Morphologies of retained γ grains in TRIP steels are a very important factor for understanding the relationship between the microstructure and mechanical properties of TRIP steels. We have investigated a serial sectioning technique using a scanning electron microscope (SEM) equipped with an electron backscatter diffraction (EBSD) and a focused ion beam (FIB) to reconstruct 3D microstructure of TRIP steels. In this paper, FIB fabrication condition dependences of reconstructed 3D structures are presented in TRIP steels and γ-grains stabilities are discussed in terms of ion beam effects. Retained γ-grains are not recognized by EBSD map from a FIB fabricated surface using normal ion accelerating voltage of 30 kV, because γ grains are easily transformed into martensite due to ion irradiation. It was found that the transformation was suppressed by using a low acceleration voltage of 7 kV or less, and the three-dimensional morphology could be observed using low acceleration voltage serial sectioning technique. It becomes possible to evaluate morphology of each phase and we proposed evaluation method of γ stabilities by ion irradiation transformation.