Laser Interference Lithography Research Articles

Au nanodisks-based 2D photonic crystals fabricated by single-beam laser interference lithography: A simple and reliable alternative for highly efficient large-scale SERS molecular sensors

Noble metal-based Photonic Crystals (PCs) have emerged as outstanding candidates for precise light management, projecting applications in strategic areas for society like high-sensitivity and fast molecular (inorganic/organic/bio) sensing by Surface-Enhanced Raman Spectroscopy (SERS). In this work, we report an exhaustive study on the potential of large-scale (active area >1 [cm2]) Au nanodisks-based 2D PCs fabricated by single-beam Laser Interference Lithography (LIL) for high-performance SERS molecular sensing. This technique was used to fabricate periodic nanoarrays (period of 470 [nm]) of Au nanodisks with thicknesses from 50 up to 125 [nm]. The period was chosen following Finite-Difference Time-Domain (FDTD) simulations that suggested the best electric-near field enhancement for this condition. Confocal Raman microscopy and Methylene Blue (MB) as active Raman marker, were used to assess the samples' performance for molecular sensing. SERS studies have shown that the nanodisks' thickness can be a considerable size parameter for the Raman signal amplification, observing higher signal enhancements for higher thicknesses. The observed thickness effects on the Raman signal enhancement were consistent with FDTD simulations, which predicted higher electric-near field amplifications for higher thickness within the red/near-infrared range. Results show that our PCs enable to measure the characteristic Raman footprint of the analyte with good spectral resolution using relatively low powers (0.04–1 [mW]) and short acquisition times (1–30 [s]), considering an MB surface mass density as low as 2.6 [ng/cm2]. SERS enhancement factors as high as 2 x 107 were achieved for PCs with the highest thickness, representing a competitive performance concerning typically reported values (104–107) for current noble metal-based PCs technologies and a new record concerning PCs fabricated by LIL (104–105). This research demonstrates the high competitivity of these simple Au nanodisks-based 2D PCs, fabricated using an efficient large-scale and low-cost lithography technique, for fast, high spectral resolution and highly reproducible SERS-based molecular sensing.

Bending of Lloyd’s mirror to eliminate the period chirp in the fabrication of diffraction gratings

We present a new technique to prevent the detrimental period chirp that appears in optical gratings fabricated by laser interference lithography (LIL). The idea is to bend the Lloyd’s mirror in the lithographic setup to eliminate the period chirp already at the step of the grating’s exposure. A new mathematical model was developed to describe the required bending geometry of the mirror. It is shown that this geometry can be described by multiple cross-sections of the mirror, each obtained by the solution of an implicit first-order differential equation. The proposed approach is illustrated on the basis of a concrete example. By slightly bending the Lloyd’s mirror (by ≈ 3.5 mm of maximum deflection over an area of 142 mm × 215 mm) the period chirp of the exposed grating can be eliminated completely.

Ultralong, High Aspect Ratio Graphene Nanoribbon Arrays Fabricated by Laser Interference Lithography: Implications for Integrated Nanocircuits

Ultralong, High Aspect Ratio Graphene Nanoribbon Arrays Fabricated by Laser Interference Lithography: Implications for Integrated Nanocircuits

Improving grating duty cycle uniformity: amplitude-splitting flat-top beam laser interference lithography.

Laser interference lithography is an effective approach for grating fabrication. As a key parameter of the grating profile, the duty cycle determines the diffraction characteristics and is associated with the irradiance of the exposure beam. In this study, we developed a fabrication technique amplitude-splitting flat-top beam interference lithography to improve duty cycle uniformity. The relationship between the duty cycle uniformity and irradiance of the exposure beam is analyzed, and the results indicate that when the beam irradiance nonuniformity is less than 20%, the grating duty cycle nonuniformity is maintained below ±2%. Moreover, an experimental amplitude-splitting flat-top beam interference lithography system is developed to realize an incident beam irradiance nonuniformity of 21%. The full-aperture duty cycle nonuniformity of the fabricated grating is less than ±3%. Amplitude-splitting flat-top beam interference lithography improves duty cycle uniformity, greatly reduces energy loss compared to conventional apodization, and is more suitable for manufacturing highly uniform gratings over large areas.

Hollow Microcavity Electrode for Enhancing Light Extraction.

Luminous efficiency is a pivotal factor for assessing the performance of optoelectronic devices, wherein light loss caused by diverse factors is harvested and converted into the radiative mode. In this study, we demonstrate a nanoscale vacuum photonic crystal layer (nVPCL) for light extraction enhancement. A corrugated semi-transparent electrode incorporating a periodic hollow-structure array was designed through a simulation that utilizes finite-difference time-domain computational analysis. The corrugated profile, stemming from the periodic hollow structure, was fabricated using laser interference lithography, which allows the precise engineering of various geometrical parameters by controlling the process conditions. The semi-transparent electrode consisted of a 15 nm thick Ag film, which acted as the exit mirror and induced microcavity resonance. When applied to a conventional green organic light-emitting diode (OLED) structure, the optimized nVPCL-integrated device demonstrated a 21.5% enhancement in external quantum efficiency compared to the reference device. Further, the full width at half maximum exhibited a 27.5% reduction compared to that of the reference device, demonstrating improved color purity. This study presents a novel approach by applying a hybrid thin film electrode design to optoelectronic devices to enhance optical efficiency and color purity.

Dual-color emissive OLED with orthogonal polarization modes

Linearly polarized organic light-emitting diodes have become appealing functional expansions of polarization optics and optoelectronic applications. However, the current linearly polarized diodes exhibit low polarization performance, cost-prohibitive process, and monochromatic modulation limit. Herein, we develop a switchable dual-color orthogonal linear polarization mode in organic light-emitting diode, based on a dielectric/metal nanograting-waveguide hybrid-microcavity using cost-efficient laser interference lithography and vacuum thermal evaporation. This acquired diode presents a transverse-electric/transverse-magnetic polarization extinction ratio of 15.8 dB with a divergence angle of ±30°, an external quantum efficiency of 2.25%, and orthogonal polarized colors from green to sky-blue. This rasterization of dielectric/metal-cathode further satisfies momentum matching between waveguide and air mode, diffracting both the targeted sky-blue transverse-electric mode and the off-confined green transverse-magnetic mode. Therefore, a polarization-encrypted colorful optical image is proposed, representing a significant step toward the low-cost high-performance linearly polarized light-emitting diodes and electrically-inspired polarization encryption for color images.

Optimizing broadband antireflection with Au micropatterns: a combined FDTD simulation andtwo-beam LIL approach.

Broadband antireflection (AR) is highly significant in a wide range of optical applications, and using a gold (Au) micropattern presents a viable method for controlling the behavior of light propagation. This study investigates a novel, to the best of our knowledge, methodology to achieve broadband AR properties in Au micropatterns. It employed the three-dimensional finite-difference time-domain (FDTD) method to simulate and optimize the design of micropatterns. In contrast, the fabrication of Au micropatterns was carried out using two-beam laser interference lithography (LIL). The fabricated Au micropatterns were characterized by a scanning electron microscope (SEM) and spectroscope to validate their antireflection and transmission properties and evaluate their performance at various wavelengths. The optimized Au micropatterns had a high transmittance rating of 96.2%. In addition, the device exhibits a broad-spectrum antireflective property, covering wavelengths ranging from 400 to 1100nm. The simulation data and experimentally derived results show comparable patterns. These structures can potentially be employed in many optical devices, such as solar cells and photodetectors, whereby achieving optimal device performance reduced reflection and enhanced light absorption.

Designing a square periodic racemic helix photonic metamaterial using phase-controlled interference lithography for tailored chiral response

In this study, we propose a double exposure phase-controlled laser interference lithography (DE-PCLIL) approach in 4 + 1 beams interference to design a three-dimensional (3D) racemic helical periodic nanostructure. The explicit azimuthal rotation of each beam by π/2 between the two exposures and the resultant intensity distribution discover the racemic 3D helix structure arranged in the square unit cell. The proof of concept is experimentally demonstrated by recording a series of cross-sectional images at different z-planes of the volumetric interference pattern on a CMOS camera using a spatial light modulator (SLM). Additionally, we propose an approach to realize tapering in such a geometry through a slight variation of the interference angle in both exposures. We numerically investigated optical modes and circular dichroism (CD) characteristics of the racemic helix metamaterial. The racemic helix metamaterial structure offers an angle of incidence and polarization-insensitive coupled mode. Through numerical studies, we propose an alternative way to bring 3.4-fold CD signal enhancement by varying the phase of a particular handed helix only through modulating the local chiral field. Such 3D structure is profound with perfect absorption in broad spectral regions, potentially suited for plasmonic absorber-based photovoltaic and photo-catalysis applications.

Superhydrophobic Antifrosting 7075 Aluminum Alloy Surface with Stable Cassie-Baxter State Fabricated through Direct Laser Interference Lithography and Hydrothermal Treatment.

Frost formation and accumulation can have catastrophic effects on a wide range of industrial activities. Hence, a dual-scale surface with a stable Cassie-Baxter state is developed to mitigate the frosting problem by utilizing direct laser interference lithography assisted with hydrothermal treatment. The high Laplace pressure tolerance under the evaporation stimulus and prolonged Cassie-Baxter state maintenance under the condensation stimulus demonstrate the stable Cassie-Baxter state. The dual-scale surface exhibits a lengthy frost-delaying time of up to 5277 s at -7 °C due to the stable Cassie-Baxter state. The self-removal of frost is achieved by promoting the mobility of frost melts driven by the released interfacial energy. In addition, the dense flocculent frost layer is observed on the single-scale micro surface, whereas the sparse pearl-shaped frost layer with many voids is obtained on the dual-scale surface. This work will aid in understanding the frosting process on various-scale superhydrophobic surfaces and in the design of antifrosting surfaces.

Performance of Grating Couplers Used in the Optical Switch Configuration.

Surface plasmon resonance is an effect widely used for biosensing. Biosensors based on this effect operate in different configurations, including the use of diffraction gratings as couplers. Gratings are highly tunable and are easy to integrate into a fluidic system due to their planar configuration. We discuss the optimization of plasmonic grating couplers for use in a specific sensor configuration based on the optical switch. These gratings present a sinusoidal profile with a high depth/period ratio. Their interaction with a p-polarized light beam results in two significant diffracted orders (the 0th and the -1st), which enable differential measurements cancelling noise due to common fluctuations. The gratings are fabricated by combining laser interference lithography with nanoimprinting in a process that is aligned with the challenges of low-cost mass production. The effects of different grating parameters such as the period, depth and profile are theoretically and experimentally investigated.

Crossed grating sensing refractive index change in the non-laboratory environment.

Surface plasmon polaritons (SPPs) have been widely applied to refractive index (RI) sensing for their extremely high sensitivity to the surrounding RI change. Many efforts have been devoted to narrowing the linewidth of the SPP mode and enhancing the sensitivity of SPP sensors. However, most reported SPP-based RI sensing platforms could only operate in a laboratory environment for their bulky volume or sophisticated measuring systems. In this context, we have developed a miniaturized and portable RI sensing platform based on a 2D crossed grating coupled SPP sensor that can work under a non-laboratory environment. The crossed grating is fabricated by the laser interference lithography (LIL) method, which is cost-effective and reproductive. A series of glucose solutions with different concentrations have been used as analytes to verify the sensing performance of the fabricated crossed grating.

Real-Time Imaging of Plasmonic Concentric Circular Gratings Fabricated by Lens-Axicon Laser Interference Lithography.

Concentric circular gratings are diffractive optical elements useful for polarization-independent applications in photonics and plasmonics. They are usually fabricated using a low-throughput and expensive electron beam lithography technique. In this paper, concentric circular gratings with selectable pitch values were successfully manufactured on thin films of azobenzene molecular glass using a novel laser interference lithography technique utilizing Bessel beams generated by a combined lens-axicon configuration. This innovative approach offers enhanced scalability and a simplified manufacturing process on larger surface areas compared to the previously reported techniques. Furthermore, the plasmonic characteristics of these concentric circular gratings were investigated using conventional spectrometric techniques after transferring the nanostructured patterns from azobenzene to transparent gold/epoxy thin films. In addition, the real-time imaging of surface plasmon resonance colors transmitted from the concentric circular gratings was obtained using a 45-megapixel digital camera. The results demonstrated a strong correlation between the real-time photographic technique and the spectroscopy measurements, validating the efficacy and accuracy of this approach for the colorimetric studying of surface plasmon resonance responses in thin film photonics.

Phase Mask Pinholes as Spatial Filters for Laser Interference Lithography

Laser resonators have outputs with Gaussian spatial beam profiles. In laser interference lithography (LIL), using such Gaussian‐shaped beams leads to an inhomogeneous exposure of the substrate. As a result, dimensions of lithography‐defined features vary significantly across the substrate. In most LIL setups, pinholes are used as filters to remove optical noise. Following a concept proposed by Hariharan et al., a phase mask can be added to these pinholes. In theory, this modification results in a more uniform beam profile, and, if applied as spatial filters in LIL, in improved exposure and hence feature size uniformity. Here, the first successful fabrication of such elements is reported on and their use in an LIL setup is demonstrated to reduce feature dimension variations in fabricated devices.

Fabrication of periodic hierarchical structures with anti-icing performance by direct laser interference lithography and hydrothermal treatment

Ice accumulation could result in a massive economic burden as well as major life safety issues. Because of their immense potential to ease icing problems, superhydrophobic structures have captured the curiosity of many researchers. Herein, the periodic hierarchical porous structures that have outstanding anti-icing performance were created using two-beam direct laser interference lithography and hydrothermal treatment. The periodic hierarchical porous structures were composed of periodic micro ridge arrays covered with interlaced grown standing nanoflakes. The high-water repellency of the periodic hierarchical porous structures was characterized by the high contact angle and the low rolling angle of 163.7° ± 1.5° and 3.4° ± 0.8°, respectively. The high-water repellency of the periodic hierarchical porous structures exhibits a long-term stability in air and durability in contact with water. The experimental results indicated that the anti-icing performance of the periodic hierarchical porous structures was achieved through the long-term inhibition of ice nucleation and low ice adhesion strength. The ice nucleation inhibition time could reach up to 378 s, which was more than 11.8 times longer than the untreated surface. The ice adhesion strength could be reduced to 48.3 kPa, which was more than 6.3 times lower than the untreated surface. The proposed manufacturing strategy and designed structures could be useful for designing anti-icing structures.

Laser Interference Lithography—A Method for the Fabrication of Controlled Periodic Structures

A microstructure determines macro functionality. A controlled periodic structure gives the surface specific functions such as controlled structural color, wettability, anti-icing/frosting, friction reduction, and hardness enhancement. Currently, there are a variety of controllable periodic structures that can be produced. Laser interference lithography (LIL) is a technique that allows for the simple, flexible, and rapid fabrication of high-resolution periodic structures over large areas without the use of masks. Different interference conditions can produce a wide range of light fields. When an LIL system is used to expose the substrate, a variety of periodic textured structures, such as periodic nanoparticles, dot arrays, hole arrays, and stripes, can be produced. The LIL technique can be used not only on flat substrates, but also on curved or partially curved substrates, taking advantage of the large depth of focus. This paper reviews the principles of LIL and discusses how the parameters, such as spatial angle, angle of incidence, wavelength, and polarization state, affect the interference light field. Applications of LIL for functional surface fabrication, such as anti-reflection, controlled structural color, surface-enhanced Raman scattering (SERS), friction reduction, superhydrophobicity, and biocellular modulation, are also presented. Finally, we present some of the challenges and problems in LIL and its applications.

Simple spatially resolved period measurement of chirped pulse compression gratings.

We present an easy-to-implement and low-cost setup for the precise measurement of the period chirp of diffraction gratings offering a resolution of 15 pm and reasonable scan speeds of 2 seconds per measurement point. The principle of the measurement is illustrated on the example of two different pulse compression gratings, one fabricated by laser interference lithography (LIL) and the other by scanning beam interference lithography (SBIL). A period chirp of 0.22 pm/mm2 at a nominal period of 610 nm was measured for the grating fabricated with LIL, whereas no chirp was observed for the grating fabricated by SBIL, which had a nominal period of 586.2 nm.

Surface engineering of lead-free two-dimensional organic-inorganic hybrid perovskite by laser interference lithography

Laser interference patterning of environment-friendly material with micro/nanoscale surface structures is in high demand for applications. We demonstrated the fabrication of periodic structure in copper-based organic-inorganic hybrid perovskite thin film by 532 nm laser two-beam interference. The extinction coefficient and index of refraction of the copper-based perovskite thin film were characterized by spectroscopic ellipsometry. The morphology of laser-induced structure was investigated by a combination of optical microscopy, scanning electron microscopy, and atomic force microscopy. In addition, the mechanism of the interaction between laser and copper-based perovskite thin film was discussed. This investigation expands the materials selection in laser fabrication and paves the way for optimization towards obtaining micro/nano features for applications in diffractive optics.

Broadband Photon Harvesting in Organic Photovoltaic Devices Induced by Large-Area Nanogrooved Templates.

Thin-film organic photovoltaic (OPV) devices represent an attractive alternative to conventional silicon solar cells due to their lightweight, flexibility, and low cost. However, the relatively low optical absorption of the OPV active layers still represents an open issue in view of efficient devices that cannot be addressed by adopting conventional light coupling strategies derived from thick PV absorbers. The light coupling to thin-film solar cells can be boosted by nanostructuring the device interfaces at the subwavelength scale. Here, we demonstrate broadband and omnidirectional photon harvesting in thin-film OPV devices enabled by highly ordered one-dimensional (1D) arrays of nanogrooves. Laser interference lithography, in combination with reactive ion etching (RIE), provides the controlled tailoring of the height and periodicity of the silica grooves, enabling effective tuning of the anti-reflection properties in the active organic layer (PTB7:PCBM). With this strategy, we demonstrate a strong enhancement of the optical absorption, as high as 19% with respect to a flat device, over a broadband visible and near-infrared spectrum. The OPV device supported on these optimized nanogrooved substrates yields a 14% increase in short-circuit current over the corresponding flat device, highlighting the potential of this large-scale light-harvesting strategy in the broader context of thin-film technologies.

General mathematical model for the period chirp in interference lithography.

We present a general analytical model for the calculation of the spatial distribution of the grating period, enabling the unification of all configurations of classical laser interference lithography (LIL) and scanning-beam interference lithography (SBIL) into one formalism. This is possible due to the consideration of Gaussian beams instead of point sources which allow for the accurate description of not only the laser's far-field but also its near-field. The proposed model enables the calculation of the grating period, the inclination and the slant of the grating lines on arbitrarily shaped substrates, originating from the interference of arbitrarily orientated and positioned Gaussian beams.

Fabrication of High‐Aspect Ratio Nanogratings for Phase‐Based X‐Ray Imaging

AbstractDiffractive optical elements such as periodic gratings are fundamental devices in X‐ray imaging – a technique that medical, material science, and security scans rely upon. Fabrication of such structures with high aspect ratios at the nanoscale creates opportunities to further advance such applications, especially in terms of relaxing X‐ray source coherence requirements. This is because typical grating‐based X‐ray phase imaging techniques (e.g., Talbot self‐imaging) require a coherence length of at least one grating period and ideally longer. In this paper, the fabrication challenges in achieving high‐aspect ratio nanogratings filled with gold are addressed by a combination of laser interference and nanoimprint lithography, physical vapor deposition, metal assisted chemical etching (MACE), and electroplating. This relatively simple and cost‐efficient approach is unlocked by an innovative post‐MACE drying step with hexamethyldisilazane, which effectively minimizes the stiction of the nanostructures. The theoretical limits of the approach are discussed and, experimentally, X‐ray nanogratings with aspect ratios >40 are demonstrated. Finally, their excellent diffractive abilities are shown when exposed to a hard (12.2 keV) monochromatic X‐ray beam at a synchrotron facility, and thus potential applicability in phase‐based X‐ray imaging.