High-resolution Si $K{\ensuremath{\alpha}}_{1,2}{(K\ensuremath{-}L}_{3,2})$ x-ray fluorescence spectra of Si, ${\mathrm{SiB}}_{6},$ SiC, ${\mathrm{Si}}_{3}{\mathrm{N}}_{4},{\mathrm{SiO}}_{2},$ and ${\mathrm{Na}}_{2}{\mathrm{SiF}}_{6}$ were measured on a double-crystal spectrometer. From ${\mathrm{SiB}}_{6}$ to ${\mathrm{Na}}_{2}{\mathrm{SiF}}_{6},$ the chemical shifts for the Si $K\ensuremath{\alpha}$ lines relative to pure Si were 0.05, 0.19, 0.45, 0.62, and 0.96 eV, respectively. The value increased systematically with increased atomic number of the neighbor atoms of Si. Calculation by the discrete variational Hartree-Fock-Slater method showed that the effective charges on Si in SiC and ${\mathrm{Na}}_{2}{\mathrm{SiF}}_{6}$ were 0.37 and 1.85 electrons, and the values in ${\mathrm{Si}}_{3}{\mathrm{N}}_{4},{\mathrm{SiO}}_{2}$ were found in former literature to be 1.24 and 1.40 electrons, which increased in the same sequence as the chemical shift. These facts certified the direct correlation between the effective charges on Si and the chemical shift of Si $K\ensuremath{\alpha}$ lines. An empirical curve of effective charges on Si versus chemical shifts in Si $K\ensuremath{\alpha}$ lines was obtained. With this empirical curve, we found that Si held positive charge in the Fe-Si binary system based on the Si $K\ensuremath{\alpha}$ chemical shift measurement, although the electronegativity of Si (1.90) was greater than that of Fe (1.83), which made it seem reasonable to assume that the charge transfer should be from Fe to Si. We determined the effective charges on Si in ${\mathrm{FeSi}}_{2},$ FeSi, and Si steel to be 0.50, 0.56, and 0.63 electrons, which increased with the increasing Fe concentration.
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