating for 1550 nm Long-Range LIDAR.

This paper presents the fabrication and characterization of a biaxial MEMS (MicroElectroMechanical System) scanner based on PZT (Lead Zirconate Titanate) which incorporates a low-absorption dielectric multilayer coating, i.e., a Bragg reflector. These 2 mm square MEMS mirrors, developed on 8-inch silicon wafers using VLSI (Very Large Scale Integration) technology are intended for long-range (>100 m) LIDAR (LIght Detection And Ranging) applications using a 2 W (average power) pulsed laser at 1550 nm. For this laser power, the use of a standard metal reflector leads to damaging overheating. To solve this problem, we have developed and optimised a physical sputtering (PVD) Bragg reflector deposition process compatible with our sol-gel piezoelectric motor. Experimental absorption measurements, performed at 1550 nm and show up to 24 times lower incident power absorption than the best metallic reflective coating (Au). Furthermore, we validated that the characteristics of the PZT, as well as the performance of the Bragg mirrors in terms of optical scanning angles, were identical to those of the Au reflector. These results open up the possibility of increasing the laser power beyond 2W for LIDAR applications or other applications requiring high optical power. Finally, a packaged 2D scanner was integrated into a LIDAR system and three-dimensional point cloud images were obtained, demonstrating the scanning stability and operability of these 2D MEMS mirrors.

A novel triangular stereo model for 3D reconstruction of uniaxial MEMS-based structured light system

Benefiting from the small size and low driven voltage of the Micro Electro Mechanical Systems (MEMS) mirror, MEMS-based structured light (SL) 3D reconstruction has recently attracted much attention. In this paper, we propose a novel triangular stereo model for uniaxial MEMS-based 3D reconstruction. Existing SL methods based on MEMS mirrors often require the construction of a look-up table(LUT), but the proposed method only requires 34 parameters for accurate reconstruction. By analyzing the anatomy of the MEMS mirror, we put forward a transition function that allows the MEMS mirror to be regarded as an inverse camera model. Then, the triangular stereo principle can be directly employed to calculate 3D information. Furthermore, we present a calibration method to obtain the parameters of our model, since MEMS mirrors can only perform unidirectional fringe projection. Extensive experiments are performed to verify the feasibility and accuracy of our proposed mathematical model and calibration method.

MEMS Enabled Miniature Two-Photon Microscopy for Biomedical Imaging

Over the last decade, two-photon microscopy (TPM) has been the technique of choice for in vivo noninvasive optical brain imaging for neuroscientific study or intra-vital microendoscopic imaging for clinical diagnosis or surgical guidance because of its intrinsic capability of optical sectioning for imaging deeply below the tissue surface with sub-cellular resolution. However, most of these research activities and clinical applications are constrained by the bulky size of traditional TMP systems. An attractive solution is to develop miniaturized TPMs, but this is challenged by the difficulty of the integration of dynamically scanning optical and mechanical components into a small space. Fortunately, microelectromechanical systems (MEMS) technology, together with other emerging micro-optics techniques, has offered promising opportunities in enabling miniaturized TPMs. In this paper, the latest advancements in both lateral scan and axial scan techniques and the progress of miniaturized TPM imaging will be reviewed in detail. Miniature TPM probes with lateral 2D scanning mechanisms, including electrostatic, electromagnetic, and electrothermal actuation, are reviewed. Miniature TPM probes with axial scanning mechanisms, such as MEMS microlenses, remote-focus, liquid lenses, and deformable MEMS mirrors, are also reviewed.

Development of the high angular resolution 360° LiDAR based on scanning MEMS mirror

Light detection and ranging (LiDAR) using various operational principles has been applied in many fields, e.g., robotics navigation, autonomous vehicles, unmanned aerial flyers, land surveying, etc. The multichannel LiDAR system is of great importance in the field of autonomous driving due to its larger field of view (FoV). However, the number of transceivers limits the vertical angular resolution of multichannel LiDAR systems and makes them costly. On the other hand, the emergence of microelectromechanical systems (MEMS) mirrors may provide a highly promising solution to a low-cost, high angular resolution LiDAR system. We have demonstrated a MEMS mirror-based 360° LiDAR system with high angular resolution and will present the detailed design process and obtained experimental results in this paper. With the combination of the MEMS mirror and a rotation platform for the LiDAR system, a 360° × 8.6° (horizontal × vertical) FoV was achieved. Compared with existing commercial multichannel 360° LiDAR systems, our system has 13.8 times better angular resolution than the Velodyne HDL-64 LiDAR sensor. The experimental results verified an excellent performance of 0.07° × 0.027° (horizontal × vertical) angular resolution, which enhances the panoramic scanning and imaging capability of the LiDAR system, potentially providing more accurate 3D scanning applications in areas such as autonomous vehicles, indoor surveying, indoor robotics navigation, etc.

Benchmarking Thiolate-Driven Photoswitching of Cyanine Dyes.

Carbocyanines are among the best performing dyes in single-molecule localization microscopy (SMLM), but their performance critically relies on optimized photoswitching buffers. Here, we study the versatile role of thiols in cyanine photoswitching at varying intensities generated in a single acquisition by a microelectromechanical systems (MEMS) mirror placed in the excitation path. The key metrics we have analyzed as a function of the thiolate concentration are photon budget, on-state and off-state lifetimes and the corresponding impact on image resolution. We show that thiolate acts as a concentration bandpass filter for the maximum achievable resolution and determine a minimum of ∼1 mM is necessary to facilitate SMLM measurements. We also identify a concentration bandwidth of 1-16 mM in which the photoswitching performance can be balanced between high molecular brightness and high off-time to on-time ratios. Furthermore, we monitor the performance of the popular oxygen scavenger system based on glucose and glucose oxidase over time and show simple measures to avoid acidification during prolonged measurements. Finally, the impact of buffer settings is quantitatively tested on the distribution of the glucose transporter protein 4 within the plasma membrane of adipocytes. Our work provides a general strategy for achieving optimal resolution in SMLM with relevance for the development of novel buffers and dyes.

Low-cost scanning LIDAR architecture with a scalable frame rate for autonomous vehicles.

Autonomous vehicles need accurate 3D perception with a decent frame rate and high angular resolution to detect obstacles reliably and avoid collisions. We developed a low-cost scanning multichannel light detection and ranging sensor architecture allowing scalable frame rates by adjusting the number of laser and detector pairs. Scanning is achieved by a pair of micro-electro-mechanical system (MEMS) mirrors. A control pattern for the MEMS mirrors to maximize the frame rate is presented. A built prototype based on the proposed architecture achieves a frame rate of 11.5Hz, a field of view of 70∘×30∘, and an angular resolution of 0.4°. The distance resolution is 6cm. Reliable single-shot detection for low-reflective objects up to 19m indoors and 11m under direct sunlight exposure is achieved. A performance assessment based on the presented measurement system for recently available vertical-cavity surface-emitting laser arrays with power densities up to 1k W/m m 2 shows promising improvement potential.

High-flexibility and high-accuracy phase delay calibration method for MEMS-based fringe projection systems.

Microelectromechanical system (MEMS) mirror based laser beam scanning (LBS) projectors for fringe projection profilometry (FPP) are becoming increasingly popular attributing to their small size and low cost. However, the initial phase of the scanning MEMS mirror employed in an LBS projector may vary over time, resulting in unstable and distorted fringe patterns. The distorted fringe patterns will largely decrease the accuracy of the three-dimensional (3D) topographic reconstruction. In this paper, an efficient phase delay calibration method based on a unique fringe projection sequence and a corresponding image processing algorithm is proposed. The proposed method can compensate the phase uncertainty and variation with no need to add any extra components. One LBS projector has been constructed using a uniaxial electrostatic MEMS mirror that has a mirror size of 2.5 mm × 2.5 mm and a scanning field of view of 60 ∘ at its resonance of 1523 Hz. 3D reconstruction experiments are conducted to study how the 3D reconstruction results are affected by the phase delay. The standard deviation of a sphere reconstruction is improved from 2.05 mm to 0.20 mm after the positive phase delay deviation of 5 μs is compensated using this new calibration method.

A MEMS-Based Optical Scanning System for Precise, High-Speed Neural Interfacing

Optical scanning is a prevalent technique for optical neural interfaces where light delivery with high spatial and temporal precisions is desired. However, due to the sequential nature of point-scanning techniques, the settling time of optical modulators is a major bottleneck for throughput and limits random access targeting capabilities. While fast lateral scanners exist, commercially available varifocal elements are constrained to 3-ms settling times, limiting the speed of the overall system to hundreds of hertz. Faster focusing methods exist but cannot combine fast operation and dwelling capability with electrical and optical efficiency. Here, we present a varifocal mirror comprised of an array of piston-motion micro-electromechanical systems (MEMS) micromirrors and a custom driver application specific integrated circuit (ASIC), offering fast operation with dwelling capability while maintaining high diffraction efficiency. The ASIC features a reconfigurable nonlinear digital-to-analog converter (DAC) to simultaneously compensate for the built-in nonlinearity of electrostatic actuators and the global process variations in MEMS mirrors. Experimental results demonstrate a wide continuous sweeping range that spans 22 distinctly resolvable depth planes with refresh rates greater than 12 kHz.

Design and manufacturing of a highly integrated optical module for Tianwen-1 probe's landing LiDAR

In this study, a highly-integrated optical module based on micro-electromechanical system (MEMS) mirror, glass with low thermal expansion coefficient, a higher-order aspheric lens with high refractive index and two position-optimized optical filters is proposed. The Mars exploration mission requirements and the non-coaxial optical path of the optical module are discussed, while the relationship between the signal-to-noise ratio (SNR) and the detection distance, as well as between the scanning field of view(FOV)and the entrance pupil diameter, is given. The transmitting module consisting of a scanning device and angle magnifier has a temperature range of −20 °C to +40 °C, and a good reliability at 1800 g@4000 Hz. The receiving module using two ZnS lenses and two narrow-band filters with bandwidths of 22 and 10 nm has an f number of 0.55, a back working distance of 3.24 mm and a normalized energy collection efficiency at the edge of the FOV of 72.8%. The presented optical module has a Ø30°FOV, 120 m detection distance and 2 mrad angular resolution, and has been successfully applied to Tianwen-1 Probe's landing LiDAR.

A MEMS modulator-based dual-channel mid-infrared laser heterodyne radiometer for simultaneous remote sensing of atmospheric CH4, H2O and N2O.

The performance of a micro-electro-mechanical system (MEMS) modulator-based dual-channel mid-infrared laser heterodyne radiometer (MIR-LHR) was demonstrated in ground-based solar occultation mode for the first time. A MEMS mirror was employed as an alternative modulator to the traditional mechanical chopper, which makes the system more stable and compact. Two inter-band cascade lasers (ICL) centered at 3.53 µm and 3.93 µm, were employed as local oscillators (LO) to probe absorption lines of methane (CH4), water vapor (H2O) and nitrous oxide (N2O). The system stability greater than 1000 s was evaluated by Allan variance. The experimental MIR-LHR spectra (acquired at Hefei, China, on February 24th 2022) of two channels were compared and were in good agreement with simulation spectra from atmospheric transmission modeling. The mixing ratio of CH4, H2O and N2O were determined to be ∼1.906 ppm, 3069 ppm and ∼338 ppb, respectively. The reported MEMS modulator-based dual-channel MIR-LHR in this manuscript has great potential to be a portable and high spectral resolution instrument for remote sensing of multi-component gases in the atmospheric column.

Piezoelectric MEMS Mirror with Lissajous Scanning for Automobile Adaptive Laser Headlights.

The emergence of smart headlights with reconfigurable light distributions that provide optimal illumination, highlight road objects, and project symbols to communicate with traffic participants further enhances road safety. Integrating all these functions in a single headlight usually suffers from issues of bulky multi-functional add-on modules with high cost or the use of conventional spatial light modulators with low optical efficiency and complex thermal design requirements. This paper presents a novel laser headlight prototype based on biaxially resonant microelectromechanical systems (MEMS) mirror light modulator for mapping blue laser patterns on phosphor plate to create structured white illumination and tunable road projection. The proposed headlight prototype system enables reconfigurable light distribution by leveraging laser beam scanning with fewer back-end lens and simple thermal design requirements. Built with thin-film lead zirconate titanate oxide (PbZrTiO3) actuators, the MEMS mirror achieved high-frequency biaxial resonance of 17.328 kHz, 4.81 kHz, and optical scan angle of 12.9°. The large mirror design of 2.0 mm facilitates more refined resolvable projection pixels, delivers more optical power, and provides moderate optical aperture to possibly serve as the common spatial light modulator of headlight and the light detection and ranging (LiDAR) towards all-in-one integration. The carefully designed bi-axial resonant frequency improves the device’s robustness by offsetting the lowest eigenmode away from the vehicle vibration. By establishing the laser headlight prototype systems of both 1D and 2D scanning modes, a mathematical model of laser modulation and MEMS electrical control principles of Lissajous scanning are proposed to tune the projection pattern density and shapes. It laid the foundation for developing a laser scanning control system with more complex project functions and prompting the application of MEMS for compact headlight system that addresses night driving visibility, eliminates glare effect, and renders interactive projection capabilities.

MEMS Modulator-Based Mid-Infrared Laser Heterodyne Radiometer for Atmospheric Remote Sensing

The performance of a mid-infrared laser heterodyne radiometer (MIR-LHR) based on a micro-electro-mechanical system (MEMS) mirror is demonstrated in ground-based solar occultation mode. A MEMS mirror is employed as an alternative modulator to the traditional mechanical chopper. High-resolution (∼0.0024 cm−1) transmission spectrum near 3.93 μm was obtained for atmospheric observation of N2O absorption. Operation of the MIR-LHR with laser-induced shot-noise limited performance was analyzed and experimentally achieved. The laser heterodyne spectrum obtained is consistent with Fourier-transform infrared (FT-IR) spectrometer and atmospheric transmission modeling. Compared to the traditional chopper, the MEMS mirror is smaller, lighter and lower power consumption which makes the system more stable and compact. The reported MIR-LHR in this article has great potential in aircraft instruments and satellite payloads.

Evaluation of robustness against external vibrations for long-range MEMS lidar with one-dimensional resonant micromirror

We describe the verification of a long-range one-dimensional (1D) scanning micro-electro-mechanical systems (MEMS) lidar specifically considering the robustness against external vibration influences. The 1D scanning MEMS lidar exploits a multichannel horizontal line laser to scan the scene vertically for a 10 deg × 11 deg horizontal and vertical field of view at a frame rate of up to 29 Hz. To evaluate the robustness against vibrations, a vibration evaluation setup is developed to apply a wideband vibration based on the automotive standard LV124. The vibration tests are performed in three conditions open loop without control and two phase-locked loops (PLLs) with default and high gain settings. The test results demonstrate that vibration can cause wobbly distortion along the scan angle in the open loop case and the PLLs can suppress effectively this influence in the mean and standard deviation of the standard point to surface error up to 69.3% and 90.0%, respectively. This verifies the benefits of the MEMS mirror control, ensuring stable point cloud measurements under vibrations in harsh automotive environments.

Core Selective Switch With Low Insertion Loss Over Ultra-Wide Wavelength Range for Spatial Channel Networks

The core selective switch (CSS) is an optical spatial switch that has been recently proposed as a key building block to achieve a scalable and low-insertion-loss spatial cross-connects for use in future spatial channel networks. In this paper, we report on a novel CSS design employing a two dimensionally arranged microlens-based multicore fiber (MCF) collimator array and a micro-electromechanical systems (MEMS) mirror array. The former enables precise alignment between MCFs and collimator lenses, and the latter yields polarization-independent high reflection over a wide wavelength range and a large tilt angle. Based on the design, a compact (∼50 mm) five-core <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"><tex-math notation="LaTeX">$1 \times 8$</tex-math></inline-formula> CSS prototype is fabricated. We experimentally show that the CSS prototype exhibits low insertion loss (1.2∼2.7 dB), low polarization dependent loss (< 0.25 dB), and low crosstalk (< <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"><tex-math notation="LaTeX">$ - 30$</tex-math></inline-formula> dB) characteristics over an ultra-wide wavelength range from 1500 nm to 1630 nm. Bit-error-rate measurements using optical signals in the C-band, S-band, and L-band show that the CSS prototype incurs no optical signal-to-noise ratio penalty in spatial channel routing over an ultra-wide wavelength band.

Amplitude Zone Plate in Adaptive Optics: Proposal of the Principle

One of the main elements in hardware-based adaptive optics systems is a deformable mirror. There is quite a large number of such mirrors based on different principles and exhibiting varying performance. They constitute a significant portion of the cost of the final optical devices. In this study, we consider the possibility of replacing an adaptive mirror with the adaptive amplitude Fresnel zone plate, implemented using a digital light-processing matrix. Since such matrices are widely used in mass industry products (light projectors), their costs in large batches are 1–2 orders of magnitude lower than the cost of inexpensive deformable mirrors. Numerical modeling for scanning an optical coherence tomography system with adaptive optics is presented. It is shown that wavefront distortions with high spatial frequencies and large amplitudes can be corrected using an amplitude Fresnel zone plate. The results are compared with piezoelectric and microelectromechanical system mirrors.