Abstract Li[Ni0.5Co0.25Mn0.25]O2 is considered to be a capable and good electrode material among the various metal oxide electrodes because of high operating voltage, high capacity, and excellent cycling performance. Li[Ni0.5Co0.25Mn0.25]O2 is prepared using mixed hydroxide route. The synthesized material has been used to prepare source target for the thin films deposition by RF-sputtering. The structural features are studied by XRD, Raman, and SEM. The films prepared at 250 °C followed by post-annealing at 700 °C displayed various peaks with good crystallinity along with (0 0 3) predominant orientation corresponding to hexagonal layered structure with R3m space group. CV and CP measurements are used to analyze the electrochemical performance of the films. The electrochemical properties of thin film electrodes have been studied by cycling voltammetry and charge-discharge cycling measurements. The Li[Ni0.5Co0.25Mn0.25]O2 film cathodes delivered an first discharge capacity of 57.5 µAh/cm2·µm with excellent electrochemical performance.