BackgroundLaser-induced breakdown spectroscopy (LIBS) is a versatile analytical technique for element determination in solids, liquids, and gases. However, LIBS suffers from low detection sensitivity and high relative standard deviation (RSD), restricting its large-scale applications. the process of a physical sampling can, in some cases, compromise the mechanical strength of the component under examination. It should be considered that too large laser energy is bound to cause damage to samples which cannot be tolerated in the process of safe production in the nuclear industry. It is necessary to find a method to obtain high elemental signal intensity in low energy laser. ResultsHere, we present a novel approach by integrating microwave plasma torch (MPT) with LIBS, referred to as MPT-LIBS, which effectively addresses the limitations associated with traditional LIBS. The MPT-LIBS technique is evaluated using Cu samples with a low laser pulse energy of 0.55 mJ. A remarkable enhancement factor of over 70 for Cu I 521.82 nm line is demonstrated, while that of Cu I 324.75 nm and 327.40 nm lines exceeding two orders of magnitude. Furthermore, the RSDs of all Cu spectral lines are reduced, especially for Cu I 521.82 nm, which is decreased from 11.48 % to 1.36 %. This indicates a significant improvement in signal stability. Characterization of the tested samples using con-focal microscopy reveals that the ablation area of MPT-LIBS is only 1.36 times of that of LIBS. The limit of detection of Cu I 324.75 nm line is reduced from 52.8 ppk to 319 ppm. Significance and noveltyThis study not only offers valuable guidance for improving signal stability and the limit of detection in LIBS, but also demonstrates minimal sample damage due to its low ablation amount. Consequently, the proposed methodology has the potential to significantly advance LIBS technology, expanding its applicability in industrial applications.