The wide-field telescope will be an important tool in the discovery and birth of new theories of astronomy in future. The detectors in this kind of telescope mostly adopt a mosaic focal plane array. The focal depth of a large-F-number optical system is very small, and the flatness of the mosaic detector should be less than half the focal depth. In this paper, a new flatness measurement and data processing method is developed. A flatness measurement platform composed of a high-precision gantry platform and a coaxial multispectral displacement meter was built. The flatness of a single detector was measured under uncooled and cooled working conditions, and data processing was conducted, in which the root mean square (RMS) and the peak-valley (PV) values of the cooled detector were 0.0017 mm and 0.0112 mm, respectively. Next, a 2 × 6 mosaic model of the focal plane with a dimension of 148.5 mm × 168.5 mm was built using a metal detector model. The measurement platform was used to measure the flatness of the mosaic focal plane. According to the measurement results, the preliminary installation and mosaic adjustment were completed. The final RMS and PV values of the mosaic focal plane are 0.009 mm and 0.0808 mm, respectively. The experimental results show that the measurement and the data processing method can accurately reflect surface information on the detectors. This suggests that the method has great potential for use in ensuring the accuracy of wide-field telescope equipment in all applicable research areas.