Magnetic thin films of Fe <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">x</sub> N were prepared by so-called "ion reacting deposition." To clarify the effect of ion beam irradiation during deposition, the difference between use of N <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> ions and Ar ions was studied. A low-energy broad-beam ion source (Kaufman type) was directed normal to the substrate, which was set obliquely to the direction of iron vapor incidence. All of the Fe <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">x</sub> N films consisted mainly of paramagnetic ε-Fe <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2-3</sub> N and α-Fe according to Mossbauer measurements; that is, separation into two phases took place in these films. The coercive force H <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">c</sub> of iron films prepared by Ar ion beam irradiation decreased with increasing ion current density, while that of Fe <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">x</sub> N films increased to saturation. This indicates that the ion bombardment did not lead to the increase in H <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">c</sub> . We were able to analyze the film magnetic anisotropy into two different shape anisotropies related to the columnar microstructure of the film. The change in H <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">c</sub> and shape anisotropy in Fe <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">x</sub> N films can be attributed to the anisotropy in the packing density of α-Fe, as estimated from the observed saturation magnetization of the films.
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