<italic xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">In this paper, a light recovery method is proposed to analyze defect concentration and energy level distribution by changing the wavelength. The AlGaN/GaN high electron mobility transistors (HEMTs) under hot carrier stress (HCS) conditions will experience a severe electrical degradation. The threshold voltage (V<sub>th</sub>) shifts to the right, and the on current and the off current both decrease. TCAD simulations of the electric field distribution and energy bands are performed to examine the degradation behaviors under HCS on the GaN-based HEMTs. The degradation of electrical characteristics can be effectively recovered by using the illumination method in AlGaN/GaN HEMTs. In addition, the light wavelength of illumination is positively correlated with the recovery effect, which is expected to provide effective measurements and analyses for AlGaN/GaN HEMT devices, which is expected to clarify the defect energy level distribution of HEMT device degradation</i> .