Metrology Measurements Research Articles

Enhanced Output Power of GaN-Based Resonance Cavity Light-Emitting Diodes With Optimized ITO Design

We fabricated and measured GaN-based resonant cavity light-emitting diodes with a 30 nm thick Indium tin oxide (ITO) thin film as a transparent contact layer. Four different ITO structures on p-type GaN samples were deposited by sputter and e-gun, and the corresponding device performance was compared. Each of these four samples has been annealed by its optimal parameters. The ITO thin film deposited by sputter demonstrated better electrical characteristics, surface morphology, specific contact resistance, and the overall device light output compared to those of the e-gun samples. Between the two sputtered ITO types, the hybrid type shows higher roll-over current density of 14 kA/cm <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> , and the output power is increased from 15 to 39 μ W. From statistical data of the 2-D light intensity under the same current, we saw the lateral current spreading of the pure crystalline ITO by sputter is worst. The hybrid type, which combines the crystalline and amorphous ITO, has the best overall performance when we consider all the electrical, optical, and metrology measurements. From these results, we believe the 30 nm thick hybrid ITO thin film has the best potential to be applied in light emitting devices such as light-emitting diodes, laser diodes, etc.

ANKHand Susceptibility to and Severity of Ankylosing Spondylitis

Unconfirmed reports describe association of ankylosing spondylitis (AS) with several candidate genes including ANKH. Cellular export of inorganic pyrophosphate is regulated by the ANK protein, and mutant mice (ank/ank), which have a premature stop codon in the 3' end of the ank gene, develop severe ankylosis. We tested the association between single-nucleotide polymorphisms (SNP) in these genes and susceptibility to AS in a population of patients with AS. We investigated the role of these genes in terms of functional (BASFI) and metrological (BASMI) measures, and the association with radiological severity (mSASSS). Our study was conducted on 355 patients with AS and 95 ethnically matched healthy controls. AS was defined according to the modified New York criteria. Four SNP in ANKH (rs27356, rs26307, rs25957, and rs28006) were genotyped. Association analysis was performed using Cochrane-Armitage and linear regression tests for dichotomous and quantitative variables. Analyses of Bath Ankylosing Spondylitis Disease Activity Index (BASDAI), BASFI, and mSASSS were controlled for sex and disease duration. None of the 4 markers showed significant single-locus disease associations (p > 0.05), suggesting that ANKH was not a major determinant of AS susceptibility in our population. No association was observed between these SNP and age at symptom onset, BASDAI, BASFI, BASMI, or mSASSS. These results confirm data in white Europeans that ANKH is probably not a major determinant of susceptibility to AS. ANKH polymorphisms do not markedly influence AS disease severity, as measured by BASMI and mSASSS.

Performance of iterative gradient-based algorithms with different intensity change models in digital image correlation

Digital image correlation (DIC) is a non-contact and powerful tool for whole-field displacement and strain measurement in modern optical metrology. In the DIC technique, the gradient-based algorithm is one of the most commonly used sub-pixel registration algorithms due to its effectiveness and accuracy. Thus, this algorithm has been further investigated and improved by many researchers to increase its accuracy. In the existing gradient-based algorithms, there are three relation models for the gray level intensity of a point in the undeformed and deformed images: namely the constant intensity model, the linear intensity change model and the non-linear intensity change model. However, little quantitative investigation has been conducted to compare their performance. In this paper, three iterative gradient-based algorithms are given using the corresponding intensity change model and the iterative least squares (ILS) solving method. The accuracy, robustness and computational efficiency of the three algorithms for intensity variation are investigated through numerical simulation experiments. The experimental results reveal that the algorithm generated using the non-linear intensity change model is the most accurate, robust and efficient of the three algorithms and the algorithms generated using the linear and non-linear intensity change models have approximately the same accuracy when the intensity variation is small between undeformed and deformed images.

O2 Translation, cultural adaptation and validation of Bath questionnaires and HAQ-S in Hindi for Indian patients with ankylosing spondylitis

The disease activity and functional impact of ankylosing spondylitis (AS) is currently measured through various questionnaire instruments, the most popular of which are the Bath indices. However, Hindi versions for use in Indian patients are not available. This study aimed to fill this lacuna. Translation and cross-cultural adaptation of the instruments—Bath Ankylosing Spondylitis Disease Activity Index (BASDAI), Bath Ankylosing Spondylitits Metrology Index (BASMI), Bath Ankylosing Spondylitis Patient Global Score (BAS-G), and Health Assessment Questionnaire-Spondyloarthropathy (HAQ-S)—were done using standard guidelines. These were then self-administered to patients. The BASMI measurements, occiput-to-wall distance, chest expansion (in centimeters), total enthesis count, ESR, and C reactive protein (CRP) were measured. To assess reliability, the patient was called back on day 14, and the questionnaires were again self-administered, and the intra-class correlation coefficient was calculated to assess reliability. Correlation of questionnaire scores with acute phase reactants, measurements, and enthesitis index were used to assess for construct validity. Some modifications were done in the Bath indices and HAQ-S for cross-cultural adaptation. For validation, 41 patients of ankylosing spondylitis with a mean age of 34 years (±10.2) and disease duration of 5.8 years (±6.2) were included. The Bath Ankylosing Spondylitis Functional Index (BASFI), BASDAI, and HAQ-S showed good correlation among themselves (r = 0.69 to 0.84, p < 0.001), except for BAS-G with HAQ-S (r = 0.53, p < 0.001). Correlation between BASDAI and ESR (0.31, p = 0.05), CRP (0.48, p < 0.001), and enthesitis score (0.32, p = 0.045) was fair. Similarly, there was fair correlation of BASFI with ESR (0.55, p < 0.001), CRP (p = 0.60, p < 0.001), and various metrological measurements. These suggest convergent validity. However, there was a lack of correlation between metrological measurements and BASDAI, demonstrating divergent validity. The intra-class correlation coefficients between baseline and retest were acceptable: BASDAI intra-class correlation coefficients (ICC) 0.87 (0.78–0.93), BASFI ICC 0.90 (0.82–0.94), BAS-G ICC 0.75 (0.58–0.86), and HAQ-S ICC 0.91 (0.84–0.95). The Hindi versions of the BASDAI, BASFI, BAS-G, and HAQ-S were found to be valid and reliable for use in Hindi-speaking Indian patients with ankylosing spondylitis.

Fundamental limits of measurement in telecommunications: Experimental and modeling studies in a test optical network on proposal for the reform of telecommunication quantitations

Proposals for a review of the limits of measurement for telecommunications are made. The measures are based on adapting work from the area of chemical metrology for the field of telecommunications. Currie has introduced recommendations for defining the limits of measurement in chemical metrology and has identified three key fundamental limits of measurement. These are the critical level, the detection limit and the determination limit. Measurements on an optical system are used to illustrate the utility of these measures and discussion is given into the advantages of using these fundamental quantitations over existing methods.

NIST 10 V Programmable Josephson Voltage Standard System

The National Institute of Standards and Technology has developed and implemented a new programmable Josephson voltage standard (PJVS) that operates at 10 V. This next-generation system is optimized for both dc metrology and stepwise-approximated ac voltage measurements for frequencies up to a few hundreds of hertz. The nonhysteretic Josephson junctions produce intrinsically stable voltages and are designed to operate in the 18-20 GHz frequency range. The most recent 10 V PJVS circuits have total output current ranges greater than 1 mA.

Surface curvatures and diffraction profiles of sagittally bent Laue crystals

The performance of a bent Laue crystal monochromator crucially depends on the sagittal and meridional bending curvatures of the crystal. To optimize the design of monochromator crystals, the surface curvatures and diffraction profiles of a set of sagittally bent Laue crystals with different aspect ratios have been studied experimentally by optical metrology and X-ray measurements. The results were confirmed with finite-element analysis using large-deformation theory. The nonlinear relationship between the curvatures necessitates an experimentally determined parameter in the theoretical modeling of the diffraction profiles. By taking into account the local stress and the aspect ratio of the sagittally bent Laue crystal, the modified analytical approach successfully predicts the rocking-curve width and the integrated reflecting power. The effect of extreme sagittal bending on the rocking curve is also discussed. To retain high reflectivity, the bending curvature should not exceed its critical value for the specified crystal geometry. Furthermore, the uniformity of the bending curvatures across the crystal surface has been examined, which suggests that the minimum crystal dimension should be approximately twice the size of the beam footprint.

Evaluation and comparison of measurements of unattached and attached radon progeny in the radon chamber of PTB Braunschweig (Germany) with NRPI Praha (Czech Republic)

On the case of a parallel metrological measurement of unattached and attached concentrations of radon progeny, the evaluation by an inversion of the Jacobi-Porstendörfer room model indicates a real overestimation of the concentration of RaA ((218)Po).

Target Fabrication at the University of Michigan

At the University of Michigan (U-M), we have successfully fabricated and characterized targets for our experimental campaigns since 2003. Because of the unique production environment, we iterate many models in the course of a single-shot plan and have the flexibility to test and alter target designs as needed throughout the build process. Over the past few years, many advances in target design and fabrication have allowed greater degrees of design complexity while retaining the high level of build precision necessary for microscale experiments on facilities such as the OMEGA laser. Extensive target metrology is carried out during and after the fabrication process to allow for full knowledge of experimental conditions and to ensure that all targets are within required specifications. Analysis of the variability in metrology measurements over the multiple-shot campaigns allows for the quantification of improvements in the target build quality and metrology measurements. We present a summary of the capabilities and recent developments of target fabrication at U-M, as well as progress and analysis of build repeatability.

New approaches for scatterometry-based metrology for critical distance and overlay measurement and process control

mmunication between lithography and metrology is becoming increasingly demanding in advanced nodes. This is where the requirements for metrology become extremely tight. This work is dedicated to the search for clean metrology that is required to address these requirements. Metrology measurements are obtained via an angle-resolved scatterometry-based platform (called YieldStar). Details of the technology behind YieldStar were thoroughly discussed by Vanoppen et al. in 2010. In this current work, measurement limits are challenged to test resolution and measurement uncertainty for overlay, critical dimension (CD), and sidewall angle (focus). Results indicate an atomic-scale performance of deep subnanometers. Two different sizes of scatterometry-based overlay targets are evaluated and compared using a technique called the similarity index. A CD reconstruction model is tested for cross talk of underlying thin-film layers, specifically the case where one of the underlying layers is anisotropic. A systematic approach is taken to increase the complexity of a CD reconstruction model in steps to evaluate the capability of handling birefringence effects of anisotropic material in the model. CD metrology data (1-D and 2-D/hole layers) are compared to CD scanning electron microscope data. Focus measurements are also extended for product wafers, and focus precision is evaluated. In addition, CD metrology monitor wafer applications, such as hotplate monitoring and overlay metrology monitor wafer application for scanner stability and matched machine overlay, are tested.

Circular AFM Mode: A New AFM Mode for Investigating Surface Properties

ABSTRACTFor the first time, a new AFM mode is presented that simultaneously allows the measuring of adhesion and friction forces at different constant and continuous sliding velocities. Our methodology consists of implementing a circular relative displacement of the contact to reach a constant sliding velocity, with no stop periods. Some of the main advantages of performing a circular displacement is that continuous and high sliding velocities (more than 1 mm/s) can be reached compared to the low sliding velocities (up to 10 μm/s) available when using commercial AFM. Also, a stationary state is reached when doing measurements. Moreover, the circular mode can be coupled with the classical operating mode, for instance, force spectrum. Main applications of this circular mode are related to metrological measurements in physics that require high speed displacements. As an example, we report the evolution of friction and adhesive forces measured in air at different high sliding velocities.

Initial results from the LHCb Vertex Locator

Abstract The design and initial performance of the LHCb Vertex Locator is presented; including the construction tolerances, metrology measurements and the track resolution performance in the LHC proton–proton collision data.

Examination of the upper measurement limit in displacement measurement using fringe compensation in digital holography

Digital holography is a widely used method for displacement measurement in coherent optical metrology. An obvious limit of the method is that too large displacements result in dense fringes, so the fringes are practically invisible. The maximum number of contour fringes in displacement measurement is limited, because the cameras are discrete devices and sampling theory plays an important role. Because of the limited measurement range, compensation methods are promising tools for practical measurements. It can be shown that the practical measurement range can be extended above the Nyquist sampling limit. Compensation methods can be digital, because digital holographic interferometry operates with images recorded with a digital camera. In our research work the upper measurement range of fringe compensation method was examined. Our goal was to perform automatic compensation even if the displacement is higher than the measurement range of the basic method. The operation of the automatic fringe compensation method was based on the combination of two types of out-of-plane displacement measurements with different sensitivities.

Development of a candidate secondary reference procedure (immunoassay based measurement procedure of higher metrological order) for cardiac troponin I: I. Antibody characterization and preliminary validation

In this study, the first steps in the development of a secondary reference measurement procedure (RMP) 'higher metrological order measurement procedure' to support the cardiac troponin I (cTnI) standardization initiative is described. The RMP should be used to assign values to serum-based secondary reference materials (RMs) without analytical artifacts causing bias. A multiplexed bead-based assay and sodium dodecyl sulfate polyacrylamide gel electrophoresis (SDS-PAGE) were used to identify the optimum monoclonal antibody pair (clones 560 and 19C7) for the RMP. Using these antibodies, an ELISA-based procedure was developed to accurately measure the main cTnI forms present in blood. The proposed RMP appears to show no bias when tested on samples containing various troponin complexes, phosphorylated and dephosphorylated forms, and heparin. The candidate assay displayed suitable linearity and sensitivity (limit of detection, 0.052 μg/L) for the measurement of the proposed cTnI secondary RMs. Preliminary comparison data on patient samples with a commercial cTnI assay are also provided to support the suitability of RMP for value assignment to RMs. Full validation and final assessment of the RMP will be performed through transferability and inter-comparison studies.

Interactions of Lens Care with Silicone Hydrogel Lenses and Effect on Comfort

The purpose of this study was to investigate the effect of lens care products on short-term subjective and physiological performance silicone hydrogel lenses. Ten subjects wore either lotrafilcon B or galyfilcon A silicone hydrogel contact lenses soaked in a lens care product containing either Polyquad/Aldox or PHMB or control lenses inserted directly from the pack. Subjects wore the lenses for 6 h. Ocular comfort (graded on a 1 to 10 scale) and ocular physiology were assessed. Unworn but soaked lenses were analyzed for metrological changes, release of excipients into phosphate buffered saline, and changes to their surface chemical composition. None of the lens metrology measures or clinically observed conjunctival or limbal redness changed. Corneal staining was significantly (p < 0.008) raised, albeit to low levels, after 6 h wear for either lens type when soaked in the PHMB solution compared with the control lens (lotrafilcon B 0.4 to 0.9 ± 0.7 to 0.4 vs. 0.1 to 0.4 ± 0.3 to 0.5; galyfilcon A 0.2 to 0.3 ± 0.2 to 0.4 vs. 0.0 ± 0.0). For lotrafilcon B lenses, there were decreases in comfort (p = 0.002), increases in burning/stinging (p = 0.002) after 1 h of wear, and increases in lens awareness on lens insertion (p = 0.0001) when soaked in PHMB. However, lotrafilcon B lenses soaked in Polyquad/Aldox showed increases in burning/stinging after 1 and 6 h (p < 0.008) of lens wear. For galyfilcon A lenses, most significant (p ≤ 0.002) changes to symptomatology occurred after soaking in Polyquad/Aldox solution. More PHMB was released from lotrafilcon B lenses, and more MPDS material was released from galyfilcon A lenses. The surface of galyfilcon A lenses changed but irrespective of lens solution type, whereas the changes to the lens surface was dependent on solution type for lotrafilcon B lenses. Lens care products can change corneal staining and comfort responses during wear. These changes may be associated with release of material soaked into lenses or changes to the lens surface composition.

X-ray scattering in X-ray fluorescence spectra with X-ray tube excitation – Modelling, experiment, and Monte-Carlo simulation

X-ray scattering may contribute significantly to the spectral background of X-ray fluorescence (XRF) spectra. Based on metrological measurements carried out with a scanning electron microscope (SEM) having attached a well characterised X-ray source (polychromatic X-ray tube) and a calibrated energy dispersive X-ray spectrometer (EDS) the accuracy of a physical model for X-ray scattering is systematically evaluated for representative samples. The knowledge of the X-ray spectrometer efficiency, but also of the spectrometer response functions makes it possible to define a physical spectral background of XRF spectra. Background subtraction relying on purely mathematical procedures is state-of-the-art. The results produced by the analytical model are at least as reliable as those obtained by Monte-Carlo simulations, even without considering the very challenging contribution of multiple scattering. Special attention has been paid to Compton broadening. Relevant applications of the implementation of the analytical model presented in this paper are the prediction of the limits of detection for particular cases or the determination of the transmission of X-ray polycapillary lenses.

A beam-shaping system for TIMEX beamline

FERMI@Elettra is a Free Electron Laser (FEL) user facility currently under construction at Sincrotrone Trieste in Italy. It will provide a spatially coherent and transform-limited photon beam in the sub-ps regime, covering the VUV/Soft X-ray range (from 100 down to 1.33 nm). Thanks to its high fluence this 4th generation light source will be able to create and probe warm dense matter (WDM) inside the TIMEX end-station. Since the WDM state has a short lifetime (a few ps), measurement of basic physical quantities, such as temperature and density, is a challenge and new approaches are needed. For this reason a new method has been proposed for measuring temperature using a slowly responding pyrometric probe (Principi et al., 2010 [1]). However, the technique does require the spatial photon beam profile to be properly shaped at the sample. This can be done using an active optic (i.e. a deformable plane mirror) placed before the elliptical focusing mirror. Ray-tracing simulations and metrology measurements on a prototype have been performed and the results are presented here.

Measurement of femoral head penetration in polyethylene using a 3-dimensional CT-scan technique

Background Current techniques for measuring in vivo polyethylene wear suffer from a range of problems, resulting in an unacceptable lack of repeatability and/or insufficient accuracy when they are used to measure the low wear rates associated with new, highly crosslinked polyethylene. We describe an improved CT method for measurement of 3D femoral head penetration in PE acetabular cups that has sufficient accuracy and repeatability to allow assessment of the wear potential of modern implants.Method The accuracy and repeatability of the CT-scan method was determined by blindly repeating measurements on a precisely calibrated 28-mm prosthetic head and by comparing them with direct metrological measurements on 10 acetabular specimens with in vitro wear from machining, and on 8 explanted acetabular specimens with in vivo wear.Results The intra- and interobserver errors in femoral head diameter were 0.036 mm (SD 0.044) and 0.050 mm (SD 0.022), respectively. CT estimated femoral head penetration in both all-poly and metal-backed acetabular components with accuracy ranging from 0.009 to 0.245 mm (mean 0.080; SD 0.067).Interpretation We found that the CT method is rapid, is accurate, and has repeatability and ease of availability. Using a slice thickness of 0.0625 mm, this method can detect wear—and also the threshold for the wear rate that causes osteolysis—much earlier than previous methods.

The meaning of measurement in metrology

The latest version of the International Vocabulary of Metrology gives a meaning of measurement restricted to quantities that can be represented by numerical values and placed in an ordinal sequence. This restrictive definition fits poorly with both the colloquial and the wider scientific understanding of measurement. This paper suggests an extension to the metrological definition of measurement, based on the measurement classification scheme of Stevens, to incorporate non-numerical and nominal measurements. The more inclusive definition and the classification scheme offers insights into the utility, metrological traceability, and limitations of measurements and uncertainty treatments, and enables clarification of other measurement-related definitions.

Three dimensional shape measurement using high-order instantaneous moments based fringe projection method

Fringe projection techniques are popular tools for three-dimensional shape measurement in optical metrology. In these techniques, the information about the shape or the surface profile of an object is usually encoded in the phase of a recorded fringe pattern. The paper presents a high-order instantaneous moments based method for phase estimation in fringe projection. The method employs a piecewise polynomial phase approximation approach and uses high-order instantaneous moments to determine the polynomial phase coefficients to estimate the phase. The method's working is demonstrated using simulation examples and its practical applicability is validated through a shape measurement experiment.