Characterization and transport of sputtered atoms are determined in the plasma environment by comparing the images taken by a ICCD camera with high sensitivity and good time resolution, and the three-dimensional atom distributions obtained by a newly developed simulation code including the energy and direction of atom ejection, atomic processes, and collisions between various kinds of particles for the liner plasma configuration. The diffusion coefficients of impurity ions obtained by the code are confirmed to be well represented by the classical theory.
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