Metallorganic Vapor Deposition Research Articles

Microstructural and Photoluminescence Studies on Europium Doped Yttrium Oxide Films Synthesized by Metallorganic Vapor Deposition

ABSTRACTThe microstructural and luminescence properties of europium doped yttrium oxide (Y2O3:Eu) thin films deposited by metallorganic chemical vapor deposition are presented in this work. It was found that surface morphology, crystallinity and photoluminescent emission properties are strongly dependent on substrate temperature during deposition. The depositions were carried out in a stainless steel chamber using yttrium and europium 2,2,6,6,-tetramethyl–3,5-heptanedionates as volatile precursors and O2 as the reactant gas. Post-annealing increased the crystallite size and decreased the lattice parameter, resulting in an increased photoluminescent emission intensity.

A low-beam-divergence cw (GaAl)As double-heterostructure laser grown by low-pressure metallorganic chemical vapor deposition process

We report the operation of a new stripe geometry (GaAl)As double-heterostructure laser, grown by low-pressure metallorganic vapor deposition (MO-CVD). Several points make this MO-CVD laser very suitable for optical communication: (i) a very low beam divergence in the direction perpendicular to the junction plane, 26 °; (ii) a low pulsed threshold current, 80 mA (stripe geometry: 5×300 μm); (iii) an emission wavelength of 8300 Å (optimum for optical fiber transmission).