The investigated materials have similar routes of thermal decomposition; i.e. they lose their crystal water first, then at a higher temperature their structural one. At least the result TiP2O7 goes through a phase change at about 1000 K. The amorphous titanium phosphate lost its crystal and structural water at higher temperature than those of crystalline forms. Both α- and γ-titanium phosphates and also their transition metal containing forms have layered structure. In case of α- and γ-forms after the loss of crystal water a phase change occurs which is followed by the decomposition of the molecule. Various transition metals containing γ-titanium phosphates lose their crystal water at the same temperature, with the exception of Ni containing ones. The process is finished in this case at temperature 90 K higher than that of the others.