Metrological Scanning Probe Microscope Research Articles

Local geometric error corrections for a metrological scanning probe microscope

A local geometric error correction method is developed for a metrological scanning probe microscope. The method corrects geometric errors in stage displacements using the interferometric measurements of angular position and known geometric offsets. Local and global error correction methods are considered and general scaling dependences on the number of measured steps or points are derived and compared. For the local method, the total uncertainty scales the same or decreases with a sufficient number of measurement steps compared with the global method. Implementation of the local geometric error correction method is demonstrated on measurements of a three-dimensional height standard artefact. The applied error correction method reduces the contribution of geometric errors to the uncertainty budget by two orders of magnitude. The presented approach can be extended to any scanning technique where a measurement translation mechanism can be identified and accurately quantified by relating the measured values with a measurand.

Multifunctional nanoanalytics and long-range scanning probe microscope using a nanopositioning and nanomeasuring machine

An interferometer-based metrological scanning probe microscope (SPM) is successfully integrated into our nanopositioning and nanomeasuring machine (NPM machine) for high-precision measurements with nanometre uncertainty over a range of 25 mm × 25 mm × 5 mm. Both devices were developed at the Institute of Process Measurement and Sensor Technology of Ilmenau University of Technology, Germany. Outstanding results were achieved for different measurement tasks. With the NPM machine, truly long-range and long-term measurements are possible. Due to the tip wear, an automatic SPM cantilever replacement is preferable. Such a tip replacement is also required for the integration of multifunctional nanoanalytics. For example, for Kelvin probe force microscopy (KPFM), the measurement of topography and surface potential with different SPM tips is necessary. For this purpose, an electromagnetic tip changer was designed. The tip changer comprises three SPM probes. In order to retrieve the previous tip positions, additional fiducial marks were developed. The repeatability of relocation is less than 10 nm. The automatic tip changer and fiducial marks are integrated into a sample holder. The tip changer in combination with fiducial marks allows scanning distances three times longer (with the same type of SPM probes) and multifunctional nanoanalytics (with different SPM probes with special properties). Sample KPFM measurements are demonstrated. The developed tip changer, including special fiducial marks, improves the performance and functionality of the NPM machine crucially.

Investigation into sources of random uncertainties in the NanoScan-3Di metrological scanning probe microscope

The construction and operation principle of the metrological NanoScan-3Di scanning probe microscope (SPM) are briefly described. This device is a combination of a commercial NanoScan-3D SPM and a three-coordinate heterodyne laser interferometer. The metrological characteristics and main sources of random uncertainties of this measurement complex have been analyzed. The experiments have demonstrated high reproducibility and low noise level when measuring linear displacements on the nanometer-length scale.

Metrological scanning probe microscope based on a quartz tuning fork detector

We give an overview of the design of a metrological scanning probe microscope (mSPM) currently under development at the National Measurement Institute Australia (NMIA) and report on preliminary results on the implementation of key components. The mSPM is being developed as part of the nanometrology program at NMIA and will provide the link in the traceability chain between dimensional measurements made at the nanometer scale and the realization of the International System of Units (SI) meter at NMIA. The instrument is based on a quartz tuning fork (QTF) detector and will provide a measurement volume of 100 μm×100 μm×25 μm with a target uncertainty of 1 nm for the position measurement. Characterization results of the nanopositioning stage and the QTF detector are presented along with an outline of the method for tip mounting on the QTFs. Initial imaging results are also presented.

Novel control scheme for a high-speed metrological scanning probe microscope

Some time ago, an interferometer-based metrological scanning probe microscope (SPM) was developed at the Institute of Process Measurement and Sensor Technology of the Ilmenau University of Technology, Germany. The specialty of this SPM is the combined deflection detection system that comprises an interferometer and a beam deflection. Due to this system it is possible to simultaneously measure the displacement, bending and torsion of the probe (cantilever). The SPM is integrated into a nanopositioning and nanomeasuring machine (NPM machine) and allows measurements with a resolution of 0.1 nm over a range of 25 mm × 25 mm × 5 mm. Excellent results were achieved for measurements of calibrated step height and lateral standards and these results are comparable to the calibration values from the Physikalisch-Technische Bundesanstalt (PTB) (Dorozhovets N et al 2007 Proc. SPIE 6616 661624–1–7). The disadvantage was a low attainable scanning speed and accordingly large expenditure of time. Control dynamics and scanning speed are limited because of the high masses of the stage and corner mirror of the machine. For the vertical axis an additional high-speed piezoelectric drive is integrated in the SPM in order to increase the measuring dynamics. The movement of the piezoelectric drive is controlled and traceable measured by the interferometer. Hence, nonlinearity and hysteresis in the actuator do not affect the measurement. The outcome of this is an improvement of the bending control of the cantilever and much higher scan speeds of up to 200 µm s−1.