Nucleation and growth kinetics of nanoparticles of hexagonal ω phase in a body-centered cubic β titanium matrix in single crystals of β-Ti alloys were investigated by small-angle X-ray scattering measured in situ during ageing at various temperatures up to 450°C. The experimental data were compared with numerical simulations based on a three-dimensional short-range order model of nanoparticle self-ordering. The X-ray contrast of the particles is caused by an inhomogeneous distribution of impurity atoms (Mo, Fe and Al), whose density profile around growing nanoparticles was simulated by solving the corresponding diffusion equation with moving boundary conditions. From the analysis of the experimental data we determined the mean distance and size of the nanoparticles and confirmed the validity of the ∝t1/3 growth law following from the Lifshitz–Slyozov–Wagner theory. From a detailed comparison of the experimental data with simulations we also assessed the diffusion coefficient of the impurity atoms and its activation energy.