Abstract Due to the weak far-field radiation and strong local field enhancement properties of Mie lattice resonances(MLRs), a transmission resonance with a significantly high Q factor is achieved, which can be used in applications such as refractive index sensing, filtering, and nanolasing. In this paper, we design a semi-cylinder with a cuboid defect metasurface array working in the near-infrared, where a resonance with extremely narrow linewidth in transmission spectrum has been demonstrated at the wavelength of 870.9408 nm. The full width at half-maximum of the resonance is as narrow as 0.0032 nm with a corresponding Q factor of 272169. According to distributions of the electric field and displacement current, it is confirmed that the narrow linewidth resonance is generated by the MLR, which originates from the coupling between the out-of-plane magnetic dipole mode and Rayleigh Anomalous diffraction. It is further verified that the out-of-plane magnetic dipole mode is excited due to the induce defect in the semi-cylinder. When applied to refractive index sensing, a sensitivity of 333 nm RIU‒1 and a figure of merit of 104063 RIU − 1 are numerically achieved simultaneously. Our study here provides a new approach for achieving resonances with high Q-factors for the required applications.
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