We used low-temperature scanning electron microscopy (LTSEM) for imaging quantized magnetic flux (vortices) in dc superconducting quantum interference devices (SQUIDs) with approximately 1 μm spatial resolution at temperature T=77 K in a controllable magnetic field up to 20 μT. We demonstrate that LTSEM allows to image the spatial distribution of vortices in a YBa2Cu3O7/SrTiO3/YBa2Cu3O7 multilayer thin-film structure consisting of a dc SQUID washer with an integrated input coil on top. Simultaneously, we are able to measure the low-frequency noise of the sample under test, which allows to correlate the spatial distribution of vortices with low-frequency noise in the SQUID.
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