Ion channeling using low keV energies is introduced as a sensitive probe for determining the adsorption site of hydrogen on surfaces. The technique is shown to be capable of quantitatively probing the positions of light elements on heavy substrates with analysis by simple geometrical constructs. Quantitative analysis of the Pt(111)-(1×1)–H surface using 5 keV Ne+ ions shows that the hydrogen atoms preferentially populate the fcc site with a height of 0.9±0.1 Å above the first-layer Pt atoms and a corresponding Pt–H bond length of 1.9±0.1 Å.
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