Zinc oxide (ZnO) nanowires play a pivotal role in the nanoworld due to their broad range of characteristics and applications. In this work, structural and optical properties of ZnO nanowires grown on indium doped tin oxide (ITO) coated glass have been modified by copper (Cu++) ions irradiation at constant energy of 0.7 MeV. The X-ray diffraction (XRD), photoluminescence (PL), and field emission scanning electron microscope (FESEM) are used to examine changes in the nanowires. XRD results show that the crystallite size first decreases and then increases with high ion dose while peaks’ intensity decreases continuously with increasing the dose. The absence of (102) plane after irradiation depicts the defects formation. FESEM clearly shows the damage that occurred in the density of nanowires and also depicts the reduced charging effect with increasing dose. The PL spectra indicate the strong near-band edge peak and green luminescence enhancement has been recorded due to low dose ion irradiation.
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