Abstract
Fluorinated diamond-like carbon (F-DLC) films with different CF 4 flux were deposited on polished NiTi alloys by plasma immersion ion implantation and deposition (PIIID). The results show CF x bond is formed in the F-DLC films. With the increase of the CF 4 flux, the fluorine content and surface hydrophilicity of the F-DLC films are increased, while their sp 3/sp 2 ratio and surface roughness are decreased. The F-DLC films improve the surface corrosion resistance of NiTi alloys, and the corrosion resistance of the F-DLC films on the NiTi alloys first increase and then decrease with increasing the CF 4 flux. Moreover, the relationship between the corrosion resistance and its structure and surface hydrophilicity of the F-DLC films is also clarified.
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