The metastable cubic γ-(Ga1−xMnx)2O3 thin films are successfully obtained at high growth temperature by laser molecular beam epitaxy technology. The optoelectronic properties of the solar blind Schottky-type photodetectors (PDs) based on γ-(Ga1−xMnx)2O3 thin films are reported for the first time. In this experimental system, the γ-(Ga0.96Mn0.04)2O3 PD exhibits the highest light-to-dark ratio (LDR) of 6.89 × 103, which is two orders of magnitude higher than the pure β-Ga2O3 PD prepared under the same condition. In addition, it shows a fast photoresponse decay speed of about 0.081 s. The results suggest that Mn element is expected to be one of the promising dopants to induce and stabilize the metastable γ-Ga2O3, as well as optimize the optoelectronic performance of photodetectors.
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