This paper presents a theoretical investigation of squeeze film flow in systems employing microplates parallel to a substrate and undergoing large amplitude normal vibration. Most previous models of squeeze film damping assume small oscillation amplitude with linear system behavior, but it is often unclear how small the vibrations must be to actually elicit this response. In addition, fluid inertia effects are usually overlooked. This study provides a compact nonlinear solution for the incompressible hydrodynamic forces with specific terms describing fluid inertia and viscous damping. Numerical analysis (the explicit Runge-Kutta method) is applied to solve the nonlinear governing equation. The effects of frequency, oscillation amplitude, aspect ratio (of gap to length), and Reynolds number on the dynamic response of the system are investigated. The overall system response depends strongly on the actuation frequency and system properties. It is found that a simple criterion of validity for the linear system assumption is not possible. Near resonance, the vibration input amplitude (relative to the initial gap) must be very small indeed for linearity (∼0.001), while in other cases the relative amplitude can be greater than one.