Abstract

The effects of soft X-ray irradiation on fluorinated diamond-like carbon (F-DLC) films were investigated using synchrotron radiation (SR). The Vickers hardness of the F-DLC films substantially increased from an initial value of about 290 to about 800 HV at a dose of 50 mA·h and the remained constant at about 1100 HV at doses of more than 300 mA·h. This dose dependence was consistent with those of the film thickness and elemental composition. The depth profile of the elemental composition inside each F-DLC film obtained by the measurement of the X-ray photoelectron spectrum (XPS) during sputtering showed that the composition ratio of fluorine was approximately constant from the surface to the neighborhood of the substrate. Namely, fluorine atoms were desorbed by SR irradiation from not only the surface but also the substrate neighborhood. Modification by SR irradiation was found to occur in the entire F-DLC film of about 200 nm thickness.

Talk to us

Join us for a 30 min session where you can share your feedback and ask us any queries you have

Schedule a call

Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.