The work is devoted to the development of laser absorption spectroscopy (LAS) of plasma-assisted processes for application under industrial conditions. The interpretation of the LAS measurements was revised by taking into consideration the temperature gradient along the absorption path, which is unavoidable in a reactor for thermochemical treatment. The revision is based on the measurement of , , and molecular lines in an industrial-scale, active screen plasma nitrocarburizing reactor with a steel active screen. It shows that an effective temperature determined from Doppler broadening could be assigned to each measured spectral line. The effective temperature does not only reflect the temperature gradients along the line-of-sight but also the line strength dependence on temperature for the specific spectroscopic transition. Lower limit estimates of the molecular densities are proposed based on the determined effective temperatures under the assumption of a Boltzmann distribution of the population density over the molecular levels at any local volume of the reactor. For a more accurate interpretation of LAS data of plasma-assisted processes, the spatial distribution of the temperature along line-of-sight has to be known and needs to be taken into account to obtain the molecular densities.
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