• A novel semi-fluorinated polyarylate based on phenolphthalein (CPAR-F) was successfully synthesized. • The introduction of fluorine atoms into the molecular chain can effectively reduce the dielectric constant of the polymer. • CPAR-F has excellent thermal stability with T 5d reaching 473 °C under nitrogen. • The good solubility of CPAR-F allows it to be cast into thin films by solution processing. To obtain high thermally stable and low dielectric materials, a semi-fluorinated polyarylate (CPAR-F) based on phenolphthalein and tetrafluoroterephthalic chloride is synthesized via a facile low temperature solution polymerization. CPAR-F is demonstrated to have excellent heat resistance with 5% weight loss temperature (T 5d ) at 473 °C and high glass transition temperature (300 °C), as well as high solubility and mechanical properties. In particularly, CPAR-F possesses low dielectric constant of 2.5 at a high frequency of 10 GHz, good hydrophobicity and low water uptake, indicating this CPAR-F exhibits potential applications for fabrication of devices used in 5G communication.