Design Of Microelectromechanical Systems Research Articles

Biologically inspired piezoresistive MEMS acoustic vector sensor for underwater applications

Underwater acoustics has assumed a pivotal role in the detection, navigation, communication, and target identification of ships and submarines. In recent years, advancements in noise reduction from marine vessels have underscored the significance of underwater acoustic vector sensors. This paper presents a novel approach to the design, fabrication, and characterization of a two-dimensional Micro-Electro Mechanical Systems (MEMS) vector acoustic sensor tailored for underwater environments. Traditional underwater acoustic vector sensors often employ doped polysilicon or silicon/germanium sensing films on rigid silicon substrates. The inflexible nature of silicon substrates necessitates labor-intensive and costly chemical-mechanical polishing processes to achieve submicron thickness, often requiring extended clean-room usage. In contrast, this work proposes a simplified, cost-effective, and scalable alternative. The sensor design utilizes reduced graphene oxide (rGO) as the sensing material and Kapton as the substrate, chosen for their unique properties. rGO exhibits high carrier mobility and low intrinsic noise, ensuring clear signals with minimal external interference, thereby improving measurement accuracy in challenging environments. Kapton provides excellent thermal stability, mechanical strength, and chemical resistance, along with superior insulating properties that reduce electrical noise, enhancing the signal-to-noise ratio. The designed vector sensor leverages the piezoresistive transduction principle, incorporating a thin piezoresistive film of rGO on a flexible Kapton substrate via a straightforward drop-casting method. Inspired by the sensory mechanisms of aquatic life, the two-dimensional vector sensor not only detects pressure associated with acoustic signals but also discerns the direction from which these low and ultralow frequency signals originate. The device's performance characteristics, sensitivity, and directivity are comprehensively evaluated through static, dynamic, and acoustic tests conducted in both air and water mediums. Static tests reveal the piezoresistive behavior of rGO under applied displacement, yielding displacement sensitivities of 0.0279 V/mm and 0.0276 V/mm for axial and radial displacements, respectively. Dynamic and acoustic tests demonstrate the sensor's capability to detect low-frequency signals spanning from 0.25 Hz to 200 Hz, exhibiting a smooth and favorable frequency response. In air, the sensor exhibits receiving sensitivities ranging from −15.18 dB to −19.75 dB (X-channel) and −13.67 dB to −16.67 dB (Y-channel). In the underwater environment, these values range from −134.40 dB to −138.93 dB (X-channel) and −131.83 dB to −136.93 dB (Y-channel). Notably, the variation in receiving sensitivity across channels in both air and water is limited to within 6 dB. Furthermore, the device showcases a symmetrical directivity pattern resembling the shape of an "8," with an approximate sensitivity of −136.66 dB, a significant improvement compared to the −165 dB sensitivity of conventional polysilicon underwater vector sensors. These experimental findings affirm the feasibility of the proposed underwater vector sensor, based on the piezoresistive effect and MEMS technology, highlighting its two-dimensional directivity capabilities.

Optimization Design of CMUT Sensors with Broadband and High Sensitivity Characteristics Based on the Genetic Algorithm.

In this study, we propose a method for optimizing the design of CMUT sensors using genetic algorithms. Existing CMUT sensors face frequency response and sensitivity limitations, necessitating optimization to enhance their sensing performance. Traditional optimization methods are often intricate and time-consuming and may fail to yield the optimal solution. Genetic algorithms, which simulate the biological evolution process, offer advantages in global optimization and efficiency, making them widely utilized in the optimization design of Microelectromechanical Systems (MEMS) devices. Based on the theoretical framework and finite element model of CMUT sensors, we propose a CMUT array element optimization design method based on genetic algorithms. The optimization and validation results demonstrate that we have successfully designed a broadband CMUT array element consisting of four microelements with a 1-2 MHz frequency range. Compared with a randomly arranged array element, the optimized array shows a 63.9% increase in bandwidth and a 7.5% increase in average sensitivity within the passband. Moreover, the sensitivity variance within the passband is reduced by 50.2%. Our proposed method effectively optimizes the design of high sensitivity CMUT sensors with the desired bandwidth, thereby offering significant reference value for the optimization design of CMUT sensors.

Design and analysis of novel microelectromechanical system based microgripper for manipulating microbiological species and micro objects

Design and analysis of a pair of novel microelectromechanical system (MEMS) microgrippers having single and multiple sets of jaws respectively, incorporated with displacement amplification mechanism and electrostatic force sensor is presented in this research work. The novelty of the proposed microgrippers is their unique and efficient designs, having the versatility of gripping ranges. The size of the microgripper is 3.2 × 3.7 mm2 in both cases and has one and three sets of jaws with gripping ranges of 30–64 µm, 175–200 µm, and 350–380 µm respectively. The three jaw sets are application-specific to the multicellular small organism, eukaryotic cells, and microcells, respectively. The microgrippers are being actuated by an optimized V-shaped thermal chevron actuator whose input is amplified by using a pantograph displacement amplification mechanism with an amplification factor of 54. The force applied to the gripping object is sensed by a rotary comb electrostatic force sensor. Special attention has been paid to the structural design, and detailed stress analysis has been discussed. This research work includes static, electrostatic, parametric, and electrothermal analysis carried out using Finite Element Method (FEM) techniques and analytical modeling. The results show that the operating voltage range of the devices is from 4 to 9.25 V, having a maximum operational temperature of 380 °C with a factor of safety of 1.026. The maximum capacitance change with the full operational range of microgrippers is 0.63 µf, having a capacitive sensitivity of 19.6 nf/µm. The microgrippers can be used as an instrument to grip not only the microbiological species but also can be beneficial to carry out manipulations at the micro-level like micro-assembly. The proposed microgripper has a substantial structural stability, has a high amplification factor and accommodates manipulation of a wide range of microorganism.

Uncertainty quantification with high-dimensional correlated process variations for an in-situ thermal expansion coefficient test structure

The impacts of process variations on the π-shaped thermal expansion coefficient (TEC) in-situ test structure are analyzed. Correlations among high-dimensional design parameters have to be taken into account for this type of structure, while the widely studied polynomial chaos expansion (PCE) technique is incapable of solving such problems. This paper presents a novel method for high-dimensional uncertainty quantification problems with non-Gaussian correlated variants. As a pre-processing method, the Spearman correlation coefficient and generalized lambda distribution are merged to eliminate the correlation. Then a compressed-sensing based Legendre-sparse solver is applied benefiting from the uniformly distributed parameters derived from the pre-processing and thus the cost of rebuilding correlated basis functions is eliminated. This method has demonstrated superior performance over existing methods in the analysis of TEC in-situ test structures. This analysis shows that the measurement accuracy of the test structure demonstrates good performance and is insensitive to process errors, which is consistent with experimental data. The presented technique has the potential to be applied in the design of various microelectromechanical system (MEMS) devices.

A computational study on the effects of fast-rising voltage on ionization fronts initiated in sub-mm air and CO2\\documentclass[12pt]{minimal} \\usepackage{amsmath} \\usepackage{wasysym} \\usepackage{amsfonts} \\usepackage{amssymb} \\usepackage{amsbsy} \\usepackage{mathrsfs} \\usepackage{upgreek} \\setlength{\\oddsidemargin}{-69pt} \\begin{document}$$_{2}$$\\end{document} gaps

Gas discharge and breakdown phenomena have become increasingly important for the development of an ever-growing number of applications. The need for compact and miniaturized systems within power, pulsed power, semiconductor, and power electronic industries has led to the imposing of significant operating electric field stresses on components, even within applications with low operating voltages. Consequently, the interest in gas discharge processes in sub-millimeter and microscale gaps has grown, as the understanding of their initiation and propagation is critical to the further optimization of these technologies. In this work, a computational study of primary ionization fronts has been conducted, which systematically investigated the role of voltage rate-of-rise in point-plane and point-point electrode geometries with an inter-electrode gap maintained at 250 μ\\documentclass[12pt]{minimal} \\usepackage{amsmath} \\usepackage{wasysym} \\usepackage{amsfonts} \\usepackage{amssymb} \\usepackage{amsbsy} \\usepackage{mathrsfs} \\usepackage{upgreek} \\setlength{\\oddsidemargin}{-69pt} \\begin{document}$$\\upmu$$\\end{document}m and a needle radius of 80 μ\\documentclass[12pt]{minimal} \\usepackage{amsmath} \\usepackage{wasysym} \\usepackage{amsfonts} \\usepackage{amssymb} \\usepackage{amsbsy} \\usepackage{mathrsfs} \\usepackage{upgreek} \\setlength{\\oddsidemargin}{-69pt} \\begin{document}$$\\upmu$$\\end{document}m. Using the hydrodynamic approach with the local mean energy approximation, along with simplified plasma chemistry, simulations have been performed under positive and negative ramp voltages, rising at 50, 25, 16.67, 12.5, and 10 kV/ns in synthetic air and in pure CO2\\documentclass[12pt]{minimal} \\usepackage{amsmath} \\usepackage{wasysym} \\usepackage{amsfonts} \\usepackage{amssymb} \\usepackage{amsbsy} \\usepackage{mathrsfs} \\usepackage{upgreek} \\setlength{\\oddsidemargin}{-69pt} \\begin{document}$$_{2}$$\\end{document}. Results on the developed electric field, electron densities, and propagation velocities are presented and discussed. Effects on the cathode sheath thickness scaling with voltage rate-of-rise have been additionally analyzed, the mechanisms behind these effects and their potential impacts are discussed. The work conducted in this study contributes towards an increased understanding of the gas discharge process, under fast-transients and nonuniform electric fields, with relevance to microelectromechanical, power, and pulsed power system design.

Modeling of Magnetoelectric Microresonator Using Numerical Method and Simulated Annealing Algorithm.

A comprehensive understanding of the linear/nonlinear dynamic behavior of wireless microresonators is essential for micro-electromechanical systems (MEMS) design optimization. This study investigates the dynamic behaviour of a magnetoelectric (ME) microresonator, using a finite element method (FEM) and machine learning algorithm. First, the linear/nonlinear behaviour of a fabricated thin-film ME microactuator is assessed in both the time domain and frequency spectrum. Next, a data driven system identification (DDSI) procedure and simulated annealing (SA) method are implemented to reconstruct differential equations from measured datasets. The Duffing equation is employed to replicate the dynamic behavior of the ME microactuator. The Duffing coefficients such as mass, stiffness, damping, force amplitude, and excitation frequency are considered as input parameters. Meanwhile, the microactuator displacement is taken as the output parameter, which is measured experimentally via a laser Doppler vibrometer (LDV) device. To determine the optimal range and step size for input parameters, the sensitivity analysis is conducted using Latin hypercube sampling (LHS). The peak index matching (PIM) and correlation coefficient (CC) are considered assessment criteria for the objective function. The data-driven developed models are subsequently employed to reconstruct/predict mode shapes and the vibration amplitude over the time domain. The effect of driving signal nonlinearity and total harmonic distortion (THD) is explored experimentally under resonance and sub-resonance conditions. The vibration measurements reveal that as excitation levels increase, hysteresis variations become more noticeable, which may result in a higher prediction error in the Duffing array model. The verification test indicates that the first bending mode reconstructs reasonably with a prediction accuracy of about 92 percent. This proof-of-concept study demonstrates that the simulated annealing approach is a promising tool for modeling the dynamic behavior of MEMS systems, making it a strong candidate for real-world applications.

Coupling effect of strain gradient strengthening and thermal softening on the microscale plastic behavior of metallic materials

Size effects and thermal effects together determine the microscale plastic response of metallic structures in high-integrated microelectromechanical systems (MEMS) at different temperatures. To investigate the microscale plastic behavior of metallic materials at different temperatures, a thermo-mechanical coupled microscale plasticity model is developed. In the mechanical part of this model, the framework of conventional plasticity theory is maintained, and the plastic strain gradient is introduced as an internal variable to increase the tangential hardening modulus without the introduction of higher-order stress and higher-order boundary conditions. The influence of temperature on the mechanical parameters (e.g. the yield strength) is calibrated by experiment results. In the thermal part of this model, the heat generation in the plastic deformation stage is calculated by the difference between the plastic work and the hardening stored energy influenced by the plastic strain gradient. Due to the strong nonlinearity of the coupled equations, a finite element solution algorithm that combines the radial return method and the staggered solution scheme is proposed. The effectiveness of this model and its solution algorithm is verified by comparisons with the experiment results and a numerical benchmark example. Finally, taking the tensile behavior of a plate with a hole in its center as an example, the coupling effect of strain gradient strengthening and thermal softening on the microscale plastic behavior of metallic materials is investigated. The results show that the microscale plastic behavior of metallic materials at high temperatures depends on the competition between thermal softening and strain gradient strengthening. Our study provides a theoretical basis and a reliable simulation method for the design of MEMS at different temperatures.

Enhanced toluene gas-sensing properties of MEMS sensor based on Pt-loaded SnO2 nanoparticles

Rapid detection of low concentration toluene is highly desirable in environment monitoring, industrial processes, medical diagnosis, etc. In this study, we prepared Pt-loaded SnO2 monodispersed nanoparticles through hydrothermal method and assembled a sensor based on micro-electro-mechanical system (MEMS) to detect toluene. Compared with the pure SnO2, the 2.92 wt% Pt-loaded SnO2 sensor exhibits a 2.75 times higher gas sensitivity to toluene at about 330 °C. Meanwhile, the 2.92 wt% Pt-loaded SnO2 sensor also has a stable and good response to 100 ppb of toluene. Its theoretical detection limit is calculated as low as 12.6 ppb. Also, the sensor has a short response time of ∼10 s to different gas concentrations, as well as the excellent dynamic response—recovery characteristics, selectivity, and stability. The improved performance of Pt-loaded SnO2 sensor can be explained by the increase of oxygen vacancies and chemisorbed oxygen species. The electronic and chemical sensitization of Pt to SnO2-based sensor, together with small size and fast gas diffusion of the MEMS design ensured fast response and ultra-low toluene detection. This provides new ideas and decent prospect for developing miniaturized, low-power-consumption, and portable application of gas sensing devices.

Comparative evaluation of omnidirectional and directional micro-electromechanical system microphone performance

As the need for directionality becomes a key requirement in audio applications, directional microphones have begun to enter the micro-electromechanical system (MEMS) design and market space, and their performance is approaching that of top-of-the-line omnidirectional MEMS microphones. This presentation examines and compares the performance limitations for both types of MEMS microphones and suggests more comprehensive methods of characterization that allow the qualities of directional MEMS microphones to be fully captured. Mechanical thermal noise caused by Brownian motion of air particles, measured with a laser Doppler vibrometer system, are shared and discussed for a variety of microphones and test structures. Parameters such as signal-to-noise ratio, total harmonic distortion, and frequency response are re-examined in order to capture the value of a microphone that exhibits directional behavior. Insights and suggestions are made for improvement and future work.

Thermoelastic damping in MEMS gyroscopes at high frequencies

Microelectromechanical systems (MEMS) gyroscopes are widely used, e.g., in modern automotive and consumer applications, and require signal stability and accuracy in rather harsh environmental conditions. In many use cases, device reliability must be guaranteed under large external loads at high frequencies. The sensitivity of the sensor to such external loads depends strongly on the damping, or rather quality factor, of the high-frequency mechanical modes of the structure. In this paper, we investigate the influence of thermoelastic damping on several high-frequency modes by comparing finite element simulations with measurements of the quality factor in an application-relevant temperature range. We measure the quality factors over different temperatures in vacuum, to extract the relevant thermoelastic material parameters of the polycrystalline MEMS device. Our simulation results show a good agreement with the measured quantities, therefore proving the applicability of our method for predictive purposes in the MEMS design process. Overall, we are able to uniquely identify the thermoelastic effects and show their significance for the damping of the high-frequency modes of an industrial MEMS gyroscope. Our approach is generic and therefore easily applicable to any mechanical structure with many possible applications in nano- and micromechanical systems.

Mechanical Property Measurement of Micro/Nanoscale Materials for MEMS: A Review

By virtue of a great progress of semiconductor fabrication technologies, micro electro‐mechanical systems (MEMS) have been developed for a wide variety of industries. For reliability of MEMS, micromaterials in MEMS need to be examined experimentally, and the obtained results need to be reflected in the design of MEMS. In addition, with the benefit of such the MEMS technology, nowadays mechanical characteristics of nanomaterials have been evaluated precisely. Nanoscale mechanical testing provides an opportunity to find new unique physical phenomena, such as plastic deformation in Si at intermediate temperatures. In this review paper, mechanical testing technologies developed for investigating micro and nanoscale materials are reviewed. Then, mechanical characteristics of Si and other materials evaluated using the micro and nano mechanical testing technologies are introduced. © 2022 Institute of Electrical Engineers of Japan. Published by Wiley Periodicals LLC.

A Bidirectional MEMS-Like Passive Beamformer for Emerging Millimeter-Wave Applications

In this article, the design and implementation of a low-loss bidirectional microelectromechanical system (MEMS)-like passive beamformer for emerging millimeter-wave (mm-Wave) applications are illustrated. A 4 <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$\times $ </tex-math></inline-formula> 4 phased-array antenna (PAA) is fabricated employing the proposed beamformer for demonstration. The phase shifter (PS) embedded in the beamformer operates based on the principle of loaded-transmission line (TL) PSs. Slow wave mechanism is employed to shrink the size of the PS. The PS measurement results show the average insertion loss (IL) of 1.3 dB in all the tuning states and the IL variation is 0.9 dB. The PS provides 380° of the phase tuning range in a compact footprint area of 2.4 mm <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$\times $ </tex-math></inline-formula> 3 mm. The antenna array incorporates slot-coupled patch antennas with left-handed circularly polarized (LHCP) radiation. The operating frequency bandwidth of the antenna system ranges from 28 to 30 GHz to provide co-pol/X-pol discrimination of more than 12 dB for all the steering angles. Measurement results show the beam steering angular range of ± 30° in both elevation and azimuth planes. The measurement results also show the peak directivity of 18.48 dBic and the radiation efficiency of 58% at boresight at the frequency of 29 GHz. The efficiency drops 16% when the steering angle reaches the maximum.

Features measurement analysis of pull-in voltage for embedded MEMS

&lt;p&gt;The embedded micro electro mechanical systems (MEMS) is a technology that is creating a new era in all fields and especially in the internet of things (IoT) field. MEMS are necessary components for the realization of tiny micro/nano circuits. For this reason, designers are facing many challenges in designing embedded MEMS for achieving efficient products. The pull-in voltage is one of the most important parameters of MEMS design. In this work, we are interested in the analysis of some geometrical and mechanical parameters for the pull-in. The objective is to study of the concept of pull-in voltage in order to reduce it. First, we made a simulation to choose the appropriate material achieving a lower pull-in voltage. Then, we analysed the impact of geometrical parameters on the pull-in voltage. In this work, Finite element method using COMSOL Multiphysics® software is employed to compute the Pull-in voltage and study the behaviour of the MEMS Switch in order to optimize it. Pull-in voltage can be reduced by careful selection of the cantilever material and it can be further reduced by changing the beam parameters.&lt;/p&gt;

Efficient system-level simulations of thermal wind sensors considering environmental factors

For the development of micro-electro-mechanical system (MEMS) technology during the past several years, MEMS design has requirements of high precision, high efficiency, iterative design, joint design of structure and circuit and so on. With the improvement of thermal wind sensor performance requirements and the complexity of the application environment, it is becoming increasingly difficult to ignore the impact of environmental factors. However, there is no system-level model considering the influence of environmental factors adequately in macro model. To solve these problems, a 2D thermal wind sensor macro model considering environmental factors is proposed. In order to build a macro model which can reflect the output of sensors in different environments, this paper, starting from the basic law of heat transfer, proposes an accurate macro model of the thermal wind sensor. The model proposed in this study accurately considers the influence of thermal and transport properties in different environments, and can be simulated together with the interface circuits in Cadence software. The results indicate that the variation of temperature and atmospheric pressure in the natural range can affect the sensor output by more than 15%, and the influence of relative humidity should not be ignored when the temperature is higher than 70 °C. Furthermore, the flow direction over the sensor can be further studied according to the 2D equivalent circuit model. The simulation results agree well with the experimental results, and the results can provide a valuable reference for the research and practical application of thermal wind sensors.

Field-programmable gate array (FPGA) based programmable digital emulator of vibratory microelectromechanical systems (MEMS) gyroscopes.

This paper presents a hardware emulator of microelectromechanical systems (MEMS) vibratory gyroscopes that can be used for characterization and verification of control/interface electronics by means of hardware-in-the-loop testing, thus speeding up design cycles by decoupling these tasks from the often longer MEMS design and fabrication cycles. The easily re-configurable hardware emulator is completely synthesized on a field-programmable gate array board. The emulator is shown to successfully model the Coriolis effect along with the prominent error sources present in typical MEMS gyroscopes, namely, quadrature error, spring nonlinearity, and thermo-mechanical, electronic, and environmental noise. Preliminary experimental results characterizing the noise and nonlinearity models based on a prototype with user-controllable device parameters synthesized on the Xilinx Zynq®-7020 SoC (Digilent ZYBO Z7 board) are presented.

Indirect stress and air-cavity displacement measurement of MEMS tunable VCSELs via micro-Raman and micro-photoluminescence spectroscopy

We employ micro-Raman spectroscopy to optically infer the stress experienced by the legs of a bridge-type microelectromechanical systems (MEMS) used in high contrast gratings tunable vertical cavity surface emitting lasers (VCSELs). We then employ micro-photoluminescence (PL) spectroscopy to indirectly measure the air cavity displacement of the same MEMS structure. Results from micro-Raman showed that electrostatically actuating the MEMS with a DC bias configuration yields increasing residual stress on the endpoints of the MEMS with values reaching up to 0.8 GPa. We simulated a finite element model via Comsol Multiphysics which agrees with the trend we observed based on our micro-Raman data. Our micro-PL spectroscopy showed that change in the air cavity of the VCSEL structure resulted in a change in the full width of the PL peak emitted by the layer consisting of four pairs of distributed Bragg reflectors. The change in the full width of the PL peak was due to the change in the optical cavity induced by displacing the MEMS via externally applied bias and agrees with our transfer matrix convolution simulation. These optical characterization tools can be used for failure analysis, MEMS design improvements, and monitoring of MEMS tunable VCSEL devices for mass production and manufacturing.

着陸レーザーレーダ用2次元MEMS光スキャナ

We present the design, fabrication, and demonstration of a two-dimensional MEMS (microelectromechanical systems) optical scanner for a compact laser radar for a spacecraft landing on a planet. Electrostatic force caused by the voltages applied to the comb-like micro electrodes is adopted as an operation principle that is inherently robust to the harsh environment in space. Optical scan angles of 10º × 15º is obtained with drive voltages of 150V.

Coupled Finite Element-Finite Volume Multi-Physics Analysis of MEMS Electrothermal Actuators.

Microelectromechanical systems (MEMS) are the instruments of choice for high-precision manipulation and sensing processes at the microscale. They are, therefore, a subject of interest in many leading industrial and academic research sectors owing to their superior potential in applications requiring extreme precision, as well as in their use as a scalable device. Certain applications tend to require a MEMS device to function with low operational temperatures, as well as within fully immersed conditions in various media and with different flow parameters. This study made use of a V-shaped electrothermal actuator to demonstrate a novel, state-of-the-art numerical methodology with a two-way coupled analysis. This methodology included the effects of fluid–structure interaction between the MEMS device and its surrounding fluid and may be used by MEMS design engineers and analysts at the design stages of their devices for a more robust product. Throughout this study, a thermal–electric finite element model was strongly coupled to a finite volume model to incorporate the spatially varying cooling effects of the surrounding fluid (still air) onto the V-shaped electrothermal device during steady-state operation. The methodology was compared to already established and accepted analysis methods for MEMS electrothermal actuators in still air. The maximum device temperatures for input voltages ranging from 0 V to 10 V were assessed. During the postprocessing routine of the two-way electrothermal actuator coupled analysis, a spatially-varying heat transfer coefficient was evident, the magnitude of which was orders of magnitude larger than what is typically applied to macro-objects operating in similar environmental conditions. The latter phenomenon was correlated with similar findings in the literature.

Python-Based Open-Source Electro-Mechanical Co-Optimization System for MEMS Inertial Sensors.

The surge in fabrication techniques for micro- and nanodevices gave room to rapid growth in these technologies and a never-ending range of possible applications emerged. These new products significantly improve human life, however, the evolution in the design, simulation and optimization process of said products did not observe a similarly rapid growth. It became thus clear that the performance of micro- and nanodevices would benefit from significant improvements in this area. This work presents a novel methodology for electro-mechanical co-optimization of micro-electromechanical systems (MEMS) inertial sensors. The developed software tool comprises geometry design, finite element method (FEM) analysis, damping calculation, electronic domain simulation, and a genetic algorithm (GA) optimization process. It allows for a facilitated system-level MEMS design flow, in which electrical and mechanical domains communicate with each other to achieve an optimized system performance. To demonstrate the efficacy of the methodology, an open-loop capacitive MEMS accelerometer and an open-loop Coriolis vibratory MEMS gyroscope were simulated and optimized—these devices saw a sensitivity improvement of 193.77% and 420.9%, respectively, in comparison to their original state.

MEMS post-processed self-assembled electret for vibratory energy harvesters

Electret-based microelectromechanical system (MEMS) vibratory energy harvesting is a key technology for converting the mechanical energy of environmental vibrations into electricity. Unfortunately, conventional electret charging methods generally rely on high-voltage and high-temperature processes that present limitations to MEMS design and production. Here, we show a MEMS post-processed self-assembled electret (SAE) that enables the integration of electrets with MEMS vibratory devices via evaporation as a post-MEMS process. Owing to the spontaneous orientation of polar molecules, the surface potential of the SAE can build up at room temperature in a microscopic region without charging processes, which enhances the design and fabrication flexibility of electret-based MEMS energy harvesters. We develop a MEMS vibratory device followed by post-processing the SAE and confirm induced electrical currents caused by the electrical field of the SAE at the vibrational input. This SAE-based MEMS technology is a promising design guideline for highly integrated single-chip MEMS vibratory energy harvesters.