Efficient maintenance in the face of complex and interconnected industrial equipment is crucial for corporate competitiveness. Traditional reactive approaches often prove inadequate, necessitating a shift towards proactive strategies. This study addresses the challenges of data scarcity and timely defect identification by providing practical guidance for selecting optimal solutions for various equipment malfunction scenarios. Utilizing three datasets—Machine Sound to Machine Condition Monitoring and Intelligent Information (MIMII), Case Western Reserve University (CWRU), and Machinery Failure Prevention Technology (MFPT)—the study employs the Short-Time Fourier Transform (STFT) as a preprocessing method to enhance feature extraction. To determine the best preprocessing technique, Gammatone Transformation, and raw data are also considered. The research optimizes performance and training efficiency by adjusting hyperparameters, minimizing overfitting, and using the KERAS Early Halting API within resource constraints. To address data scarcity, which is one of the major obstacles to detecting faults in the industrial environment, Few-shot learning (FSL) is employed. Various architectures, including ConvNeXt Base, Large MobileNetV3, ResNet-18, and ResNet-50, are incorporated within a prototypical network-based few-shot learning model. MobileNet’s lower parameter count, high accuracy, efficiency, and portability make it the ideal choice for this application. By combining few-shot learning, MobileNet architecture, and STFT preprocessing, this study proposes a practical and data-efficient fault diagnosis method. The model demonstrates adaptability across datasets, offering valuable insights for enhancing industrial fault detection and preventive maintenance procedures.