Bending of Lloyd’s mirror to eliminate the period chirp in the fabrication of diffraction gratings

Abstract

We present a new technique to prevent the detrimental period chirp that appears in optical gratings fabricated by laser interference lithography (LIL). The idea is to bend the Lloyd’s mirror in the lithographic setup to eliminate the period chirp already at the step of the grating’s exposure. A new mathematical model was developed to describe the required bending geometry of the mirror. It is shown that this geometry can be described by multiple cross-sections of the mirror, each obtained by the solution of an implicit first-order differential equation. The proposed approach is illustrated on the basis of a concrete example. By slightly bending the Lloyd’s mirror (by ≈ 3.5 mm of maximum deflection over an area of 142 mm × 215 mm) the period chirp of the exposed grating can be eliminated completely.