Abstract
Design and analysis of a pair of novel microelectromechanical system (MEMS) microgrippers having single and multiple sets of jaws respectively, incorporated with displacement amplification mechanism and electrostatic force sensor is presented in this research work. The novelty of the proposed microgrippers is their unique and efficient designs, having the versatility of gripping ranges. The size of the microgripper is 3.2 × 3.7 mm2 in both cases and has one and three sets of jaws with gripping ranges of 30–64 µm, 175–200 µm, and 350–380 µm respectively. The three jaw sets are application-specific to the multicellular small organism, eukaryotic cells, and microcells, respectively. The microgrippers are being actuated by an optimized V-shaped thermal chevron actuator whose input is amplified by using a pantograph displacement amplification mechanism with an amplification factor of 54. The force applied to the gripping object is sensed by a rotary comb electrostatic force sensor. Special attention has been paid to the structural design, and detailed stress analysis has been discussed. This research work includes static, electrostatic, parametric, and electrothermal analysis carried out using Finite Element Method (FEM) techniques and analytical modeling. The results show that the operating voltage range of the devices is from 4 to 9.25 V, having a maximum operational temperature of 380 °C with a factor of safety of 1.026. The maximum capacitance change with the full operational range of microgrippers is 0.63 µf, having a capacitive sensitivity of 19.6 nf/µm. The microgrippers can be used as an instrument to grip not only the microbiological species but also can be beneficial to carry out manipulations at the micro-level like micro-assembly. The proposed microgripper has a substantial structural stability, has a high amplification factor and accommodates manipulation of a wide range of microorganism.
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Schedule a callMore From: Proceedings of the Institution of Mechanical Engineers, Part C: Journal of Mechanical Engineering Science
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