In order to apply coating technology to the development of accelerator components with low gas desorption under synchrotron radiation (SR) exposure, TiZrV, Ag and Pd coating films were prepared and gas desorption in response to SR were studied at KEK Photon Factory (PF). TiZrV alloy is a non-evaporable getter (NEG) material widely used to coat accelerators vacuum chambers, and low pressure under SR irradiation was observed in the TiZrV coated tubes after activation. In this study, planar Cu substrates were coated with TiZrV, Ag and Pd and their SR-stimulated desorption yields were measured. It has been identified that the desorption yield of the TiZrV coated sample was significantly lower than that of the bare Cu substrate, while Ag coating also exhibited similarly low desorption yield. In addition, the Pd coating demonstrated the possibility of further decreasing the gas desorption in response to the SR.
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