RF communication and radar systems present an extreme thermal management challenge. These systems are comprised of tightly packaged, high-power components requiring a controlled temperature to meet performance and reliability parameters. In these systems, there is little space available for macro-scale air flow or other traditional cooling methods. In addition, heat generating components are typically microscale semiconductor devices fabricated on integrated circuit substrates buried deeply within the system. Localized cooling using integrated microsystems may provide a solution to these thermal management issues. One approach is the integration of miniature synthetic air jets near the heat generating components. Synthetic jets are generated using oscillating piezoelectric actuators that force air through a small nozzle at high flow rates and in close proximity to the heat generating component. The resulting jets provide vorticity within the fluid, leading to enhanced mixing with the surrounding lower temperature environment and a subsequent increase in the heat transfer coefficient. The US Army AMRDEC has been developing and operating microactuator test beds, utilizing high-displacement actuator architectures, including THUNDER and Lightweight Piezo-Composite Actuator (LIPCA) approaches, to reduce actuator size while maintaining sufficient flow rates and vorticity. This investigation has modeled and fabricated potential high-displacement miniature actuators, as well as predicted and characterized resulting jet parameters and heat transfer coefficients utilizing these actuators. This paper will present actuator designs, fabrication process, and cooling results using these high-displacement piezoelectric actuators as the drive element.
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