Arc-evaporated AlTiN coatings with remarkable adhesion and thermal stability are widely used in manufacturing. However, the large residual stress and surface roughness limit their high-level applications for advanced machining. In this study, a hybrid technique combining cathodic arc evaporation and magnetron sputtering was utilized to enhance the mechanical properties and wear resistance of AlxTi1-xN with x = ∼0.65. The hybrid AlTiN coatings exhibited a nano-multilayer architecture with alternating arc-evaporated and magnetron sputtered constituents, which decreased their residual stress from -7.1 GPa to about -5.0 GPa. In addition, the hybrid AlTiN showed higher indentation toughness than the monolithic coatings. The hybrid AlTiN coating with a target sputtering power of 7.0 kW showed excellent wear resistance at room and high temperature. At 800 °C, the hybrid coatings mainly showed abrasive and oxidation wear, while the monolithic AlTiN coating showed abrasive/oxidation wear and brittle failure.
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