Managing high-flux waste heat with controllable device working temperature is becoming challenging and critical for the artificial intelligence, communications, electric vehicles, defense and aerospace sectors. Spray cooling, which combines forced convection with phase-change latent heat of working fluids, is promising for high flux heat dissipation. Most of the previous studies on spray cooling enhancement adopted high spray flow rates to strengthen forced convection for high critical heat flux (CHF), leading to a low heat transfer coefficient (HTC). Micro/nanostructured surfaces can enhance boiling, but bubbles inside the structures tend to form a vapor blanket, which can deteriorate heat transfer. This work demonstrates simultaneous enhancement of CHF and HTC in spray cooling by improving both evaporation and liquid film boiling on three-dimensional (3D) ordered hierarchical micro/nano-structured surface. The hierarchical micro/nanostructured surface is designed to coordinate the transport of spray droplets, capillary liquid films, and boiling bubbles to enhance spray cooling performance. Boiling inversion where superheat decreases with increasing heat flux is observed, leading to an ultra-high HTC due to the simultaneous promotion of bubble nucleation and evaporation. Unprecedented CHF is obtained by overcoming the liquid-vapor counterflow, i.e., synergistically facilitating bubble escape and liquid permeation. A record-breaking heat transfer performance of spray cooling is achieved with a maximum heat flux of 1273 W/cm2 and an HTC of 443.7 kW/(m2 K) over a 1 cm2 heating area.
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