Lithography Light Source Research Articles

Lattice design considerations for compact storage rings

The use of superconducting bending magnets in compact electron storage rings for generation of synchrotron radiation imposes additional design constraints caused by the nonlinear and non-isomagnetic field of the magnets. A symplectic third order beam optics calculation including real fields and chromatic effects is performed on the proposed Karlsruhe compact synchrotron light source for deep-etch X-ray lithography. The results show that satisfactory dynamic apertures and beam sizes and divergences can be found. With the magnet design used, there remains even a certain flexibility to adapt the lattice to different lithographic requirements.