Oxygen post-annealed manganite films with low doped concentration generally exhibit drastically enhanced phase transition temperatures compared with the bulk, but the specific mechanism has not been fully understood. In this study, low-doped La0.9Sr0.1MnO3 (LSMO) films were post-annealed at a wide temperature range (Tpa) of 600–1000 °C, and oxygen post-annealing effect on the structure, magnetic and transport properties were investigated. The metal-insulator transition (MIT) and a significant enhancement of Curie temperature (TC) are observed in LSMO films (Tpa = 700–1000 °C). The analysis of Mn3+/Mn4+ ratio indicates that post-annealing induces oxygen excess state in these films, and Mn3+-Mn4+ double exchange interaction is enhanced and Jahn-Teller distortion is reduced due to the decrease of Mn3+/Mn4+ ratio. In addition, the excess oxygen increases with increasing post-annealing temperature, while a drop in phase transition temperatures TMI and TC is observed after they reach the maximum at Tpa = 800 °C, probably due to the weakened double exchange interaction induced by the dropping of Mn3+/Mn4+ ratio from the optimum value. Our study has revealed that double exchange interaction and Jahn-Teller distortion decided by Mn3+/Mn4+ ratio play crucial roles in regulating phase transition temperatures in low doped manganite films.