Vacuum ultraviolet luminescence of Er3+ ions in LiYF4 and BaY2F8 crystals has been investigated. It is revealed that under excitation by 193 nm radiation from an ArF excimer laser the interconfigurational 5d–4f radiative transitions in Er3+ ions are observed. It is shown that from the LiYF4:Er crystal only the spin-forbidden luminescence (λ = 165 nm) is detected, whereas both the spin-forbidden (λ = 169 nm) and spin-allowed (λ = 160.5 nm) components are observed from the BaY2F8:Er crystal.