We report the first atomic-resolution study by scanning tunneling microscopy (STM) of the γ′-Al 2O 3 film formed on the Ni 3Al(111) surface at ∼1000–1100 K. STM images of this well-ordered oxide film reveal a hexagonal array of corrugations with an average interatomic spacing of 3.0±0.1 Å. The low-energy electron diffraction (LEED) pattern of the aluminum oxide film reveals the ordering of O 2− ions in the surface. On the basis of LEED data and theoretical considerations, the corrugations in the STM atomic-resolution images are tentatively assigned to oxygen anions. Annealing the oxide prepared at ∼300 K to ∼1100 K results in the appearance of a metallic aluminum peak in the Auger electron spectra and a substantial increase in the Al (1396)/Ni (848) ratio, indicating aluminum segregation close to the surface.