This paper presents the effects of surface effects in the cavity of variable curvature. The wave function expansion method and the conformal mapping method are used in the solution of dynamic stress concentration factor around an irregularly shaped cavity at nano-scale. The stress boundary conditions on the surface are obtained by using the generalized Young-Laplace equation. The results show that the degree of stress concentration becomes more obvious with curvature increasing. Taking the elliptical cavity as an example, the influence of the ration of the major and minor axis of the ellipse, the numbers of the incident wave and the surface effects on the dynamic stress concentration factor are analyzed. The ration of the major and minor axis, the incident wave frequency and the surface effects show the pronounced effects on the dynamic stress concentration distributions.