AbstractIn the application of pulsed laser heating, such as laser hardening of metallic surfaces, conduction limited process is the dominant mechanism during the laser–workpiece interaction. As a consequence, time unsteady analysis of this problem becomes necessary. The present study examines the effect of ultra‐short‐pulsed laser heating in coupled thermoelastic vibration of a microscale beam resonator. The heat transport equation for the current problem is defined by incorporating the three‐phase‐lag heat transport law in the context of Caputo‐Fabrizio (CF) derivative. Finite sinusoidal Fourier and Laplace transform techniques have been employed to determine the lateral vibration of the beam and the temperature increment within the microscale beam. According to the graphical representations corresponding to the numerical results, conclusions about the new theory is constructed. Excellent predictive capability is demonstrated due to the presence of energy absorption depth and the order of CF derivative also.