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Abstract
The construction and operation principle of the metrological NanoScan-3Di scanning probe microscope (SPM) are briefly described. This device is a combination of a commercial NanoScan-3D SPM and a three-coordinate heterodyne laser interferometer. The metrological characteristics and main sources of random uncertainties of this measurement complex have been analyzed. The experiments have demonstrated high reproducibility and low noise level when measuring linear displacements on the nanometer-length scale.
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