The energy distributions of neutral atoms ejected from the polycrystalline Cu target, the Si(111)-7×7 surface, and the Si(111)-“5×5”-Cu surface by 5 keV Ar+ ion bombardment have been measured with very high efficiency by means of the multi-photon resonance ionization spectroscopy, in order to obtain the surface binding energies. The energy distributions for Cu from polycrystalline Cu target, Si from the Si(111)-7×7 surface, and Cu from the Si(111)-“5×5”-Cu surface have been found to have a peak at energies of around 3.0, 5.0 and 1.5 eV, and the function shapes of high energy tails to be proportional to E−1.9, E−1.2 and E−1.3, respectively. Based on the linear collision cascade theory, the surface binding energies are determined to be 5.7, 6.0 and 2.0 eV, and the power factor m in the power law approximation to the Thomas–Fermi potential are determined to be 0.1, 0.4 and 0.3 for Cu from the Cu polycrystalline, Si from the Si(111)-7×7 surface, and Cu from the Si(111)-“5×5”-Cu surface, respectively. In conclusion, the results indicate that the energy distributions of ejected particles are well characterized by the linear collision cascade theory developed by Sigmund.